A method includes: receiving a substrate on a first stage by a holder of a substrate transfer mechanism; causing the substrate to pass through a first measurement part, and measuring a first true deviation amount between the holder and the substrate at a first position; causing, when transferring the substrate toward a second stage, the substrate to pass through a second measurement part, and measuring a second true deviation amount between the holder and the substrate at a second position; reflecting a difference between the first and second true deviation amounts to a physical model to correct the physical model; calculating a position correction amount of the holder on the second stage from a thermal displacement amount of the holder at the second position; and controlling the substrate transfer mechanism based on the position correction amount to perform a position correction of the holder.

In a recent article storage apparatus, it is required to be able to open and close the opening of a container by a simple operation while reducing the number of parts of the article storage apparatus.

An article storage apparatus includes a storage rack (12) on which a container (24) having an opening is set, and a lid (28) provided at a separate member from the container, and reciprocable between a closed position where the lid (28) closes the opening of the container (24) arranged at a predetermined position on the storage rack (12) and an open position where the lid (28) is retracted from the closed position to open the opening. Thereby, for example, when a plurality of containers (24) are sequentially arranged on the storage rack (12), the containers (24) can be opened and closed by a simple operation using a common lid (28).

In a recent article storage apparatus, it is required to be able to open and close the opening of a container by a simple operation while reducing the number of parts of the article storage apparatus.

An article storage apparatus includes a storage rack (12) on which a container (24) having an opening is set, and a lid (28) provided at a separate member from the container, and reciprocable between a closed position where the lid (28) closes the opening of the container (24) arranged at a predetermined position on the storage rack (12) and an open position where the lid (28) is retracted from the closed position to open the opening. Thereby, for example, when a plurality of containers (24) are sequentially arranged on the storage rack (12), the containers (24) can be opened and closed by a simple operation using a common lid (28).

A work transfer system includes a robot having a hand which holds a workpiece and a sensor which can detect external force acting on the hand, a balancer connected to the hand and can generate lifting force for lifting the hand in a vertically upward direction, a shape measuring device which conducts measuring of a shape of the workpiece, and a controller controlling the robot and the balancer based on the shape of the workpiece, and the controller adjusts a holding position of the workpiece by the hand based on the shape, and controls the lifting force so that an absolute value of the external force in the vertical direction detected by the sensor becomes equal to or smaller than a predetermined first threshold when the workpiece is held at the adjusted holding position and lifted.

Disclosed is an apparatus for transferring a substrate. The apparatus includes a transfer robot, a linear rail unit including a movable plate on which the transfer robot is mounted and a running shaft on which the movable plate travels, and a particle diffusion prevention member that prevents diffusion of particles to the outside by maintaining a differential pressure between the movable plate and the running shaft.

Disclosed is an apparatus for transferring a substrate. The apparatus includes a transfer robot, a linear rail unit including a movable plate on which the transfer robot is mounted and a running shaft on which the movable plate travels, and a particle diffusion prevention member that prevents diffusion of particles to the outside by maintaining a differential pressure between the movable plate and the running shaft.

An illustrative embodiment disclosed herein is an apparatus including a first loading tray configured to couple to a first wafer holding device holding a plurality of wafers. The first wafer holding device includes a first opening. The apparatus includes a second loading tray configured to couple to a second wafer holding device. The second wafer holding device includes a second opening. The apparatus includes a first motor coupled to the first loading tray and configured to rotate the first wafer holding device until the first opening faces the second opening to allow transfer of the plurality of wafers from the first wafer holding device to the second wafer holding device.

An illustrative embodiment disclosed herein is an apparatus including a first loading tray configured to couple to a first wafer holding device holding a plurality of wafers. The first wafer holding device includes a first opening. The apparatus includes a second loading tray configured to couple to a second wafer holding device. The second wafer holding device includes a second opening. The apparatus includes a first motor coupled to the first loading tray and configured to rotate the first wafer holding device until the first opening faces the second opening to allow transfer of the plurality of wafers from the first wafer holding device to the second wafer holding device.

A system and method for providing proxy picking of non-fungible goods within an automated storage and retrieval system is provided, which repurposes one or more automated mobile robots operating within the automated inventory management system to perform a plurality of tasks across multiple different areas of an automated store. The proxy picking system and method are configured to pick individually identified non-fungible goods according to a customer selection on an ordering screen based on measured attributes and images of the goods, the attributes selected by the customer.

A system and method for providing proxy picking of non-fungible goods within an automated storage and retrieval system is provided, which repurposes one or more automated mobile robots operating within the automated inventory management system to perform a plurality of tasks across multiple different areas of an automated store. The proxy picking system and method are configured to pick individually identified non-fungible goods according to a customer selection on an ordering screen based on measured attributes and images of the goods, the attributes selected by the customer.