Exemplary modular gas blocks may include a body having inlet and outlet ends. The body may define a portion of a first gas path along a length of the body and may define a second gas path along a width of the body. The first gas path may include channel segments defined within the body. The inlet end may define a gas inlet that is coupled with the first gas path. The body may define first fluid ports that are coupled with the first gas path. A fluid port of the first fluid ports may be coupled with the gas inlet. The first fluid ports may be coupled with one another via a respective channel segment. An upper surface may define a lateral fluid port that is spaced apart from a first fluid port along the width and is coupled with the first fluid port via the second gas path.

Dilute chemical solution production device (1) has a plunger pump and a chemical solution supply pipe (3) that supply a chemical solution S from a chemical solution reservoir. The end of the chemical solution supply pipe (3) serves as an injection point 11 for the chemical solution (S). The chemical solution supply pipe (3) is inserted to an approximately central position in the radial direction of an ultrapure water passage (12), which is a first pipe, via a bore-through joint (13). Conductivity meter (14) as a conductivity measuring meter is provided on the downstream side of the bore-through joint (13), which serves as the injection point (11), and is connected to a controller so that the plunger pump (4) can be controlled in accordance with the measured value of the conductivity meter (14).

The present disclosure is directed to various methods and systems for monitoring real time efficiency of filters as well as testing the filters with tests that are similar to real world use of the filters to update technical specifications of the filters. The methods and systems monitoring the real time efficiency of the filters may utilize one or more particle counters to monitor their efficiency in real time. The data collected by the particle counters may be utilized to determine whether respective ones of the filters need to be replaced or regenerated by a backwash regeneration process. The updated technical specifications from the real world testing of the filters may be utilized in determining whether respective ones of the filters need to be replaced or regenerated. These real world testing and real time monitoring reduces the likelihood that workpieces are exposed to contaminant particles reducing scrap costs.