Patent classifications
H01L27/11502
FERROELECTRICITY AND THERMAL RETENTION THROUGH IN SITU HYDROGEN PLASMA TREATMENT OF DOPED HAFNIUM OXIDE
Various examples are provided related to hydrogen plasma treatment of hafnium oxide. In one example, a method includes depositing a monolayer of a precursor on a first oxide monolayer; forming a second oxide monolayer by applying an oxygen (O.sub.2) plasma to the monolayer of the precursor; and creating oxygen vacancies in the second oxide monolayer by applying a hydrogen (H.sub.2) plasma to the second oxide monolayer. In another example, a device includes a hafnium oxide (HfO.sub.2) based ferroelectric thin film on a first side of a substrate and an electrode layer disposed on the HfO.sub.2 based ferroelectric thin film opposite the substrate. The HfO.sub.2 film includes a plurality of oxide monolayers including at least one HfO.sub.2 monolayer, each of the plurality of oxide monolayers having oxygen vacancies distributed throughout that oxide monolayer.
Semiconductor memory device
A semiconductor memory device includes a memory cell array including memory cells, a row decoder connected to the memory cell array through first conductive lines, write drivers and sense amplifiers connected to the memory cell array through second conductive lines, a voltage generator that supplies a first voltage to the row decoder and supplies a second voltage to the write drivers and sense amplifiers, and a data buffer that is connected to the write drivers and sense amplifiers and transfers data between the write drivers and sense amplifiers and an external device. At least one of the row decoder, the write drivers and sense amplifiers, the voltage generator, and the data buffer includes a first ferroelectric capacitor to amplify a voltage.
Artificial neuron based on ferroelectric circuit element
An artificial neuron integrated circuit including a polarizable circuit element having a first electrode, a second electrode, and a polarizable material layer disposed between the first and second electrodes, the polarizable material layer changeable between a first polarization state and a second polarization state, in response to receiving a number of voltage pulses across the first and second electrodes, the polarizable material layer to change from one of the first and second polarization states to the other of the first and second polarization states, where each of the number of voltage pulses individually is insufficient to change the polarization state.
THIN FILM STRUCTURE INCLUDING DIELECTRIC MATERIAL LAYER AND ELECTRONIC DEVICE INCLUDING THE SAME
A thin film structure including a dielectric material layer and an electronic device to which the thin film structure is applied are provided. The dielectric material layer includes a compound expressed by ABO.sub.3, wherein at least one of A and B in ABO.sub.3 is substituted and doped with another atom having a larger atom radius, and ABO.sub.3 becomes A.sub.1xA.sub.xB.sub.1yB.sub.yO.sub.3 (where x>=0, y>=0, at least one of x and y0, a dopant A has an atom radius greater than A and/or a dopant B has an atom radius greater than B) through substitution and doping. A dielectric material property of the dielectric material layer varies according to a type of a substituted and doped dopant and a substitution doping concentration.
Majority logic gate fabrication
A new class of logic gates are presented that use non-linear polar material. The logic gates include multi-input majority gates and threshold gates. Input signals in the form of analog, digital, or combination of them are driven to first terminals of non-ferroelectric capacitors. The second terminals of the non-ferroelectric capacitors are coupled to form a majority node. Majority function of the input signals occurs on this node. The majority node is then coupled to a first terminal of a capacitor comprising non-linear polar material. The second terminal of the capacitor provides the output of the logic gate, which can be driven by any suitable logic gate such as a buffer, inverter, NAND gate, NOR gate, etc. Any suitable logic or analog circuit can drive the output and inputs of the majority logic gate. As such, the majority gate of various embodiments can be combined with existing transistor technologies.
FERROELECTRIC MEMORY DEVICES WITH REDUCED EDGE DEFECTS AND METHODS FOR FORMING THE SAME
Embodiments of ferroelectric memory devices and methods for forming the ferroelectric memory devices are disclosed. In an example, a ferroelectric memory cell includes a first electrode, a second electrode, and a ferroelectric layer disposed between the first electrode and the second electrode. An edge region exposed by the first electrode and the second electrode is covered by at least one of a healing layer or a block layer.
INTEGRATION METHOD FOR MEMORY CELL
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a plurality of lower interconnect layers disposed within a lower dielectric structure over a substrate. A lower insulating structure is over the lower dielectric structure and has sidewalls extending through the lower insulating structure. A bottom electrode is arranged along the sidewalls and an upper surface of the lower insulating structure. The upper surface of the lower insulating structure extends past outermost sidewalls of the bottom electrode. A data storage structure is disposed on the bottom electrode and is configured to store a data state. A top electrode is disposed on the data storage structure. The bottom electrode has interior sidewalls coupled to a horizontally extending surface to define a recess within an upper surface of the bottom electrode. The horizontally extending surface is below the upper surface of the lower insulating structure.
Arrays of cross-point memory structures
Some embodiments include a memory array having a first set of lines extending along a first direction, and a second set of lines over the first set of lines and extending along a second direction. Lines of the second set cross lines of the first set at cross-point locations. Memory structures are within the cross-point locations. Each memory structure includes a top electrode material, a bottom electrode material and a programmable material. Rails of insulative material extend parallel to the lines of the second set and alternate with the lines of the second set along the first direction. The programmable material has first regions within the memory structures and second regions over the rails of insulative material. A planarized surface extends across the lines of the second set and across the second regions of the programmable material. Some embodiments include methods of forming memory arrays.
Memory Cells And Methods Of Forming A Capacitor Including Current Leakage Paths Having Different Total Resistances
A memory cell comprises a capacitor comprising a first capacitor electrode having laterally-spaced walls, a second capacitor electrode comprising a portion above the first capacitor electrode, and capacitor insulator material between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the capacitor insulator material. A parallel current leakage path is between the second capacitor electrode and the first capacitor electrode. The parallel current leakage path is circuit-parallel with the intrinsic current leakage path, of lower total resistance than the intrinsic current leakage path, and comprises leaker material that is everywhere laterally-outward of laterally-innermost surfaces of the laterally-spaced walls of the first capacitor electrode. Other embodiments, including methods, are disclosed.
Integrated Circuitry, Arrays Of Capacitors Of Integrated Circuitry, And Methods Used In The Fabrication Of Integrated Circuitry
Integrated circuitry comprises a plurality of features horizontally arrayed in a two-dimensional (2D) lattice. The 2D lattice comprises a parallelogram unit cell having four lattice points and four straight-line sides between pairs of the four lattice points. The parallelogram unit cell has a straight-line diagonal there-across between two diagonally-opposed of the four lattice points. The straight-line diagonal is longer than each of the four straight-line sides. Individual of the features are at one of the four lattice points and occupy a maximum horizontal area that is horizontally elongated along a direction that is horizontally angled relative to each of the four straight-line sides. Other embodiments, including methods, are disclosed