A detoxifying device 100 having an inner wall 104 that forms a flow passage 103 through which treatment gas flows includes a first piping 130 that forms a part of the flow passage 103, a replaceable piping section 170 that forms a part of the flow passage 103 at the position downstream of the first piping 130, and is connected thereto for sprinkling the cleaning water to remove the solid product adhering to the inner wall 104, and a second piping 150 that forms a part of the flow passage 103 at the position downstream of the piping section 170, and is connected thereto.

Methods of filtering a feed comprising a liquid or a gas for or during the production of electronics, nanosystems or ultrapure water include filtering said feed using at least one filter assembly, wherein said at least one filter assembly includes at least one isoporous block copolymer filtration membrane.

An apparatus and method for treating a semiconductor process gas comprises a gas inlet allowing a treatment target gas (or gas to be treated) to flow therethrough; a catalytic reaction portion including a catalyst and configured to allow the treatment target gas to be brought into contact with the catalyst; a space velocity controller between the gas inlet and the catalytic reaction portion, the space velocity controller extending from the gas inlet in a diagonal direction in relation to the gas inlet; a differential pressure buffer portion between the space velocity controller and the catalytic reaction portion and including a filter; and a gas outlet configured to externally discharge a product formed as the treatment target gas comes into contact with the catalyst.

An exhaust gas processing system including a process chamber in which an exhaust gas is produced; an exhaust gas measurer receiving the exhaust gas and measuring a concentration of the exhaust gas; a solid producing gas processor receiving the exhaust gas and removing a solid producing gas contained in the exhaust gas; a gas supply supplying dilution and cooling gases to the solid producing gas processor; a processed gas measurer receiving, as a processed gas, the exhaust gas free of the solid producing gas and measuring a temperature of the processed gas and ingredients of the processed gas; and a controller receiving results of measurement of the concentration of the exhaust gas from the exhaust gas measurer and results of measurement of the temperature of the processed gas and the ingredients of the processed gas from the exhaust gas measurer and controlling the gas supply based on the measurement results.

A contaminated gas stream can be passed through an in-line mixing device, positioned in a duct containing the contaminated gas stream, to form a turbulent contaminated gas stream. One or more of the following is true: (a) a width of the in-line mixing device is no more than about 75% of a width of the duct at the position of the in-line mixing device; (b) a height of the in-line mixing device is no more than about 75% of a height of the duct at the position of the in-line mixing device; and (c) a cross-sectional area of the mixing device normal to a direction of gas flow is no more than about 75% of a cross-sectional area of the duct at the position of the in-line mixing device. An additive can be introduced into the contaminated gas stream to cause the removal of the contaminant by a particulate control device.

The invention relates to a method for separating chlorine from a gaseous anode outlet stream mass flow of an electrochemical cell reactor. In a first aspect, the method makes use of an absorption step, wherein an anode outlet stream mass flow of the electrochemical cell reactor is exposed to an organic solvent being essentially immiscible with water for achieving an exergy-efficient separation of chlorine and hydrogen chloride. In a further aspect, the method makes use of absorption step, wherein the anode outlet stream mass flow is exposed to an ionic liquid, wherein the hydrogen chloride is dissolved in said ionic liquid, thereby forming a gas flow containing essentially chlorine and a solution mass flow comprising the ionic liquid and the hydrogen chloride. The hydrogen chloride is desorbed from the solution mass flow in a desorption step. In another aspect, the method makes use of a distillation step, wherein the anode outlet stream mass flow is separated at a static pressure of at least 2 bar for an exergy-efficient separation.

Calcium hydroxide-containing compositions can be manufactured by slaking quicklime, and subsequently drying and milling the slaked product. The resulting calcium hydroxide-containing composition can have a size, steepness, pore volume, and/or other features that render the compositions suitable for treatment of exhaust gases and/or removal of contaminants. In some embodiments, the calcium hydroxide-containing compositions can include a D.sub.10 from about 0.5 microns to about 4 microns, a D.sub.90 less than about 30 microns, and a ratio of D.sub.90 to D.sub.10 less than 20, wherein individual particles include a surface area greater than or equal to about 25 m.sup.2/g.

An exhaust gas processing system including a process chamber in which an exhaust gas is produced; an exhaust gas measurer receiving the exhaust gas and measuring a concentration of the exhaust gas; a solid producing gas processor receiving the exhaust gas and removing a solid producing gas contained in the exhaust gas; a gas supply supplying dilution and cooling gases to the solid producing gas processor; a processed gas measurer receiving, as a processed gas, the exhaust gas free of the solid producing gas and measuring a temperature of the processed gas and ingredients of the processed gas; and a controller receiving results of measurement of the concentration of the exhaust gas from the exhaust gas measurer and results of measurement of the temperature of the processed gas and the ingredients of the processed gas from the exhaust gas measurer and controlling the gas supply based on the measurement results.

Disclosed is a production device and production method of electronic grade hydrofluoric acid. The method includes vaporizing the raw material industrial anhydrous hydrogen fluoride by an evaporator, transporting the vaporized hydrogen fluoride to a purification tower, obtaining a high purity hydrogen fluoride gas through rectification, transporting the high purity hydrogen fluoride gas to an absorption tower for absorption by a certain concentration of hydrofluoric acid in the liquid phase, obtaining the crude electronic grade hydrofluoric acid, and obtaining the electronic grade hydrofluoric acid product through ultrapure filtration. The disclosure overcomes the technical problems of small yield and low purity of the prior art. The production process meets the requirements of environmental protection. The disclosure is suitable for industrialized large-scale production.

The present invention concerns a powdery slaked lime composition having an Alpine fluidity greater than 50% and including a first fraction of particles having a size less than 32 μm and a second fraction of particles with the size greater than 32 μm, the second fraction being less than 10% by weight, compared to the total weight of the composition. The invention also relates to a method for producing same.