B81B3/0024

Microelectromechanical displacement structure and method for controlling displacement
10752492 · 2020-08-25 · ·

The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, and an end of the second beam coupled to a motion actuator; and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.

Microelectromechanical displacement structure and method for controlling displacement
10730740 · 2020-08-04 · ·

The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, an end of the second beam coupled to a motion actuator, and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.

Mems friction drive linear motor

The friction driven linear motor includes a slide element with a portion with a pair of parallel straight sides. The slide element is contiguous with a zig-zag spring-like element, which is contiguous with an anchor block, which is contiguous with a MEMS substrate. The zig-zag spring-like element deforms as the slide element moves away from the anchor block. There are opposing pairs of v-beam thermal actuators. Each actuator includes a projecting cantilever beam with an end tip cycled to impinge, angularly, the slide element and extend, therein frictionally pushing the slide. A modulating current ohmically cycles the actuator from retraction to braking to pushing. At high frequencies the cantilever beam never fully retracts. The entire linear motor is composed of and is etched on a MEMS substrate.

MEMS device comprising a membrane and an actuator

A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.

MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR
20200156929 · 2020-05-21 ·

A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.

Actuator based on carbon nanotubes and actuating system using the same

The disclosure relates to an actuator based on carbon nanotubes and actuating system using the same. The actuator includes: a carbon nanotube layer and a vanadium dioxide layer stacked with each other. Because the drastic, reversible phase transition of VO.sub.2, the actuator has giant deformation amplitude and fast response. An actuating system using the actuator is also provided.

MEMS Transducer for Interacting with a Volume Flow of a Fluid, and Method of Producing Same
20200087138 · 2020-03-19 ·

A MEMS transducer for interacting with a volume flow of a fluid includes a substrate which includes a layer stack having a plurality of layers which form a plurality of substrate planes, and which includes a cavity within the layer stack. The MEMS transducer includes an electromechanical transducer connected to the substrate within the cavity and including an element which is deformable within at least one plane of movement of the plurality of substrate planes, deformation of the deformable element within the plane of movement and the volume flow of the fluid being causally correlated. The MEMS transducer includes an electronic circuit arranged within a layer of the layer stack, the electronic circuit being connected to the electromechanical transducer and being configured to provide a conversion between a deformation of the deformable element and an electric signal.

Local haptic actuation system

A haptic actuator device includes a surface with a mechanical property responsive to localized temperature changes. The surface can include a layer or sheet comprising a shape-memory material. The haptic actuator device can further include an actuator configured to selectively deform a plurality of regions in the sheet; and a temperature controller adapted to control the temperatures of the plurality of regions. A method of localized actuation includes selectively controlling the temperatures of the plurality of regions to be above a shape-memory transition temperature of the shape-memory material; selectively deforming at least one of the regions; while maintaining the deformation of the at least one region, lowering the temperature of the at least one region to below the shape-memory transition temperature; subsequently withdrawing the applied stress; and thereafter heating the at least one region to above the shape-memory transition temperature, causing the region to return to its pre-deformation shape.

A MICROFLUIDIC ANALYTICAL PLATFORM FOR AUTONOMOUS IMMUNOASSAYS
20200039812 · 2020-02-06 ·

It is provided a microfluidic analytical device and platform for autonomous immunoassays such as ELISA comprising a porous layer having at least one slot therein and a porous arm extending from the porous layer and pivotable about the arm's root, the porous arm being pivotable between an off position wherein the porous arm is spaced away from the slot and an on position wherein the porous arm is disposed in the slot and the hydrophilic element spans the slot to define a fluid flow path across the slot; a heat-responsive shaped memory polymer (SMP) disposed underneath the porous layer, the SMP being elastically deformable in response to being heated to move the porous arm between the on and off positions; and a heat source in heat-conducting contact with the SMP to elastically deform the SMP.

DEVICE WITH A SUSPENDED MEMBRANE HAVING AN INCREASED AMPLITUDE OF DISPLACEMENT

A device with a membrane comprising a support, a membrane made of a polymer material suspended on said support and at least one actuating module arranged opposite a face of the membrane and separate from said membrane, said actuating module comprising at least one actuator comprising at least one piezoelectric material and a beam connected to the support and separate from the membrane, the piezoelectric material being connected to the beam, such that, when a difference in electric potential is applied to the piezoelectric material, a bimetal effect appears between the piezoelectric material and the beam deforming the beam in the direction of the membrane, causing the deformation of the membrane, said device also comprising at least one electrostatic actuator configured for compressing at least one part of the membrane on the at least one part of the actuating module.