The acoustic wave device includes a crystal substrate cut from a quartz crystal boule cut by a rotational angle specified by a right-handed Euler angle (ϕ, θ, Ψ), and at least one comb-shape excitation electrode to excite the crystal substrate to make a plate waves. The rotational angle specified by the right-handed Euler angle (ϕ, θ, Ψ) is within ranges of ϕ=0±2°, θ=16.0° to 20.0°, and Ψ=0±2°. A plate wave, among the plate waves, having a phase velocity in a range of from 3500−4000 m/s, is selected as a vibration mode of the crystal substrate. When H represents a substrate-thickness of the crystal substrate and λ represents a wavelength of the plate wave, a normalized plate thickness H/λ is in a range of 1.5<H/λ<2.0.

Provided is a coating liquid for forming a piezoelectric thin film containing lead zirconate titanate, the coating liquid including a complex precursor containing at least three kinds of metal elements of Pb, Ti, and Zr, the coating liquid being free from an exothermic peak at a temperature of 450° C. or more, or having a heat generation amount at a temperature of from 400° C. to 450° C., which is larger than a heat generation amount at a temperature of from 450° C. to 500° C., in differential thermal analysis of the coating liquid.

A piezoelectric multilayer component having a stack of sintered piezoelectric layers and inner electrodes arranged between the piezoelectric layers. A region which has poling cracks is present on the surface of at least one electrode, and the poling cracks are separated from a surface of at least one of the inner electrodes by the region having the poling cracks.

An electromechanical-transducing electronic component includes at least one element array of electromechanical transducer elements. A piezoelectric material of each transducer element is made of a composite oxide having a perovskite structure preferentially oriented to at least one of (100) and (001) planes and has a drop of diffraction intensity in a rocking curve corresponding to at least one of (200) and (002) planes measured at a position (2θ=θmax) of a diffraction peak intensity P where the diffraction intensity is largest in a diffraction intensity peak corresponding to the at least one of the (200) and (002) planes out of diffraction intensity peaks measured by an X-ray diffraction θ-2θ method. ΔP/P.sub.AVE is 20% or less where P.sub.AVE represents an average of the intensity P in the element array in the piezoelectric material of each transducer element and ΔP represents a maximum difference of the intensity P in the array.

A design structure for an integrated radio frequency (RF) filter on a backside of a semiconductor substrate includes: a device on a first side of a substrate; a radio frequency (RF) filter on a backside of the substrate; and at least one substrate conductor extending from the front side of the substrate to the backside of the substrate and electrically coupling the RF filter to the device.

The present invention provides electroactive polymer (“EAP”) transducers having improved properties. This improvement is achieved without decreasing film thickness, or by using high dielectric constant and high field, so that this approach does not adversely affect the reliability and physical properties of the resultant dielectric films. Mobile electrically active additives are added to the electrode formulation which significantly improve the performance of electroactive polymer transducers. Such additives do not need to be ionic. These electrically active additives can enable higher performance devices, smaller devices using less active area, lower voltage/power operation, and combinations of these enhancements.

A piezoelectric ceramic sputtering target containing a perovskite type oxide represented by chemical formula (I) of ABO.sub.3 as a main component, wherein the component A of the chemical formula (I) contains at least K (potassium) and/or Na (sodium), the component B of the chemical formula (I) contains at least Nb (niobium), the piezoelectric ceramic sputtering target is composed of a plurality of crystal grains; and the average particle diameter of the crystal grains is larger than 3 μm and not larger than 30 μm.

According to various embodiments, a MEMS device includes a substrate, an electrically movable heating element having a first node coupled to a first terminal of a first voltage source and the second node coupled to a reference voltage source, a first anchor anchoring the first node and a second anchor anchoring the second node of the electrically movable heating element to the substrate, and a cavity between the first anchor and the second anchor and between the electrically movable heating element and the substrate.

The invention relates to a ceramic material, comprising lead zirconate titanate, which additionally contains K and optionally Cu. The ceramic material can be used in an electroceramic component, for example a piezoelectric actuator. The invention also relates to methods for producing the ceramic material and the electronic component.

A piezoelectric ceramic electronic component that includes a piezoelectric ceramic body including at least one piezoelectric ceramic layer; and a plurality of electrodes on a surface or inside of the piezoelectric ceramic body and arranged so that the at least one piezoelectric ceramic layer is sandwiched between adjacent electrodes of the plurality of electrodes. The at least one piezoelectric ceramic layer is a ceramic sintered body containing a potassium sodium niobate-based compound and Mn. When the at least one piezoelectric ceramic layer sandwiched between the adjacent electrodes is divided into three equal parts in a thickness direction to sequentially define a first region, a second region, and a third region between the adjacent electrodes, a second Mn concentration in the second region is higher than a first Mn concentration in the first region and a third Mn concentration in the third region.