A coupling device (100) for coupling two vibration systems (210, 220), which are mounted over a substrate such that the vibration systems are linearly arranged along a first direction (x) and can vibrate along the first direction (x), has a closed spring structure (110), which can be connected to the vibration systems (210, 220) at outer faces lying opposite each other along the first direction (x), and an anchor structure (120), which is rigidly connected to the substrate and which is arranged within the closed spring structure (110) and is connected to the spring structure (110) at two inner faces lying opposite each other along a second direction (y) that is orthogonal to the first direction. In this manner, the coupling device (100) connected to the vibration systems (210, 220) imparts a differential-mode coupling to the vibration systems (210, 220) as the mode with the lowest frequency.

A device with a mobile element extending along a given plane comprising at least one first, one second and one third layers extending in planes parallel to the given plane, with the first layer forming a support, the second layer comprising all or a portion of the mobile element and means for suspending the mobile element with respect to the support and the third layer comprising all or a portion of the capacitive means of which the capacitance varies according to the relative position of the mobile element with respect to the support, said capacitive means comprising at least one mobile electrode integral with one of the faces of the mobile element parallel to the given plane, and at least one fixed electrode with respect to the support, with the fixed and mobile electrodes being arranged at least partially in the same plane parallel to the given plane and at least partially above and/or below the mobile element.

A switching device includes an opening disposed in a substrate. A source is disposed adjacent the opening and has a contact surface parallel to sidewalls of the opening. A drain is disposed adjacent the opening and has a contact surface parallel to the sidewalls of the opening. A moveable gate stack includes a channel and a gate. The moveable gate stack is disposed within the opening.

An electrically-connected MEMS precision motion stage includes a stationary portion, one or more electrically-conductive MEMS flexure assemblies coupled to the stationary portion, a movable portion coupled to the one or more electrically-conductive MEMS flexure assemblies, one or more motion control assemblies disposed between the stationary portion and the movable portion and configured to control motion of the movable portion, and one or more position sensors disposed adjacent to the one or more motion control assemblies and configured to enable detection of movement of the one or more motion control assemblies, respectively.

Methods for fabricating microelectronic packages and microelectronic packages having split gyroscope structures are provided. In one embodiment, the microelectronic package includes a first Microelectromechanical Systems (MEMS) die having a first MEMS gyroscope structure thereon. The microelectronic package further includes a second MEMS die, which has a second MEMS gyroscope structure thereon and which is positioned in a stacked relationship with the first MEMS die. The first and second MEMS gyroscope structures overlap as taken along a first axis orthogonal to a principal axis of the first MEMS die.

A physical quantity sensor includes a movable electrode side fixed section, a first fixed electrode side fixed section which has a first fixed electrode section and a second fixed electrode side fixed section which has a second fixed electrode section, a movable mass section which has a first movable electrode section that has a portion facing the first fixed electrode section and a second movable electrode section that has a portion facing the second fixed electrode section and which is formed in a shape that encloses the movable electrode side fixed section, the first fixed electrode side fixed section, and the second fixed electrode side fixed section in planar view, and an elastic section which connects the movable electrode side fixed section and the movable mass section.

A physical quantity sensor includes a base substrate and an element piece bonded to the base substrate. The element piece includes fixed portions fixed to the base substrate, a first fixed electrode finger supported on the fixed portion, a second fixed electrode finger supported on the fixed portion, a fixed portion that is positioned between the fixed portions and is fixed to the base substrate, a movable portion that is displaceable with respect to the fixed portion, an elastic portion that links the fixed portion and the movable portion, a first movable electrode finger that is supported on the movable portion and that is arranged facing the first fixed electrode finger, and a second movable electrode finger that is supported on the movable portion and is arranged facing the second fixed electrode finger.

A physical quantity sensor has a first movable electrode section which has a portion facing a first fixed electrode section and a second movable electrode section which has a portion facing a second fixed electrode section, and is provided with a movable mass section which is formed in a shape which encloses a first fixed electrode side fixed section, a second fixed electrode side fixed section, a first movable electrode side fixed section, and a second movable electrode side fixed section in planar view.

A switching device includes an opening disposed in a substrate. A source is disposed adjacent the opening and has a contact surface parallel to sidewalls of the opening. A drain is disposed adjacent the opening and has a contact surface parallel to the sidewalls of the opening. A moveable gate stack includes a channel and a gate. The moveable gate stack is disposed within the opening.

A micro-electrical-mechanical system (MEMS) piezoelectric autofocus actuator includes: a fixed stage that is stationary; a moving stage that is movable along a travel direction (Z-axis); a motion control system coupling the fixed stage to the moving stage and including motion control springs; piezoelectric bending elements configured to deform the motion control system and thereby control a precise position of the moving stage relative to the fixed stage; and integrated piezoelectric motion stops that are actuatable to restrict out-of-plane motion of the moving stage along the travel direction (Z-axis). In another example, a MEMS piezoelectric autofocus actuator includes integrated motion limiting snubbers configured to limit in-plane motion of the moving stage; integrated motion stoppers configured to restrict out-of-plane motion of the moving stage along the travel direction (Z-axis); and assembled motion stoppers disposed in assembly slots and configured to restrict out-of-plane motion of the moving stage along the travel direction (Z-axis).