Disclosed are an optical phased array chip and a method of manufacturing the same. The optical phased array chip includes a plurality of optical switches and a plurality of optical phased arrays implemented on a single integrated circuit, wherein the single integrated circuit includes a silicon substrate, a lower layer formed on an upper portion of the silicon substrate, a silicon layer formed on an upper portion of the lower layer, a first upper layer, a second upper layer and a third upper layer sequentially arranged on the silicon layer, and an electrode that penetrates through the first upper layer while being grounded to the silicon layer and is formed on an upper portion of the first upper layer.

A microelectromechanical infrared sensing device is provided, which includes a substrate, a sensing plate, a reflecting plate, a plurality of first supporting elements, a plurality of second supporting elements and a plurality of stoppers. The second supporting elements are connected to the sensing plate, such that the sensing plate is suspended above the substrate. The reflecting plate is disposed between the substrate and the sensing plate. The first supporting elements are connected to the reflecting plate, such that the reflecting plate is suspended between the substrate and the reflecting plate. When the reflecting plate moves toward the substrate and at least one of the stoppers contacts the substrate or the reflecting plate, the distance between the reflecting plate and the sensing plate increases.

An optical microphone assembly including a micro-electromechanical system (MEMS) component, a semiconductor chip, and an outer housing including at least part of a non-MEMS supporting structure and defining an aperture. The MEMS component includes an interferometric arrangement which includes a membrane and at least one optical element spaced from the membrane. The semiconductor chip includes at least one photo detector and a light source. The MEMS component is mounted on the non-MEMS supporting structure and sealed to the outer housing such that the MEMS component closes the aperture. The semiconductor chip is mounted separately from the MEMS component on the non-MEMS supporting structure in a spaced relationship with the MEMS component such that the MEMS component is displaced relative to the semiconductor chip in a direction perpendicular to a reflecting surface of the membrane. The light source is arranged to provide light to the interferometric arrangement such that a first portion of the light propagates along a first optical path via the interferometric arrangement, and a second portion of the light propagates along a second, different optical path via the interferometric arrangement such that at least one of the first and second portions is reflected by the reflecting surface of the membrane, thereby giving rise to an optical path difference between the first and second optical paths which depends on a distance between the membrane and the optical element. The at least one photo detector is arranged to detect at least part of an interference pattern generated by the first and second portions of light dependent on the optical path difference.

Provided herein are multifunctional photoresponsive compositions that can undergo conversion from an aggregation-caused quenching (ACQ) state to an aggregation-induced emission (AIE) state and macroscopic actuation and systems comprising the same and methods of use thereof.

There is provided a flexible membrane for use in a microelectromechanical transducer, the flexible membrane comprising an electromagnetic waveguide. There is further provided a microelectromechanical system comprising a substrate which comprises the flexible membrane, and a process for forming the flexible membrane. The flexible membrane may be configured to operate within an optical microphone system.

A tunable photonic device and method of fabricating the same are provided. The tunable photonic device including a substrate and an actuator having a first end supported by the substrate and a second end in spaced relation to the substrate. A photonic structure is operatively connected to the actuator and a stimulus generator configured to selectively generate a stimulus to act on the actuator. The stimulus acting on the actuator causes deformation of the actuator and moves the photonic structure between first and second positions.

Disclosed herein are MEMS devices and systems and methods of manufacturing or operating the MEMS devices and systems. In some embodiments, the MEMS devices and systems are used in imaging applications.

A microrobot is disclosed. The microrobot includes a magnet configured to provide a motive force when magnetic force of one or more electrical coils act upon the magnet, a support member coupled to the magnet, a thermo-responsive polymer member coupled to each end of the support member at a proximal end, the thermo-responsive polymer member configured to articulate when heated, wherein the thermo-responsive polymer members configured to receive light from a microrobot structured light system and convert the received light into heat.

Embodiments described herein include systems and techniques for converting (i.e., transducing) a quantum-level (e.g., single photon) signal between the three wave forms (i.e., optical, acoustic, and microwave). A suspended crystalline structure is used at the nanometer scale to accomplish the desired behavior of the system as described in detail herein. Transducers that use a common acoustic intermediary transform optical signals to acoustic signals and vice versa as well as microwave signals to acoustic signals and vice versa. Other embodiments described herein include systems and techniques for storing a qubit in phonon memory having an extended coherence time. A suspended crystalline structure with specific geometric design is used at the nanometer scale to accomplish the desired behavior of the system.

An actuator and a manufacture method thereof, an operation method thereof, and a movable device. The actuator includes a photodeformation layer and a first driving unit, the first driving unit includes at least one first light emitting device, the first light emitting device is connected to a first side of the photodeformation layer, the first light emitting device is capable of emitting first light with a first wavelength to irradiate onto the photodeformation layer, and the photodeformation layer can generate a first deformation under irradiation of the first light.