An apparatus and method for abating ozone and reducing sulfuric acid from an exhaust stream. In a semiconductor manufacturing plant the processing of wafers involves the cleaning and etching of wafers, the resultant processing may produce gasses which must be abated. The apparatus and method utilizes UV light in high doses to convert ozone (O.sub.3) to oxygen (O.sub.2). By ensuring laminar flow through the UV light chambers, the efficiency of the system is sufficient to allow for the remaining impurities in the exhaust air to be removed through the use of an RTO.

The present invention relates to a vehicular air cleaner. It is an object to provide a DOR system which can utilize a purifying function of an ozone purifying element containing an activated carbon for a long period of time. As shown in A1 and A2 of FIG. 5, in the activated carbon at an initial state, an ozone purification rate is almost the same as the same wind velocity even when a temperature condition is different, even though the ozone purification rate is changed when the wind velocity is changed. After the endurance test, the ozone purification rate is increased even at the same wind velocity when the temperature becomes high as shown in B1 and B2 of FIG. 5. Thus, the temperature condition difference affects the ozone purification rate more as the deterioration o the activated carbon continues.

The present invention relates to a vehicular air cleaner. It is an object to provide a DOR system which can utilize a purifying function of an ozone purifying element containing an activated carbon for a long period of time. As shown in A1 and A2 of FIG. 5, in the activated carbon at an initial state, an ozone purification rate is almost the same as the same wind velocity even when a temperature condition is different, even though the ozone purification rate is changed when the wind velocity is changed. After the endurance test, the ozone purification rate is increased even at the same wind velocity when the temperature becomes high as shown in B1 and B2 of FIG. 5. Thus, the temperature condition difference affects the ozone purification rate more as the deterioration o the activated carbon continues.

Disclosed is a plasma treatment apparatus that includes a cover attached to a body part, a plasma generation unit that generates plasma and provides the plasma to the cover, a gas supply unit that supplies a source gas for generating the plasma to the plasma generation unit, and an exhaust unit that exhausts an exhaust gas from the cover.

Disclosed in certain implementations is a catalysis composition that includes a metal catalyst and a support material impregnated with the metal catalyst.

The present invention provides a means of greatly reducing interferences from mercury vapor, UV-absorbing compounds and water vapor in the measurement of ozone by UV absorbance. A heated graphite scrubber destroys greater than 99% of ozone passing through it while reducing biases from typical atmospheric UV-absorbing interferents by large factors compared to conventional ozone scrubbers. Substitution of a heated graphite scrubber in place of traditional ozone scrubbers such as hopcalite, metal oxides and heated silver scrubbers, results in a more accurate measurement of ozone by reducing the responses to UV-absorbing interferences and water vapor. The heated graphite scrubber also may be used in combination with other ozone sensors, such as electrochemical and HMOS sensors, to provide a reference measurement with ozone selectively removed and thus greatly reduce contributions from interfering species in those measurement devices as well.

The present invention provides a means of greatly reducing interferences from mercury vapor, UV-absorbing compounds and water vapor in the measurement of ozone by UV absorbance. A heated graphite scrubber destroys greater than 99% of ozone passing through it while reducing biases from typical atmospheric UV-absorbing interferents by large factors compared to conventional ozone scrubbers. Substitution of a heated graphite scrubber in place of traditional ozone scrubbers such as hopcalite, metal oxides and heated silver scrubbers, results in a more accurate measurement of ozone by reducing the responses to UV-absorbing interferences and water vapor. The heated graphite scrubber also may be used in combination with other ozone sensors, such as electrochemical and HMOS sensors, to provide a reference measurement with ozone selectively removed and thus greatly reduce contributions from interfering species in those measurement devices as well.

A carbonized material, a device for removing ozone, and a method for removing ozone are provided. The carbonized material has at least a carbonyl-containing group, alkylol group, and carbon having sp.sup.2 hybrid orbital. In particular, the at least one carbonyl-containing group has a carbon content from 10 atom % to 30 atom %, based on the total carbon atoms of the at least one carbonyl-containing group, the at least one alkylol group, and the at least one carbon having sp.sup.2 hybrid orbital.

A carbonized material, a device for removing ozone, and a method for removing ozone are provided. The carbonized material has at least a carbonyl-containing group, alkylol group, and carbon having sp.sup.2 hybrid orbital. In particular, the at least one carbonyl-containing group has a carbon content from 10 atom % to 30 atom %, based on the total carbon atoms of the at least one carbonyl-containing group, the at least one alkylol group, and the at least one carbon having sp.sup.2 hybrid orbital.

Provided are ozone decomposing compositions comprising a solvent and a polymer. The polymer comprises a structural repeat unit comprising an unsubstituted or substituted carbohydrate moiety. Also provided are methods of decomposing ozone using the compositions, and spray coatings, items of clothing, fabrics, carpets, paints, sealants, finishes, air-filters, face-masks, cosmetics, creams, lotions and coatings incorporating the polymer.