A combined semiconductor controlled circuit (CSCC) includes a semiconductor controlled switch (SCS). The SCS includes anode, cathode, anode gate and cathode gate terminals connected to P.sub.1 anode, N.sub.2 cathode, N.sub.1 anode gate and P.sub.2 cathode gate layers. The SCS also includes P-N junctions between P.sub.1 anode and N.sub.1 anode gate layers, N.sub.1 anode gate and P.sub.2 cathode gate layers and P.sub.2 cathode gate and N.sub.2 cathode layers. The CSCC also includes a Zener diode having a current path flowing from the cathode terminal to the anode gate terminal, a feedback resistor connecting cathode and cathode gate terminals and a substrate. A solid-state spark chamber includes a CSCC, a DC bias voltage source and an RC load having a parallel-connected load resistor and capacitor. The solid-state spark chamber also includes a plurality of measurement terminals and a ground. A method of making a solid-state spark chamber includes connecting the above components.

A vertically integrated semiconductor device in accordance with various embodiments may include: a first semiconducting layer; a second semiconducting layer disposed over the first semiconducting layer; a third semiconducting layer disposed over the second semiconducting layer; and an electrical bypass coupled between the first semiconducting layer and the second semiconducting layer.

An integrated circuit includes an NMOS SCR in which a p-type body well of the NMOS transistor provides a base layer for a vertical NPN layer stack. The base layer is formed by implanting p-type dopants using an implant mask which has a cutout mask element over the base area, so as to block the p-type dopants from the base area. The base layer is implanted concurrently with p-type body wells under NMOS transistors in logic components in the integrated circuit. Subsequent anneals cause the p-type dopants to diffuse into the base area, forming a base with a lower doping density that adjacent regions of the body well of the NMOS transistor in the NMOS SCR. The NMOS SCR may have a symmetric transistor, a drain extended transistor, or may be a bidirectional NMOS SCR with a symmetric transistor integrated with a drain extended transistor.

An ESD protection structure comprising a thyristor structure. The thyristor structure is formed from a first P-doped section comprising a first P-doped well formed within a first region of a P-doped epitaxial layer, a first N-doped section comprising a deep N-well structure, a second P-doped section comprising a second P-doped well formed within a second region of the epitaxial layer, and a second N-doped section comprising an N-doped contact region formed within a surface of the second P-doped well. The ESD protection structure further comprises a P-doped region formed on an upper surface of the deep N-well structure and forming a part of the second P-doped section of the thyristor structure.

A reverse conducting power semiconductor device includes a plurality of thyristor cells and a freewheeling diode are integrated in a semiconductor wafer. The freewheeling diode includes a diode anode layer, a diode anode electrode, a diode cathode layer, and a diode cathode electrode. The diode cathode layer includes diode cathode layer segments, each of which is stripe-shaped and arranged within a corresponding stripe-shaped first diode anode layer segment such that a longitudinal main axis of each diode cathode layer segment extends along the longitudinal main axis of the corresponding one of the first diode anode layer segments.