An exhaust gas treatment system capable of purifying exhaust gas containing moisture includes superheated steam generating pipes (20, 40) and a housing (10). The superheated steam generating pipe (20, 40) is formed of a material capable of generating heat by energization, and has a flow path (200, 400) through which exhaust gas can flow, and moisture contained in the exhaust gas flowing through the flow path is converted into superheated steam by the heat. The housing (10) is provided to accommodate the superheated steam generating pipe, is formed to allow the exhaust gas before being introduced into the flow path to flow therethrough and can preheat the exhaust gas by the heat of the superheated steam generating pipe.

An exhaust gas treatment system capable of purifying exhaust gas containing moisture includes superheated steam generating pipes (20, 40) and a housing (10). The superheated steam generating pipe (20, 40) is formed of a material capable of generating heat by energization, and has a flow path (200, 400) through which exhaust gas can flow, and moisture contained in the exhaust gas flowing through the flow path is converted into superheated steam by the heat. The housing (10) is provided to accommodate the superheated steam generating pipe, is formed to allow the exhaust gas before being introduced into the flow path to flow therethrough and can preheat the exhaust gas by the heat of the superheated steam generating pipe.

Through the procedures of pretreatment, temperature swing adsorption (TSA) coarse desorption, pressure swing adsorption (PSA) purification and hydrogen purification, the hydrogenous waste gas from various procedures in the manufacturing process of semiconductor (especially silicon wafer), including the off-gas from chemical vapor deposition (CVD), doping (diffusion and ion implantation), photolithography and cleaning, the combusted and washed discharged gas of the off-gas in other procedures after field treatment and centralized treatment, or the hydrogenous waste gas entering the hydrogen discharge system are purified to meet the standard for the electronic grade hydrogen required for the manufacturing process of semiconductor, the recycling of hydrogen resources is realized, and the yield of hydrogen is greater than or equal to 70-85%. The present invention solves the technical difficulty the normal-pressure waste hydrogen recovered in the manufacturing process of semiconductor can't be returned to the manufacturing process of semiconductor for reuse.

A space habitat includes a water processing assembly including a wastewater tank and a water processing section connected to the wastewater tank. The water processing section includes a pump to urge flow of the wastewater, a mostly liquid separator to separate gas from liquid in the wastewater, a catalytic reactor located downstream of the mostly liquid separator, and one or more sensors located downstream of the catalytic reactor to determine if the wastewater is sufficiently processed. A valve directs the wastewater to a water storage tank if the sensors determine that the wastewater is sufficiently processed, and direct the wastewater to the wastewater tank if the one or more sensors determine that the wastewater is not sufficiently processed. The space habitat further includes one or more of a carbon dioxide removal system, a trace contaminant removal system, a temperature and humidity control system or a waste collection system.

A space habitat includes a water processing assembly including a wastewater tank and a water processing section connected to the wastewater tank. The water processing section includes a pump to urge flow of the wastewater, a mostly liquid separator to separate gas from liquid in the wastewater, a catalytic reactor located downstream of the mostly liquid separator, and one or more sensors located downstream of the catalytic reactor to determine if the wastewater is sufficiently processed. A valve directs the wastewater to a water storage tank if the sensors determine that the wastewater is sufficiently processed, and direct the wastewater to the wastewater tank if the one or more sensors determine that the wastewater is not sufficiently processed. The space habitat further includes one or more of a carbon dioxide removal system, a trace contaminant removal system, a temperature and humidity control system or a waste collection system.

A method of monitoring gas byproducts of a bonding system is provided. The method includes: providing a plurality of bonding systems, each of the bonding systems including a reducing gas delivery system for use in connection with a bonding operation, each of the bonding systems being configured for exhausting gas byproducts; connecting each of the bonding systems to a monitoring device using a respective gas delivery path; and monitoring a composition of at least a portion of the gas byproducts with the monitoring device.

A method of monitoring gas byproducts of a bonding system is provided. The method includes: providing a plurality of bonding systems, each of the bonding systems including a reducing gas delivery system for use in connection with a bonding operation, each of the bonding systems being configured for exhausting gas byproducts; connecting each of the bonding systems to a monitoring device using a respective gas delivery path; and monitoring a composition of at least a portion of the gas byproducts with the monitoring device.

The present invention concerns a powdery slaked lime composition having an Alpine fluidity greater than 50% and including a first fraction of particles having a size less than 32 μm and a second fraction of particles with the size greater than 32 μm, the second fraction being less than 10% by weight, compared to the total weight of the composition. The invention also relates to a method for producing same.

The present invention concerns a powdery slaked lime composition having an Alpine fluidity greater than 50% and including a first fraction of particles having a size less than 32 μm and a second fraction of particles with the size greater than 32 μm, the second fraction being less than 10% by weight, compared to the total weight of the composition. The invention also relates to a method for producing same.

The present invention concerns the field of capturing the CO.sub.2 from a gaseous effluent. The incoming gaseous effluent is burned with a fuel, so as to obtain a hot gaseous effluent rich in acidic compounds, and the hot gaseous effluent rich in acidic compounds is cooled to give a cold effluent rich in acidic compounds, which is subsequently used in the step of contacting with an absorbent solution rich in acidic compounds.