A conductive channel structure for SiC devices, a fully integrated SiC device and a fully integrated manufacturing process thereof are provided. The fully integrated SiC device features a low-voltage region, a first high-voltage region and a second high-voltage region separated by isolation structures on the same SiC-based chip, and integrates first and second conductivity type MOS devices. The first and second conductivity type devices employ first and second conductivity type conductive channels respectively with alternating N-type and P-type first or second conductivity type areas above them. The manufacturing process includes sequentially stacking a second conductivity type epitaxial layer and buffer layer on an N-type substrate; and within the second conductivity type buffer layer, arranging first conductivity type well regions, heavily doped regions, channel regions, second conductivity type well regions, isolation structures, heavily doped regions, and channel regions.

A conductive channel structure for SiC devices, a fully integrated SiC device and a fully integrated manufacturing process thereof are provided. The fully integrated SiC device features a low-voltage region, a first high-voltage region and a second high-voltage region separated by isolation structures on the same SiC-based chip, and integrates first and second conductivity type MOS devices. The first and second conductivity type devices employ first and second conductivity type conductive channels respectively with alternating N-type and P-type first or second conductivity type areas above them. The manufacturing process includes sequentially stacking a second conductivity type epitaxial layer and buffer layer on an N-type substrate; and within the second conductivity type buffer layer, arranging first conductivity type well regions, heavily doped regions, channel regions, second conductivity type well regions, isolation structures, heavily doped regions, and channel regions.

One or more 3D transistor structures that use one or more 2D materials as transistor channels along with methods for fabricating the same are disclosed. A 3D transistor can include a first carrier nanosheet at least partially surrounded by a first 2D material and a second carrier nanosheet at least partially surrounded by a second 2D material. The transistor can include a first source/drain structure in electrical contact with a first end of the first 2D material and a first end of the second 2D material. The transistor can include a second source/drain structure in electrical contact with a second end of the first 2D material and a second end of the second 2D material. The transistor can include a gate structure at least partially surrounding the first 2D material and the second 2D material.

Integrated circuit structures having front-side-guided backside source or drain contacts are described. In an example, an integrated circuit structure includes first, second and third pluralities of horizontally stacked nanowires or fins, and first, second and third gate stacks. A first epitaxial source or drain structure is between the first plurality of horizontally stacked nanowires or fin and the second plurality of horizontally stacked nanowires or fin, and has a backside contact structure thereon. A second epitaxial source or drain structure is between the second plurality of horizontally stacked nanowires or fin and the third plurality of horizontally stacked nanowires or fin, and has a backside dielectric structure thereon, the backside dielectric structure laterally spaced apart from the backside contact structure. A dielectric gate cut plug is in contact with an end of the backside dielectric structure and with an end of the backside contact structure.

A semiconductor device includes: an integrated circuit layer including a transistor; a first interconnection layer on a front side of the integrated circuit layer; a second interconnection layer on a back side of the integrated circuit layer; and a connection terminal on the second interconnection layer, wherein the second interconnection layer includes: an insulating layer; an interconnection structure in the insulating layer; an active contact disposed between the interconnection structure and a source/drain region of the transistor and connected to the source/drain region; and a dummy metal structure spaced apart from the interconnection structure in a first direction, and wherein the dummy metal structure does not overlap the connection terminal in a second direction that is perpendicular to the first direction.

An integrated circuit device includes a first semiconductor substrate having a frontside surface and a backside surface opposite to each other, an FEOL structure on the frontside surface of the first semiconductor substrate, a first BEOL structure on the FEOL structure, a second BEOL structure on the backside surface of the first semiconductor substrate, and a second semiconductor substrate apart from the first semiconductor substrate in a vertical direction with the FEOL structure and the first BEOL structure The second semiconductor substrate is locally bonded to the first BEOL structure. The second semiconductor substrate includes a main surface facing the first BEOL structure, and the main surface of the second semiconductor substrate defines a local trench region in which trenches are defined in a regular pattern and local bonding areas bonded to the first BEOL structure.

The present disclosure relates to a manufacturing method for a power semiconductor device (1, 40), comprising: forming multiple growth templates on a carrier substrate (2), comprising at least a first plurality of hollow growth templates (18) and a second plurality of hollow growth templates (28); selectively growing a first sequence of differently doped wide bandgap semiconductor materials in each one of the first hollow growth templates (18), thereby forming a corresponding plurality of first semiconductor structures (5) of a first type, in particular n+/p/n/n+ structures; and selectively growing a second sequence of differently doped wide bandgap semiconductor materials in each one of the second hollow growth templates (28), thereby forming a corresponding plurality of second semiconductor structures (6) of a second type, in particular n+/n/p/n+ structures. The disclosure further relates to a power semiconductor device (1, 40) comprising a carrier substrate (2), at least one dielectric layer (4, 27, 31), a plurality of first semiconductor structures (5) of a first type, and a plurality of second semiconductor structures (6) of a second type formed within the at least one dielectric layer (4, 27, 31).

A semiconductor device includes a substrate including a fin-type active area and a device separation layer configured to cover both sidewalls of the fin-type active area, a pair of nanosheet stacks each including a lower nanosheet stack arranged on the fin-type active area and an upper nanosheet stack arranged on the lower nanosheet stack, an intermediate insulating layer arranged between the lower nanosheet stack and the upper nanosheet stack, a nanosheet separation wall arranged between each of the pair of nanosheet stacks and extending in a first horizontal direction, and a pair of gate lines extending on the pair of nanosheet stacks in a second horizontal direction, wherein the nanosheet separation wall separates respective lower nanosheet stacks in the pair of nanosheet stacks from each other in the second horizontal direction.

A semiconductor device may include a substrate, a lower power line in a lower portion of the substrate, metal layers on the substrate, and a protection structure that is electrically connected to the lower power line and the metal layers. The protection structure may include a doping pattern in the substrate, and a first source/drain pattern that is on the substrate and is electrically connected to an upper portion of the doping pattern. The doping pattern and the first source/drain pattern may include different dopants from each other.

A method can include providing first and second insulated gate field effect transistor (IGFET) at a second side of the IC device. First and second IGFETS can be of different conductivity types, and can include first and second source/drains (S/Ds), multiple channels, and a control gate that substantially surrounds the channels. A first power supply voltage can be received at a terminal at the first side of the IC device and coupled to the first IGFET through a conductive via and buried conductive lines. A conductive via can extend through a substrate. Buried conductive lines can be formed in a substrate below first and second IGFETs. An electrostatic discharge structure can be provided proximate to the first side and electrically connected to the first terminal. Corresponding devices and systems are also disclosed.