Methods and apparatus for reducing the oscillation of a MEMS actuator. In one embodiment, a driving signal is generated to adjust the MEMS actuator through a set of driving wires coupled to the MEMS actuator. A motion-induced signal from the set of driving wires coupled to the MEMS actuator is received in response to the driving signal. The motion-induced signal is filtered to generate a filtered motion-induced signal. The filtered motion-induced signal is amplified to generate an amplified filtered motion-induced signal. The driving signal is adjusted based on the amplified filtered motion-induced signal to reduce the oscillation of the MEMS actuator.

An optical switch includes an array of optical fibers to conduct optical signals. A biconvex lens has a front convex surface facing the fibers' tips and has a back convex surface facing a microelectromechanical (MEMS) mirror. The MEMS mirror can be selectively oriented to reflect the optical signals incident to the MEMS mirror so the optical signal input from one fiber can be selectively routed to another of the fibers.

An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts, and a pair of first portions. One of the first portions is connected to one of the first connection portions and one of the second connection portions and extends in a inclined direction, and the other of the first portions is connected to the other of the first connection portions and the one of the second connection portions and extends in a inclined direction.

A method for manufacturing a mirror device, the method includes a first step of preparing a wafer having a support layer, a device layer, and an intermediate layer; a second step of forming a slit in the wafer such that the movable portion becomes movable with respect to the base portion by removing a part of each of the support layer, the device layer, and the intermediate layer from the wafer and forming a plurality of parts each corresponding to the structure in the wafer, after the first step; a third step of performing wet cleaning using a cleaning liquid after the second step; and a fourth step of cutting out each of the plurality of parts from the wafer after the third step. In the second step, a part of the intermediate layer is removed from the wafer by anisotropic etching.

A tactile computerized device which includes a tactile interface apparatus for displaying information and receive inputs from a user, comprising a touchscreen for receiving inputs from the user and for displaying visual data; an array of tactile pins that can It be pushed to one or more levels to protrude above the touchscreen and pulled below the touchscreen, via holes in the surface, by one or more actuators, the tactile pins, when protruding above the surface, are being capable of representing the information in the form of tactile pixels that create embossed images above the surface; actuators, for individually controlling the movement of each tactile pin and holding each the tactile pins in a desired level; a controller for converting information to be displayed that is received from the computerized device, to activation signals, activating the actuators to individually control the level of each tactile pin, such that tactile pins that protrude above the touchscreen and the remaining tactile pins being below the touchscreen will represent the information to be displayed; refreshing the displayed information by updating the level of each tactile pin; following groping of protruding tactile pins, receiving inputs from the user in the form of touching a desired location on the touchscreen.

A steerable optical transmit and receive terminal includes a MEMS-based N1 optical switch network. Each optical switch in the optical switch network uses an electrostatic MEMS structure to selectively position a translatable optical grating close to or far from an optical waveguide. In the close (ON) position, light couples between the translatable optical grating and the optical waveguide, whereas in the far (OFF) position, no appreciable light couples between the translatable optical grating and the optical waveguide. The translatable optical grating is disposed at or near a surface of the optical switch network. Thus, the translatable optical grating emits light into, or receives light from, free space. The steerable optical transmit and receive terminal also includes a lens and can steer a free space optical beam in a direction determined by which port of the N1 optical switch network is ON.

An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

Methods and apparatus for reducing the oscillation of a MEMS actuator. In one embodiment, a driving signal is generated to adjust the MEMS actuator through a set of driving wires coupled to the MEMS actuator. A motion-induced signal from the set of driving wires coupled to the MEMS actuator is received in response to the driving signal. The motion-induced signal is filtered to generate a filtered motion-induced signal. The filtered motion-induced signal is amplified to generate an amplified filtered motion-induced signal. The driving signal is adjusted based on the amplified filtered motion-induced signal to reduce the oscillation of the MEMS actuator.

A chip package for optical sensing includes a substrate, and a semiconductor device positioned on the substrate and coupled to the substrate through a first conducting element. Two molding processes are applied, to form a first colloid body on the substrate so as to cover the semiconductor device and, on the first colloid body, to form a second colloid body which covers an optical device. The optical device is electrically connected to the substrate through a second conducting element. The light transmittance of the second colloid body exceeds that of the first colloid body.

An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. An outer edge of the second connection portions includes a protrusion portion protruding in a second axis direction. The outer edge of the protrusion portion includes a linear portion extending in a first axis direction and a pair of curved portions positioned on both ends of the linear portion.