A semiconductor processing system includes a semiconductor processing chamber, a pump, an exhaust line in fluid communication with the chamber through the pump, and a steam generator and reactor. The steam generator and reactor has a process conduit with an inlet in line in the exhaust line for generating superheated steam and effecting transformations of chemicals in the exhaust fluid flowing in exhaust line into the inlet.

Proposed is a photocatalytic complex. The photocatalytic complex includes a photocatalyst, and an iodine compound layer formed on a surface of the photocatalyst to cover the same and containing an iodine compound. The present disclosure enables selective degradation of hydrophilic volatile organic compounds by the use of the photocatalyst coated with the iodine compound.

A small-pore zeolite that is modified with phosphorus, is excellent in hydrothermal durability, and has an 8-membered oxygen ring structure. The 8-membered oxygen ring structure is CHA, AEI, and AFX. The small-pore zeolite incudes at least an aluminum element, a silica element, a phosphorus element, wherein the phosphorus element is defined by expression (1), and the small-pore zeolite has an 8-membered oxygen ring structure being of CHA, AEI, or AFX. The phosphorus element that modifies the zeolite is unevenly distributed and richly contained on the surface layer side of the zeolite. A method for producing a phosphorus element-containing zeolite.

A small-pore zeolite that is modified with phosphorus, is excellent in hydrothermal durability, and has an 8-membered oxygen ring structure. The 8-membered oxygen ring structure is CHA, AEI, and AFX. The small-pore zeolite incudes at least an aluminum element, a silica element, a phosphorus element, wherein the phosphorus element is defined by expression (1), and the small-pore zeolite has an 8-membered oxygen ring structure being of CHA, AEI, or AFX. The phosphorus element that modifies the zeolite is unevenly distributed and richly contained on the surface layer side of the zeolite. A method for producing a phosphorus element-containing zeolite.

An air purifier includes a hollow reactor extending in one direction, a discharge plasma generator including a first electrode disposed on an outer wall of the reactor and a second electrode which is disposed inside the reactor and generates discharge plasma in a predetermined discharge region, a plurality of dielectric particles disposed in a packed-bed of the reactor, and a liquid supply unit which supplies fine droplets into the inside of the reactor.

The invention provides a catalyst composition, including a mixture of catalytically active particles and a magnetic material, such as superparamagnetic iron oxide nanoparticles, capable of inductive heating in response to an applied alternating electromagnetic field. The catalytically active particles will typically include a base metal, platinum group metal, oxide of base metal or platinum group metal, or combination thereof, and will be adapted for use in various catalytic systems, such as diesel oxidation catalysts, catalyzed soot filters, lean NOx traps, selective catalytic reduction catalysts, ammonia oxidation catalysts, or three-way catalysts. The invention also includes a system and method for heating a catalyst material, which includes a catalyst article that includes the catalyst composition and a conductor for receiving current and generating an alternating electromagnetic field in response thereto, the conductor positioned such that the generated alternating electromagnetic field is applied to at least a portion of the magnetic material.

The invention provides a catalyst composition, including a mixture of catalytically active particles and a magnetic material, such as superparamagnetic iron oxide nanoparticles, capable of inductive heating in response to an applied alternating electromagnetic field. The catalytically active particles will typically include a base metal, platinum group metal, oxide of base metal or platinum group metal, or combination thereof, and will be adapted for use in various catalytic systems, such as diesel oxidation catalysts, catalyzed soot filters, lean NOx traps, selective catalytic reduction catalysts, ammonia oxidation catalysts, or three-way catalysts. The invention also includes a system and method for heating a catalyst material, which includes a catalyst article that includes the catalyst composition and a conductor for receiving current and generating an alternating electromagnetic field in response thereto, the conductor positioned such that the generated alternating electromagnetic field is applied to at least a portion of the magnetic material.

A method of purifying air polluted by smoke and fumes, such as from wildfires and other hazard, may deploy a series of fluid filled vessels that act as filters to trap and/or neutralize components that would foul an aqueous suspension of gold nanoparticles that is effective in converting toxic carbon monoxide to carbon dioxide. Non-toxic fluids may be used. As the gold nanoparticles are effective in a basic solution, the solution may contain a visible pH indicator or an apparatus that deploys the method may continuously monitor the pH thereof.

An object of the present invention is to provide a composition for forming an undercoat layer capable of forming an undercoat layer that does not easily peel off from the substrate, an undercoat layer formed by the composition, as well as an exhaust gas purification catalyst and an exhaust gas purification apparatus each including the undercoat layer, and, to achieve the object, the present invention provides a composition for forming an undercoat layer, the composition containing tin oxide microparticles and tin oxide nanoparticles, wherein a content of the tin oxide nanoparticles is 8% by mass or more and 30% by mass or less, with respect to a total content of the tin oxide microparticles and the tin oxide nanoparticles, an undercoat layer formed by the composition, as well as an exhaust gas purification catalyst and an exhaust gas purification apparatus each including the undercoat layer.

A preparation method for a highly chlorine- and water-resistant catalyst is provided. A mixture of at least one of SnO.sub.2, GeO.sub.2, and MoO.sub.2 with CeO.sub.2 is used as a catalyst support, face-centered cubic ruthenium oxide is used as an active component, and the catalyst with excellent chlorine- and water-resistance is prepared through selective adsorption regulation, which can realize safe and efficient purification of chlorine-containing organic waste gas at temperatures below 250° C.