Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

A gas processing system for recovering methane gas from a landfill includes a high pressure main absorber plus a relatively low pressure one. The low pressure absorber receives a gas stream from an equally low pressure flash tank. This low pressure gas stream consists mostly of carbon dioxide and methane. The methane would normally be lost due to the high cost of recompressing the carbon dioxide, but by running this mixture of carbon dioxide and methane through the low pressure absorber with a slip stream of cold absorbent, a large portion of the carbon dioxide can be removed with negligible methane losses. The remaining methane can be recycled through the high pressure main absorber without having to recompress the removed portion of carbon dioxide.

A gas processing system for recovering methane gas from a landfill includes a high pressure main absorber plus a relatively low pressure one. The low pressure absorber receives a gas stream from an equally low pressure flash tank. This low pressure gas stream consists mostly of carbon dioxide and methane. The methane would normally be lost due to the high cost of recompressing the carbon dioxide, but by running this mixture of carbon dioxide and methane through the low pressure absorber with a slip stream of cold absorbent, a large portion of the carbon dioxide can be removed with negligible methane losses. The remaining methane can be recycled through the high pressure main absorber without having to recompress the removed portion of carbon dioxide.

A method for capturing carbon from a source of volatile pollutants includes the steps of capturing a mixture of volatile pollutants and air from the source of volatile pollutants, transporting the volatile pollutant-air mixture to an oxidizer module, converting the volatile pollutants into carbon dioxide within the oxidizer module, transporting the carbon dioxide from the oxidizer module to a contactor, loading the carbon dioxide onto sorbents within the contactor, and separating the carbon dioxide from the loaded sorbents to produce a concentrated carbon dioxide product stream. The step of separating the carbon dioxide from the loaded sorbents may optionally include the steps of passing the loaded sorbents to the oxidizer module, and then heating the loaded sorbents in the oxidizer module with the combustion of the mixture of volatile pollutants and air within the oxidizer module to produce the concentrated carbon dioxide product stream while regenerating the sorbents.

A method for capturing carbon from a source of volatile pollutants includes the steps of capturing a mixture of volatile pollutants and air from the source of volatile pollutants, transporting the volatile pollutant-air mixture to an oxidizer module, converting the volatile pollutants into carbon dioxide within the oxidizer module, transporting the carbon dioxide from the oxidizer module to a contactor, loading the carbon dioxide onto sorbents within the contactor, and separating the carbon dioxide from the loaded sorbents to produce a concentrated carbon dioxide product stream. The step of separating the carbon dioxide from the loaded sorbents may optionally include the steps of passing the loaded sorbents to the oxidizer module, and then heating the loaded sorbents in the oxidizer module with the combustion of the mixture of volatile pollutants and air within the oxidizer module to produce the concentrated carbon dioxide product stream while regenerating the sorbents.

Systems for and methods of treating a fluid containing siloxanes, silanes and/or other silicon compounds. A hot box is configured to receive an initial flow of the fluid, react the flow with water at a temperature and pressure suitable for hydrolysis to generate a first treated flow, in which at least a portion is hydrolyzed to produce silicon dioxide and methane, and discharge the first treated flow. A solid removal mechanism can be configured to receive the first treated flow, separate at least a portion of the silicon dioxide as solid material, and discharge the remaining components as a second treated flow. Techniques of the present disclosure can lead to very low siloxane levels.

Systems for and methods of treating a fluid containing siloxanes, silanes and/or other silicon compounds. A hot box is configured to receive an initial flow of the fluid, react the flow with water at a temperature and pressure suitable for hydrolysis to generate a first treated flow, in which at least a portion is hydrolyzed to produce silicon dioxide and methane, and discharge the first treated flow. A solid removal mechanism can be configured to receive the first treated flow, separate at least a portion of the silicon dioxide as solid material, and discharge the remaining components as a second treated flow. Techniques of the present disclosure can lead to very low siloxane levels.

A system and method for treating flue gas of a boiler based on solar energy are provided, wherein a heat pump is connected with a heat collector via first and second valves, a carbon dioxide electrolysis chamber is connected with a flue gas pretreatment chamber and a power distribution control module for electrolyzing and reducing carbon dioxide, a gas phase separation chamber is connected with a gas phase outlet to separate a mixture, and discharge the separated gas phase products; a Fischer-Tropsch reaction chamber is connected with the gas phase separation chamber to pass the separated carbon monoxide and hydrogen into a flowing reaction cell, a liquid phase product separation chamber is connected with a liquid phase outlet to separate the liquid phase hydrocarbon fuel products, and separate and supplement electrolyte; an electrolyte cooling circulation chamber is connected with the liquid phase product separation chamber.

A carbon dioxide recovery system includes: a heat exchanger that is disposed between a boiler and a desulfurization device, configured to cool exhaust gas flowing from the boiler to the desulfurization device, and configured to heat a heat medium; and a carbon dioxide recovery device that is configured to, when supplied with heat of the heat medium, separate and recover carbon dioxide from an absorber which has absorbed the carbon dioxide.

A fossil fuel fired power plant exhaust gas clean-up and recovery system is provided to remove detrimental exhaust gases from the power plant exhaust and to produce and reclaim various commercial byproducts. A process includes mixing one liquid solution with a solubilizer in a mixing tank containing water to create a chemical reaction therein to produce an ionic solid compound and an alkaline liquid solution. Simultaneously directing the flue gases and the alkaline liquid solution into the wet scrubber to create a chemical reaction therein. The chemical reaction removes various detrimental exhaust gases from the flue gases and captures CO.sub.2 gases therefrom, which are chemically transferred into a newly formed sodium bicarbonate solution. The sodium bicarbonate solution exiting the wet scrubber is stored for resale or reuse in the subject process. The process uses various pathways to distribute the sodium bicarbonate for producing other byproducts.