Fabrication method of three-dimensional programmable memory in this invention is related to the memory fabrication technology. The present invention includes the following steps: 1) forming a basic structure; 2) forming an interdigital structure on the basic structure; 3) forming the cylindrical memory unit: according to the preset memory structure, the required intermediate medium layer materials are set layer by layer onto the inner wall of the cylindrical trench hole, and finally the core medium material is filled in the cylindrical trench hole to form the core medium material layer. The beneficial effects of the present invention are that the prepared semiconductor memory has high memory density, low process cost, being easy to fabricate.

A 3D semiconductor device, the device including: a first level including a plurality of first single crystal transistors and a first metal layer, where the first transistors include forming memory control circuits; a second level including a plurality of second transistors; a third level including a plurality of third transistors, where the second level is above the first level, and where the third level is above the second level; a second metal layer above the third level; and a third metal layer above the second metal layer, where the second transistors are aligned to the first transistors with less than 140 nm alignment error, where the second level includes a plurality of first memory cells, where the third level includes a plurality of second memory cells, and where the memory control circuits are designed to adjust a memory write voltage according to the device specific process parameters.

A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. The capacitor comprises a first electrode electrically coupled to a source/drain region of the transistor. The first electrode comprises an annulus in a straight-line horizontal cross-section and a capacitor insulator radially inward of the first electrode annulus. A second electrode is radially inward of the capacitor insulator. A capacitor-electrode structure extends elevationally through the vertically-alternating tiers. Individual of the second electrodes of individual of the capacitors are electrically coupled to the elevationally-extending capacitor-electrode structure. A sense line is electrically coupled to another source/drain region of multiple of the transistors that are in different memory-cell tiers. Additional embodiments and aspects are disclosed, including methods.

A method of forming a semiconductor device includes: forming a first fin protruding above a substrate; forming first source/drain regions over the first fin; forming a first plurality of nanostructures over the first fin between the first source/drain regions; forming a first gate structure around the first plurality of nanostructures; and forming a first ferroelectric capacitor over and electrically coupled to the first gate structure.

A semiconductor memory device includes first conductive layers stacked on a substrate; second conductive layers stacked on the substrate and apart from the first conductive layer in a direction; third conductive layers stacked on the substrate and electrically connected to the first and second conductive layers; first insulating layers arranged in the direction to sandwich the first conductive layers; second insulating layers arranged in the direction to sandwich the second conductive layers; slit regions that sandwich the third conductive layers; and memory pillars disposed on the first and second insulating layers. The slit region is disposed between an end portion of one of the first insulating layers and an end portion of one of the second insulating layers.

A semiconductor structure includes a first semiconductor die containing a recesses, and a second semiconductor die which is embedded in the recess in the first semiconductor die and is bonded to the first semiconductor die.

Methods, systems, and devices for access line formation for a memory array are described. The techniques described herein may be used to fabricate access lines for one or more decks of a memory array. In some examples, one or more access lines of a deck may be formed using an independent processing step. For example, different fabrication processes may be used to form a plurality of access lines in a deck and to form the pillars (e.g., the memory cells) that are coupled with the access lines. In some examples, an offset between the access lines and the pillars may exist due to the components being fabricated in different processing steps.

A method of forming a vertical transistor comprising a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region comprises, in multiple time-spaced microwave annealing steps, microwave annealing at least the channel region. The multiple time-spaced microwave annealing steps reduce average concentration of elemental-form H in the channel region from what it was before start of the multiple time-spaced microwave annealing steps. The reduced average concentration of elemental-form H is 0.005 to less than 1 atomic percent. Structure embodiments are disclosed.

Embodiments of ferroelectric memory devices and methods for forming the ferroelectric memory devices are disclosed. In an example, a ferroelectric memory cell includes a first electrode, a second electrode, a ferroelectric layer disposed between the first electrode and the second electrode, and a recess between a side surface of at least one of the first electrode or the second electrode and a side surface of the ferroelectric layer.

A 3D device, the device including: a first level including logic circuits; a second level including a plurality of memory circuits, where the first level is bonded to the second level, where the bonded includes oxide to oxide bonds, and where the device includes first redundancy circuits to replace a faulty logic circuit and a second redundancy circuit to replace a faulty memory circuit.