A temporary storage system has a large capacity and loads and unloads articles promptly. The temporary storage system includes a grid-shaped travelling rail and buffers over processing equipment except for an area over a load port, and local vehicles travel along the rail. The carriage of the local vehicles is provided with at least a longitudinal travelling unit, at least a lateral travelling unit, and at least an advancement and retraction mechanism selectively advancing one of the longitudinal travelling unit and the lateral travelling unit to a position supported by the travelling rail, and travels along the travelling rail longitudinally and laterally, and the transfer unit of the local vehicles is provided with a hoist and an arm moving the hoist horizontally. The local vehicles stop at a position corresponding to the load port, advances the arm towards the load port, and transfers an article between the load port.

A wafer stocker capable of further improving an environment around wafers is provided. The wafer stocker includes a housing, a loading device provided on a front surface of the housing, a wafer cassette shelf arranged in the housing, a wafer transfer robot configured to move the wafers from a transfer container mounted on the loading device to a wafer cassette in the wafer cassette shelf, a wafer cassette delivery device configured to move the wafer cassette in the wafer cassette shelf to a stage having a different height, and a fan filter unit configured to generate a laminar flow in a wafer transfer space and in a wafer cassette transfer space.

The present application relates to a movable buffer, an automated material handling system and a corresponding overhead hoist transfer. The movable buffer includes: an inclined track including a first end and a second end opposite to each other, wherein the second end of the inclined track is higher than the first end of the inclined track; a storage tray connected to the inclined track, wherein the storage tray is provided with a space for accommodating a front opening unified pod, the storage tray is provided with at least one opening; and a transmission mechanism, wherein the upper surface of the transmission mechanism is connected to the lower surface of the overhead buffer, the lower surface of the transmission mechanism is connected to the inclined track, and the transmission mechanism is used for driving the storage tray to slide from the first end of the inclined track to the second end.

The article transport vehicles are equipped with wireless tags that transmit tag information, and an article transport facility includes: a transport control apparatus that controls the entrance of the vehicles into the control area such that the number of vehicles that are present in one control area is no greater than a control number; a plurality of access points; and a position detection apparatus that detects the respective positions of the vehicles with an accuracy with which a plurality of positions in the control area are distinguishable, based on the same tag information that has been received by the access points. The transport control apparatus permits a number of vehicles, the number being greater than the control number, to enter the control area if a predetermined permission condition is satisfied, based on the positional information that indicates the position of each vehicle.

An overhead transport vehicle travels along a rail on a ceiling of a building to transport a FOUP. The overhead transport vehicle includes a holding base and an upper shelf transfer device. The holding base holds at least one of a side surface and a bottom surface of the FOUP. The upper shelf transfer device moves the holding base at least upwardly while holding the FOUP. The upper shelf transfer device moves the holding base from the holding position in which the holding base holds and transfers the FOUP to the upper transfer position to transfer the FOUP, which is a different position from the holding position in a plan view and higher than the holding position.

A substrate processing apparatus includes a plurality of placement parts on which a substrate container is placed, a driving part configured to move the plurality of placement parts, a transport mechanism configured to load the substrate container into one of the plurality of placement parts and to unload the substrate container from one of the plurality of placement parts, and a controller configured to control the driving part and the transport mechanism so that by raising or lowering the transport mechanism while keeping a support of the transport mechanism unmoved in an initial position, the substrate container is delivered from one of the plurality of placement parts to the support of the transport mechanism, and the substrate container is delivered from the support of the transport mechanism to one of the plurality of placement parts.

A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.

A conveyor system includes a first conveyor line to convey an article in a first direction, a second conveyor line parallel or substantially parallel with the first conveyor line to convey the article in a second direction that is a direction opposite to the first direction, a backup line parallel or substantially parallel with the first conveyor line and the second conveyor line and able to change states between a state of conveying the article in the first direction and a state of conveying the article in the second direction, first connecting lines to convey the article between the first conveyor line and the backup line, and second connecting lines to convey the article between the second conveyor line and the backup line.

A tape mounter includes a frame delivery mechanism for delivering a ring frame, a wafer delivery mechanism for delivering a wafer, a tape affixing mechanism for affixing a dicing tape to a ring frame and a wafer and integrally combining the ring frame and the wafer with each other to turn them into a frame set, a frame cassette stage for placing a frame cassette thereon, a robot capable of removing a ring frame from the frame cassette placed on the frame cassette stage or storing the frame set into the frame cassette placed on the frame cassette stage, and a controller.

An article transport vehicle includes a travel body; a holding device that holds an article; and a lift device that is on the travel body, and that raises and lowers the holding device with respect to the travel body. The holding device includes: a connection portion connected to the lift device and an article support portion that supports the article; an elastic support mechanism that is between the article support portion and the connection portion, and that supports the article support portion against the connection portion while being elastic in a vertical direction, and a guide mechanism that guides the article support portion in the vertical direction with respect to the connection portion. The guide mechanism allows the article support portion to move parallel with the vertical direction with respect to the connection portion and restricts swinging of the article support portion with respect to the connection portion.