A device for converting mechanical energy to electrical energy that include a mechanical device comprising a seismic mass flexibly connected to a base by at least one spring, a mechano-electric transducer that is associated with the mechanical device for converting mechanical energy of the seismic mass to electric energy, and an electric circuit that is connected to the mechano-electric transducer in a way that electric current is generated in the electric circuit when the seismic mass moves relative to the base. The mechano-electric transducer is designed to adjust a force that the mechano-electric transducer can exert on the mechanical device and by that to control the conversion level of the mechanical energy to the electrical energy.

A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame.

Disclosed is an actuator including a support member, an actuating unit rotatably installed in the support member and having a first electrode installed on one side and a stimulation providing unit installed on the other side to provide stimulation by rotation, and an attraction force providing unit having a second electrode to provide an attraction force to the first electrode, wherein when an electrostatic attraction force is provided to the first electrode through the second electrode, the actuating unit pivots to enable the stimulation providing unit to apply stimulation to a sensing unit.

A micro-electro-mechanical (MEMS) device is formed in a first wafer overlying and bonded to a second wafer. The first wafer includes a fixed part, a movable part, and elastic elements that elastically couple the movable part and the fixed part. The movable part further carries actuation elements configured to control a relative movement, such as a rotation, of the movable part with respect to the fixed part. The second wafer is bonded to the first wafer through projections extending from the first wafer. The projections may, for example, be formed by selectively removing part of a semiconductor layer. A composite wafer formed by the first and second wafers is cut to form many MEMS devices.

The application describes MEMS transducers having a vent structure provided in a flexible membrane of the vent structure The vent structure comprises at least one moveable portion and the vent structure is configured such that, in response to a differential pressure across the vent structure, the moveable portion is rotatable about first and second axes of rotation, which axes of rotation extend in the plane of the membrane.

A method for forming a MEMS device may include performing a silicon-on-nothing process to form a cavity in a monocrystalline silicon substrate at a first depth relative to a top surface of the monocrystalline silicon substrate; forming, in an electrically conductive electrode region of the monocrystalline silicon substrate, an electrically insulated region extending to a second depth that is less than the first depth relative to the top surface of the monocrystalline silicon substrate; and etching the monocrystalline silicon substrate to expose a gap between a first electrode and a second electrode, wherein the second electrode is separated from the first electrode, within a first depth region, by a first distance defined by the electrically insulated region and the gap, and wherein the second electrode is separated from the first electrode, within a second depth region, by a second distance defined by the gap.

An electrostatic actuator having a stationary electrode and a fixedly cantilevered bender is described, wherein the bender includes a cantilever electrode disposed opposite to the stationary electrode in an overlapping area and being deflectable in the direction of the stationary electrode.

An optical scanner includes: a movable part including a light reflection portion that reflects light; a first shaft part that swingably supports the movable part about a first axis; a support part that supports the first shaft part; a recessed portion provided in the support part, and having an opening portion in one surface of the support part and having a side surface opening portion in a side surface of the support part connected to the one surface of the support part; and a regulating member provided in the recessed portion and partially projecting from the side surface opening portion with the projecting portion located between the support part and the movable part.

A physical quantity sensor includes a sensor element (acceleration sensor element) and a substrate (package) to which the sensor element is attached using a bonding material (resin adhesive), in which, when an elastic modulus of the bonding material is e, 2.0 GPa<e<7.8 GPa is satisfied.

A rotation rate sensor including a substrate, a drive structure, which is movable with regard to the substrate, a detection structure, and a Coriolis structure, the drive structure, the Coriolis structure, and the detection structure being essentially situated in a layer, in that an additional layer is situated essentially in parallel to the layer above or underneath the layer, a mechanical connection between the Coriolis structure and the drive structure being established with a first spring component, the first spring component being configured as a part of the additional layer, and/or a mechanical connection between the detection structure and the substrate being established with a second spring component, the second spring component being configured as a part of the additional layer.