In an implantable hybrid lead and a method of manufacturing the implantable hybrid lead, the implantable hybrid lead includes a conduit, a line electrode and a plurality of electrode terminals. The conduit has a fine channel through which a medicine is injected. The line electrode is inserted to and is combined with an outside of the conduit, and applies electrical simulation to a selected portion of a living body. A plurality of electrode terminals is disposed at an end of the conduit by a predetermined distance.

The present invention relates to a method of manufacturing a microstructure, including: (a) forming a solid on a substrate; (b) fluidizing the solid by adding a solvent thereto; and (c) shaping the fluidized solid, and a microstructure manufactured using the method.

The present invention relates to a method for producing a super-hydrophobic surface, and to a stack having a super-hydrophobic surface prepared by the above method. The super-hydrophobic surface may be realized only by plasma etching and deposition. The super-hydrophobic surface according to the present invention has a very low work of adhesion less than or equal to 3 mJ/m.sup.2. This super-hydrophobic surface may be applied to various fields including self-cleaning surface, anti-fogging surface, automobile glass surface, and drug delivery device surface.

A method of forming microneedles where through a series of coating and etching processes microneedles are formed from a surface as an array. The microneedles have a bevelled end and bore which are formed as part of the process with no need to use a post manufacturing process to finish the microneedle.

Methods of and devices for manufacturing a multi-layered microfluidic filter are disclosed. In one embodiment, method of manufacturing a multi-layered filter comprises providing a first molding plate that includes a plurality of apertures and is coupled to a flow stream source, applying from the flow stream source a first flow stream to pass through the plurality of apertures of the first molding plate, forming a first membrane layer comprising a first set of pores using the first molding plate and the first flow stream, controlling the first flow stream to generate a second flow stream from the first set of pores of the first membrane layer, and forming a second membrane layer comprising a second set of pores using the second flow stream and the first membrane layer.

The present invention provides a microneedle, comprising a shaft of a monocrystalline material having at least three walls which are formed by a crystal plane of the monocrystalline material; and a tip connected to an end of the shaft comprising at least three walls which are formed by a crystal plane of the material. The material is preferably silicon. Two of the walls of the tip are formed by the same crystal planes as two walls of the shaft. These two walls are formed by a <111> crystal plane. Preferably, three walls of the tip are formed by a <111> crystal plane.

A method for fabricating a three-dimensional integrated circuit device includes providing a first substrate having a first crystal orientation, forming at least one or more PMOS devices overlying the first substrate, and forming a first dielectric layer overlying the one or more PMOS devices. The method also includes providing a second substrate having a second crystal orientation, forming at least one or more NMOS devices overlying the second substrate, and forming a second dielectric layer overlying the one or more NMOS devices. The method further includes coupling the first dielectric layer to the second dielectric layer to form a hybrid structure including the first substrate overlying the second substrate.

A product includes an elongated carbon-containing pillar having a bottom and a tip opposite the bottom. The width of the pillar measured 1 nm below the tip is less than 700 nm. A method includes masking a carbon-containing single crystal for defining masked regions and unmasked regions on the single crystal. The method also includes performing a plasma etch for removing portions of the unmasked regions of the single crystal, thereby defining a pillar in each unmasked region, and performing a chemical etch on the pillars at a temperature between 1200 C. and 1600 C. for selectively reducing a width of each pillar.

Out-of-plane microneedle manufacturing process comprising the simultaneous creation of a network of microneedles and the creation of a polygonal shaped hat (2) above each microneedle (1) under formation, said process comprising the following steps: providing bridges (3) between the hats (3), maintaining the bridges (3) during the remaining microneedle manufacturing steps, removing the bridges (3), together with the hats (2), when the microneedles (1) are formed.

There is described a method for making an array of micro-needles, comprising the steps of: depositing a plurality of drops of a liquid substance comprising a polymer on a surface of a starting substrate; positioning a pyroelectric substrate at a certain distance from the starting substrate in such a way that the drops deposited are positioned between said surface of the starting substrate and a surface of the pyroelectric substrate; varying the temperature of the pyroelectric substrate or a part thereof to induce on said surface of the pyroelectric substrate a charge density such that starting from the drops deposited, under the effect of an electrodynamic force, respective cones are formed having a tip facing towards the pyroelectric substrate; determining a consolidation of the cones, to form said micro-needles, preventing the tip of said cones from contacting said surfaces of the pyroelectric substrate.