A solid-state imaging device includes an N-type semiconductor layer, an element layer including a photoelectric conversion element and an active element, an interconnect layer providing an interconnect for the active element, and an element isolation trench penetrating the semiconductor layer. The element layer includes a P-type region and an N-type region. A first hole storage layer is formed on a surface of the semiconductor layer on a side opposite to the element layer. A second hole storage layer is formed in contact portions of the semiconductor layer and the element layer with the element isolation trench. The P-type region of the element layer and the first hole storage layer are connected to each other by the second hole storage layer.

A method for fabricating an integrated device, the method including: forming a first level including a first mono-crystal layer, where forming the first level includes forming a plurality of single crystal transistors, a plurality of pixel control circuits, and a plurality of recessed channel transistors therein; disposing an overlying oxide on top of the first level; providing a second level including a second mono-crystal layer, where the second mono-crystal layer includes a plurality of image sensors; bonding the second level to the first level via an oxide-to-oxide bond such that the second level overlays the oxide; and including disposing a third level underneath the first level, where the third level includes a plurality of third transistors, and where the plurality of third transistors each include a single crystal channel.

A NIR spectrometry device that includes different NIR PIN diodes (NPDs) and a guard PIN diode (VLPD) that are operated in a fully depletion mode. The different NPDs are located at different lateral positions corresponding to absorption depths of different NIR wavelengths. Each NPD is configured to collect electron-hole pairs (EHPs) generated by radiation that passes through a side edge of the device at a wavelength having an absorption depth that corresponds to a lateral position of the NPD. The VLPD is located at a lateral position that corresponds to a distance from the side edge that exceeds an absorption depth of visible light. The VLPD is configured to collect EHPs generated by unwanted radiation that passed through the side edge of the NIR spectrometry device and to prevent the EHPs generated by unwanted radiation to reach any of the different NPDs.

Three-dimensional stacked image sensors and method for making three-dimensional stacked image sensors are provided. A method includes attaching a first CCD side of a charge-coupled device (CCD) pixel array wafer to a first carrier side of a first carrier wafer and performing a first thinning procedure on a second CCD side of the CCD pixel array wafer while the CCD pixel array wafer is attached to the first carrier wafer. The method includes forming a passivation layer on the thinned surface of the CCD pixel array wafer and temporarily bonding a second carrier wafer to the passivation layer. The method includes performing a second thinning procedure on the second carrier side of the first carrier wafer while the second carrier wafer is bonded to the passivation layer. After performing the second thinning procedure, through-silicon vias (TSVs) are formed through the first carrier wafer.