In a method of manufacturing a semiconductor device including a non-volatile memory formed in a memory cell area and a logic circuit formed in a peripheral area, a mask layer is formed over a substrate in the memory cell area and the peripheral area. A resist mask is formed over the peripheral area. The mask layer in the memory cell area is patterned by using the resist mask as an etching mask. The substrate is etched in the memory cell area. After etching the substrate, a memory cell structure in the memory cell area and a gate structure for the logic circuit are formed. A dielectric layer is formed to cover the memory cell structure and the gate structure. A planarization operation is performed on the dielectric layer. An upper portion of the memory cell structure is planarized during the planarization operation.

A method for manufacturing an integrated circuit includes following steps. A substrate including a memory region and a core region is provided. At least two semiconductor word lines, two memory cells in between the two semiconductor word lines, and a semiconductor gate in between the two memory cells are formed in the memory region. A transistor device including a dummy gate is formed in the core region, and a height of the dummy gate is larger than a height of the semiconductor word lines. A protecting layer is formed on the semiconductor word lines, the memory cells, the semiconductor gate and the transistor device. A portion of the protecting layer is removed to expose the dummy gate and followed be removing the dummy gate to form a gate trench in the transistor device. Then a metal gate is formed in the gate trench.

A semiconductor structure includes a plurality of pairs of nonvolatile memory cells arranged in a row, an edge cell positioned adjacent to the pairs of nonvolatile memory cells, and first, second, third, and fourth gates. Each pair of nonvolatile memory cells includes first and second nonvolatile memory cells. The first and second gates extend across the first nonvolatile memory cells, the second gate partially overlapping the first gate, and the third and fourth gates extend across the second nonvolatile memory cells, the fourth gate partially overlapping the third gate. Each of the first, second, third, and fourth gates has an end portion that is positioned in the edge cell, and the edge cell includes a protection layer that is positioned over the end portions of the first, second, third, and fourth gates and covers an end face of the second and fourth gates.

A method of forming a nonvolatile memory device includes forming first, second, and third gate structures, with the second and third gate structures including first and second spacer structures formed on a sidewall of the second gate structure and sidewalls of the third gate structure. Impurity regions are formed through ion implantation and the first spacer structure shields the second and third gate structures during ion implantation. The second spacer structure defines resulting impurity regions.

A semiconductor device including a logic transistor, a non-volatile memory (NVM) cell and a contact etching stop layer (CESL) is shown. The CESL includes a first silicon nitride layer on the logic transistor but not on the NVM cell, a silicon oxide layer on the first silicon nitride layer and on the NVM cell, and a second silicon nitride layer disposed on the silicon oxide layer over the logic transistor and disposed on the silicon oxide layer on the NVM cell.

A method of forming a nonvolatile memory device includes forming first, second, and third gate structures, with the second and third gate structures including first and second spacer structures formed on a sidewall of the second gate structure and sidewalls of the third gate structure. Impurity regions are formed through ion implantation and the first spacer structure shields the second and third gate structures during ion implantation. The second spacer structure defines resulting impurity regions.

A method of forming a nonvolatile memory device includes forming first, second, and third gate structures, with the second and third gate structures including first and second spacer structures formed on a sidewall of the second gate structure and sidewalls of the third gate structure. Impurity regions are formed through ion implantation and the first spacer structure shields the second and third gate structures during ion implantation. The second spacer structure defines resulting impurity regions.

The present disclosure relates to an integrated circuit (IC). The IC includes a substrate, which includes a periphery region having a first substrate surface and a memory cell region having a second substrate surface. The second substrate surface is recessed within the substrate relative to the first substrate surface. A high k metal gate (HKMG) transistor is disposed on the first substrate surface and includes a HKMG gate. Two neighboring flash memory cells are disposed on the second substrate surface and include a pair of flash memory cell control gates. Top surfaces of the HKMG gate and flash memory cell control gates are co-planar.

In a semiconductor substrate, a memory cell region in which a flash memory cell is formed is defined by an element isolation region. A floating gate electrode of the flash memory cell includes a protruding portion protruding toward an erase gate electrode so as to flare from a portion located immediately below a control gate electrode. Protruding portion includes an end face of a height corresponding to a thickness, and an inclined surface continuous with end face. Protruding portion faces erase gate electrode with a tunnel oxide film interposed therebetween.

A silicon-containing nucleation layer can be employed to provide a self-aligned template for selective deposition of tungsten within backside recesses during formation of a three-dimensional memory device. The silicon-containing nucleation layer may remain as a silicon layer, converted into a tungsten silicide layer, or replaced with a tungsten nucleation layer. Tungsten deposition can proceed only on the surface of the silicon-containing nucleation layer or a layer derived therefrom in a subsequent tungsten deposition process.