The present disclosure is directed to imaging LiDARs monolithic integration of focal plane switch array LiDARS with CMOS electronics. The CMOS wafer contains electronic circuits needed to control the focal plane array, e.g., digital addressing circuits and MEMS drivers, as well as circuits to amplify and process the detected signals, e.g., trans-impedance amplifiers (TIA), multi-stage amplifiers, analog-to-digital converters (ADC), digital signal processing (DSP), and circuits to communicate with external systems. Methods of use are also provided.

An optomechanical device comprising an assembly, one or more laser devices configured to generate a first optical signal and a second optical signal, and circuitry. The circuitry is configured to modulate the second optical signal and output the first optical signal and the second optical signal to the assembly. A first element of a first beam structure shifts the first spatial frequency of the assembly by approximately 180 degrees and a second element of a second beam structure shifts the second spatial frequency of the assembly by approximately 180 degrees such that a first optical resonance is generated, which is probed by the first optical signal interacting with the assembly, and a second optical resonance is generated, which is probed by the second optical signal interacting with the assembly, where the first optical resonance and the second optical resonance are spectrally separated by a minimum threshold.

The disclosed subject matter relates to a method of projecting an image by means of a light source emitting light pulses and an oscillating micro-electro-mechanical system (MEMS) mirror deflecting the emitted light pulses, comprising: providing a matrix of durations for each pixel, and incrementing or decrementing a pixel index whenever a respective duration indexed by the respective pixel indices in the playout matrix has lapsed; for each light pulse: retrieving the respective intensity and durations indexed by the current pixel indices, calculating an interval from at least one of said durations, emitting said light pulse with said retrieved intensity, and waiting said calculated interval before emitting the next light pulse. The disclosed subject matter further relates to a projector carrying out said method.

A microfluidic device includes: a base plate allowing an electromagnetic wave to pass therethrough and having no autofluorescence; a microwell array formed on the base plate and including a wall layer in which a plurality of through-holes are formed in a thickness direction; and a lid member disposed opposite to the base plate in a state of being separated from the wall layer, wherein microwells are formed by the base plate and the through-holes formed in the wall layer, and wherein the wall layer is formed of a material containing a colored component that absorbs an electromagnetic wave of a predetermined wavelength.

A microelectromechanical device includes a body of semiconductor material, which forms a cavity, a mobile structure, and an actuation structure. The actuation structure includes at least one first deformable element which faces the cavity and is mechanically coupled to the body and to the mobile structure, and a piezoelectric-actuation system which can be controlled so as to deform the first deformable element and cause a consequent rotation of the mobile structure. The mobile structure includes a supporting region and at least one first pillar region, the first pillar region being mechanically coupled to the first deformable element, the supporting region being set on the first pillar region and overlying at least part of the first deformable element.

An addressable display system configured for use in a mounting adapter configured to mount a personal electronic device (PED) on an aircraft includes a transparent surface configured to overlay the display surface of a PED when the PED is mounted in the mounting adapter wherein the transparent surface includes a region that is uniformly coated with a coating layer that when activated with a select excitation wavelength is configured to emit visible light to annunciate a message indicating a problem with an image displayed on a PED display; a lighting source configured to provide light in at an excitation wavelength; a MEMS (microelectromechanical systems) scanner module that is controllable to write desired symbology for annunciation at different addressable locations on the transparent surface; and an imaging device configured to capture an image of the PED display for an integrity check of data displayed on the PED display.

A microelectromechanical mirror device has a fixed structure defining a cavity. A tiltable structure carrying a reflecting surface is elastically suspended above the cavity with a main extension in a horizontal plane. Elastic elements are coupled to the tiltable structure and at least one first pair of driving arms, which carry respective regions of piezoelectric material, are biasable to cause rotation of the tiltable structure about at least one first axis of rotation parallel to a first horizontal axis of the horizontal plane. The driving arms are elastically coupled to the tiltable structure on opposite sides of the first axis of rotation and are interposed between the tiltable structure and the fixed structure. The driving arms have a thickness, along an orthogonal axis transverse to the horizontal plane, smaller than a thickness of at least some of the elastic elements coupled to the tiltable structure.

A microelectromechanical device for diffracting optical beams comprises a diffractive element suspended over a channel. The diffractive element is configured to receive an optical beam and diffract and/or transmit the optical beam based on an orientation of the diffractive element. At least one torsional actuator is operatively connected to the diffractive element. The at least one torsional actuator is configured to selectively adjust the orientation of the diffractive element. The diffractive element has a diffractive element resonant frequency that is nearly the same as a resonant frequency of the optical beam.

Described examples include an apparatus having a substrate with a substrate surface. The apparatus also includes an element with a planar surface facing the substrate surface and with a nonplanar surface opposite the planar surface facing away from the substrate surface.

An optical electronics device includes first, second and third wafers. The first wafer has a semiconductor substrate with a dielectric layer on a side of the semiconductor substrate. The second wafer has a transparent substrate with an anti-reflective coating on a side of the transparent substrate. The first wafer is bonded to the second wafer at a silicon dioxide layer between the semiconductor substrate and the anti-reflective coating. The first and second wafers include a cavity extending from the dielectric layer through the semiconductor substrate and through the silicon dioxide layer to the anti-reflective coating. The third wafer includes micromechanical elements. The third wafer is bonded to the dielectric layer, and the micromechanical elements are contained within the cavity.