A vibration element includes: a base; a first arm continuous with the base; a second arm that is continuous with the base and is adjacent to the first arm; a first electrode disposed on the first arm, the second arm, and the base; a first piezoelectric layer that has a first polarity and that is disposed on the first electrode on the first arm; a second piezoelectric layer that has a second polarity different from the first polarity and that is disposed on the first electrode on the second arm; an insulating layer disposed on the first electrode on the base; and a second electrode disposed on the first piezoelectric layer, the second piezoelectric layer, and the insulating layer.

A piezoelectric energy hunting device and a voltage signal application system thereof are disclosed. The piezoelectric energy hunting device includes a plurality of curved piezoelectric elements, a plurality of rigid foams, and a flexible foam structure. The plurality of curved piezoelectric elements are arranged side by side with one another, wherein each curved piezoelectric element is attached to one of the rigid foams. The flexible foam structure includes a top foam and a bottom foam covering the outer surface of the plurality of curved piezoelectric elements and the plurality of rigid foams; when the flexible foam structure is compressed, the plurality of curved piezoelectric elements are simultaneously deformed, thereby generating a voltage signal. When the flexible foam structure is not compressed, the flexible foam structure and the plurality of rigid foams provide an elastic force to restore the plurality of curved piezoelectric elements.

A method of making an acoustic sensor (e.g., a piezoelectric sensor for a piezoelectric microelectromechanical systems microphone) includes forming or depositing one or more piezoelectric layers to define a beam extending between a proximal portion and a distal tip (e.g., unsupported free end), the beam having a width in plan view that is greater at a location distal of the proximal portion than at the proximal portion. The method also comprises attaching the beam to a substrate in cantilever form so that the proximal portion of the beam is anchored to the substrate and the distal tip is a free unsupported end of the beam. One or more electrodes are disposed on or in the proximal portion of the beam.

A piezoelectric element includes a piezoelectric body layer, a first electrode, a second electrode, a third electrode, and a conductor. The piezoelectric body layer has rectangular first and second principal surfaces opposing each other, and includes a piezoelectric material. The first electrode is provided on the first principal surface. The second electrode is provided on the first principal surface in such a way that the second electrode is separated from the first electrode. The third electrode is provided on the second principal surface in such a way that the third electrode opposes the first electrode. The conductor is connected to the second electrode and the third electrode. The first electrode has a round corner being rounder than a corner part of the piezoelectric body layer when seen in an opposing direction of the first and second principal surfaces.

A flexible vibration module is disclosed. The flexible vibration module includes a piezoelectric composite layer, including: a plurality of piezoelectric portions each having a piezoelectric characteristic, where at least two of the plurality of piezoelectric portions have different sizes; and a flexible portion between the plurality of piezoelectric portions.

The disclosure provides a piezoelectric element and a method for manufacturing a piezoelectric element. The disclosure provides the piezoelectric element comprising: a base layer, a piezoelectric layer which is disposed on one surface of the base layer, and in which upwardly curved convex portions and downwardly curved concave portions are continuously disposed along a first direction; and contact members which are disposed on the concave portions of the piezoelectric layer and on the one surface of the base layer to connect the piezoelectric layer to the base layer.

A film structure body has: a substrate that is a silicon substrate including an upper surface composed of a (100) plane; an orientation film including a zirconium oxide film that is cubic crystal (100)-oriented on the upper surface; and a conductive film including a platinum film that is cubic crystal (100)-oriented on the orientation film.

A multi-layered piezoelectric ceramic-containing structure There is provided a multi-layered piezoelectric ceramic-containing structure comprising: a metal substrate; a metallic adhesive layer on a surface of the metal substrate; a non-metallic thermal barrier layer on the metallic adhesive layer; and a piezoelectric ceramic layer sandwiched between a first electrode layer and a second electrode layer, wherein the first electrode layer is on the non-metallic thermal barrier layer. There is also provided a method of forming the structure.

A piezoelectric device including a substrate, a metal-insulator-metal element, a hydrogen blocking layer, a passivation layer, a first contact terminal and a second contact terminal is provided. The metal-insulator-metal element is disposed on the substrate. The hydrogen blocking layer is disposed on the metal-insulator-metal element. The passivation layer covers the hydrogen blocking layer and the metal-insulator-metal element. The first contact terminal is electrically connected to the metal-insulator-metal element. The second contact terminal is electrically connected to the metal-insulator-metal element.

A dielectric elastomer actuator comprising: a plurality of polymer layer; a plurality of stretchable electrode layers, each polymer layer being sandwiched between two electrode layers so as to control the electric field within the polymer layer; at least one stretchable charge distribution layer, each charge distribution layer being adjacent to one stretchable electrode layer and/or to one polymer layer.