A mirror with a reflective layer formed thereon is supported within a frame-shaped support by two U-shaped arms. A plate-like arm connects fixation points (Q1, Q2), and a plate-like arm connects fixation points (Q3, Q4). A pair of piezoelectric elements (E11, E12) disposed along a longitudinal axis (L1) on an upper surface of an outside bridge of the arm, and a single piezoelectric element (E20) disposed along the longitudinal axis (L2) on the upper surface of an inside bridge. Similarly, a pair of piezoelectric elements (E31, E32) disposed on an upper surface of an outside bridge of the arm, and a single piezoelectric element (E40) disposed on the upper surface of an inside bridge. When a positive drive signal is applied to the piezoelectric elements (E11, E20, E31, E40) and a negative drive signal is applied to the piezoelectric elements (E12, E32), the mirror is displaced efficiently.

A physical quantity sensor includes a substrate, an element assembly, a fixed portion fixed to the substrate, a movable member that is displaced with respect to the fixed portion, a beam connecting the fixed portion and the movable member, and a structure that is fixed to the substrate. The structure has a first structure in which the first structure and the movable member are arranged in a first direction with a first gap therebetween, and a second structure in which the second structure and the movable member are arranged in a second direction orthogonal to the first and a third direction with a second gap larger than the first gap therebetween. A spring constant of the beam when the movable member is displaced around an axis along a third direction is smaller than a spring constant of the beam when the movable member is displaced in the first direction.

A physical quantity sensor includes a substrate, an element assembly having a movable member that is displaced relative to the substrate, a beam connecting the fixed portion and the movable member, and a structure fixed to the substrate. The structure has first and second structures. The first structure and the movable member are arranged in a first direction and are separated by a first gap. The second structure and the movable member are arranged in a second direction orthogonal to the first and third direction, and are separated by a second gap smaller than the first gap. A spring constant of the beam when the movable member is displaced around an axis is smaller than a spring constant of the beam when the movable member is displaced in the first direction.

An actuator includes a first driving beam that is connected to an object to be driven and includes multiple first beams extending in a direction orthogonal to a first predetermined axis, ends of each adjacent pair of the first beams being connected to each other via one of first turnaround parts such that the first driving beam forms a zig-zag bellows structure as a whole; first driving sources formed on first surfaces of the first beams; and ribs formed on second surfaces of the first beams at positions that are closer to the first predetermined axis than the first turnaround parts. The first driving sources are configured to move the first driving beam and thereby rotate the object around the first predetermined axis.

Micro-Electro-Mechanical System (MEMS) devices may include at least one actuator. The actuator has a first end attachable to more than one side of a frame of the MEMS device, and has a second end attachable to a stage of the MEMS device, particularly via a joint. Further, the second end of the actuator is configured to bend upwards or downwards when the actuator is driven and the first end is attached.

A microelectromechanical element is provided that includes a motion-limiting structure that prevents a main rotor body from coming into direct physical contact with a stator across a vertical rotor-stator gap. The motion-limiting structure includes a first stopper bump that is a protrusion on the stator that extends towards the rotor. The motion-limiting structure also includes a second stopper bump that is a protrusion on the rotor that extends from the main rotor body towards the stator.

In a general aspect, a micromachined gyroscope can include a substrate and a static mass suspended in an x-y plane over the substrate by a plurality of anchors attached to the substrate. The static mass can be attached to the anchors by anchor suspension flexures. The micromachined gyroscope can include a dynamic mass surrounding the static mass and suspended from the static mass by one or more gyroscope suspension flexures.

A control device for controlling a switching converter includes a switch controller that generates a control signal with a switching period for controlling switching of a switch of the switching converter and setting a first interval in which a current flows in the switch, a second interval in which energy is transferred onto a storage element of the switching converter, and a third, wait, interval, at the end of the second interval. The duration of the first interval is determined based on a control voltage indicating the output voltage. A pre-distortion stage receives the control voltage and generates a pre-distorted control voltage as a function of the control voltage and a relationship between one of the first and third time intervals and the switching period, wherein the switch controller is configured to control a duration of the first interval based on the pre-distorted control voltage.

A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction parallel to a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary stopper element and one secondary stopper element. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.

Embodiments of the disclosure provide an optical sensing system, a method for adjusting a receiving aperture in the optical sensing system, and an adjustable iris in the optical sensing system. The exemplary optical sensing system includes a transmitter configured to emit light beams to an environment. The optical sensing system further includes a receiver configured to receive the light beams returning from the environment. The receiver includes an adjustable iris including a plurality of rotary blades each driven by a MEMS actuator. The plurality of rotary blades collectively form an adjustable receiving aperture for the returned light beams to pass through. The plurality of rotary blades are configured to rotate in order to vary the adjustable receiving aperture during operation of the optical sensing system. The optical sensing system also includes a detector configured to detect the light beams that pass through the adjustable iris.