The invention presents a method for producing micro- or nano-structures of an anodized valve metal on a substrate. The method allows for accurate production of the structures, involves a small number of steps and is highly repeatable.

A fluidic device includes a first circulation flow path and a second circulation flow path which circulate a solution containing a sample material, the first circulation flow path and the second circulation flow path share at least a part of the flow path, and at least one selected from the group consisting of a capture unit which captures the sample material, a detection unit which detects the sample material, a valve, and a pump is provided on the shared flow path.

A software-controlled triangle-topology valve-cluster for use at taps or conduit junction points that facilitate fluid-based clearing, gas-based clearing, solvent-based cleaning, gas drying, small-volume burst formation, abandoned-material return, and other valuable operations is disclosed. The invention provides better contamination performance than simple passive or valve-chaperoned T-topology junctions. The valve-cluster arrangement can be implemented or approximated in various ways. For faster performance, simplified programming, or other reasons macro controllability can be provided for operating groups of valves in one or more of simultaneous operation, time-defined sequenced operation, or conditional operation, and such macros can further provide for conditional inputs or parameters. Such macro, conditional-macro, and parameterized-macro control could be implemented in software, firmware, and/or hard-wired logic. The invention can be used in reusable or reconfigurable microfluidic systems, facilitate decontaminated and green disposal and recycling of microfluidics, and other fluidic applications. Features of the invention can also be extended to gas transport.

Although most contemporary and envisioned microfluidic systems are entirely passive or have limited control capabilities, future microfluidic systems require detailed sequenced control of valves and other elements. For this software-control of transport and processes for microfluidic systems under the control of temporal and/or event-driven scripts, script authoring and editing, functional libraries, and other development tools for process and configuration control are proposed with intent towards future standardization. Scripts can respond to external inputs and can comprise conditional-logic, temporal-logic, calculations, hierarchical structure, subroutines, macros, multi-thread and parallel execution operations, procedural calls, interrupts, real-time regulatory control calculations, and element resource allocation.

Scripts can be executed by a script reader, responsive to incoming signals and information, to produce temporal control sequences for operating microfluidic devices, emulation hardware, simulation software, process visualization, etc.

Script authoring/editing tools and readers can record and store information, and can interface to with commercial software, systems, languages, and protocols.

The present disclosure relates to a microelectromechanical systems (MEMS) package featuring a flat plate having a raised edge around its perimeter serving as an anti-stiction device, and an associated method of formation. A CMOS IC is provided having a dielectric structure surrounding a plurality of conductive interconnect layers disposed over a CMOS substrate. A MEMS IC is bonded to the dielectric structure such that it forms a cavity with a lowered central portion the dielectric structure, and the MEMS IC includes a movable mass that is arranged within the cavity. The CMOS IC includes an anti-stiction plate disposed under the movable mass. The anti-stiction plate is made of a conductive material and has a raised edge surrounding at least a part of a perimeter of a substantially planar upper surface.

An example fluidic micro electromechanical system may include a substrate and a first layer supported by the substrate. The first layer forms sides of a chamber, a passage through one of the sides and a chamber and a check valve leaf. The check valve leaf is pivotable about an axis nonparallel to the substrate to open and close the passage. The system may further include a second layer over the chamber, an opening into the chamber and a resistor supported within the chamber.

A fluid-control device comprises a stack of wafers in which flow components are provided as micro-electro-mechanical systemsMEMS. The flow components are selected from fluid-control components and/or fluid-monitor components. The fluid-control device has a first flow component that is encircled, in a main plane of the stack of wafers, by a second flow component.

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

The present invention relates to a spray device, comprising a spray nozzle body (2) and a substantially planar membrane layer (6) suspended over a nozzle cavity (3) to generate microjets, especially for pharmaceutical applications, in particular preservative free formulations. The nozzle body (2,8) contains a microbial barrier, particularly a microvalve (23,24) between a fluid supply channel (9) and said cavity (3).

Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.