An anaesthetic halocarbon capture system is provided. The system includes a pressure-intolerant sleeve containing filter material for capturing one or more types of anaesthetic halocarbon prior to supercritical fluid extraction, and a pressure-tolerant housing into which the sleeve can be inserted so as to permit exposure of the sleeve contents to pressures required for supercritical fluid extraction.

A gas separation system includes a separation column for separating components contained in sample gas, a sample gas supplier fluidly connected to an inlet of the separation column for supplying sample gas to the separation column, a detector fluidly connected to an outlet of the separation column, a collection tube filled with an adsorbent having a property of adsorbing a target component in the sample gas under a condition of a first temperature or less and desorbing the adsorbed target component under a condition of a second temperature or more higher than the first temperature, a temperature adjuster for adjusting a temperature of the collection tube, a collection container for collecting the target component, and a switching mechanism for switching between a state in which the collection tube is connected to an outlet of the detector and a state in which the collection tube is connected to the collection container.

An abatement apparatus and method are disclosed. The abatement apparatus is for treating an effluent stream from a semiconductor processing tool and comprises: a first abatement device configured to receive the effluent stream and operable to run in an active mode to treat the effluent stream; a second abatement device operable to run in an idle mode; and control logic operable, on receipt of an indication of an alarm condition associated with the first abatement device, to run the second abatement device in the active mode. In this way, a first or primary abatement device is provided which treats the effluent stream and a second or back-up abatement device is provided, should the first abatement device malfunction. However, by only causing the second abatement device to operate in the active mode when the first abatement device malfunctions, significant energy savings can be made.

An abatement method is disclosed. The method comprises: supplying a combustion chamber of an abatement apparatus with an effluent stream containing a perfluoro compound, together with combustion reagents and a diluent; heating a combustion zone of said combustion chamber by reacting said combustion reagents to perform abatement of said perfluoro compound to stable by-products, said diluent being selected to remain inert during said abatement. In this way, the perfluoro or other compound is abated in the combustion chamber during the combustion of the combustion reagents, but without creating undesirable compounds such as, for example, NOx or other compounds.

Catalyst materials comprising iron and palladium are described. Also described are methods for preparing such materials. In addition, methods for remediating materials such as sediments and groundwater using the catalyst materials are described.

A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.

A system and process for the recovery of at least one anesthetic from a gas stream including at least two anesthetics. The recovery includes adsorption by exposing the gas stream to an adsorbent. The adsorbent is then regenerated by exposing the adsorbent to a purge gas under conditions which efficiently desorb the at least two anethetics from the adsorbent. The at least two anesthetics (and impurities or reaction products) are condensed from the purge gas and subjected to fractional distillation to provide a recovered anesthetic.

A method and device for purifying heptafluoroisobutyronitrile and a dilution gas from a used gas mixture comprising heptafluoroisobutyronitrile, a dilution gas and arcing by-products. The method comprising the steps of (a) contacting the used gas mixture with at least one adsorbent material to generate a gas stream depleted in arcing by-products; (b) contacting the gas stream depleted in by-products with a first membrane to obtain a first permeate stream rich in the dilution gas, and a first retentate stream rich in heptafluoroisobutyronitrile; (c) contacting the first permeate stream rich in the dilution gas with a second membrane to obtain a second permeate stream rich in the dilution gas and a second retentate stream rich in heptafluoroisobutyronitrile; and (d) combining the first and second retentate streams rich in heptafluoroisobutyronitrile.

[SUMMARY]

[OBJECT] To provide a per- and polyfluoroalkyl compound-adsorbing activated carbon having a high collection rate of per- and polyfluoroalkyl compounds in an atmospheric sample, and a filter body using the same.

[ACHIEVING MEANS] A per- and polyfluoroalkyl compound-adsorbing activated carbon for desorbably adsorbing per- and polyfluoroalkyl compounds in an atmospheric sample, the activated carbon including an activated carbon adsorbent having a BET specific surface area of 900 m.sup.2/g or more, a sum (V.sub.mic) of a volume of micropores of 1 nm or less of 0.35 cm.sup.3/g or more, a sum (V.sub.met) of a volume of mesopores of 2 to 60 nm of 0.02 cm.sup.3/g or more, a volume difference (V.sub.s) between the micropore volume (V.sub.mic) and the mesopore volume (V.sub.met) of 0.45 or more, and a surface oxide amount of 0.10 meq/g or more.

Methods for purification of a fluorocarbon or hydrofluorocarbon containing at least one undesired halocarbon impurities comprise flowing the fluorocarbon or hydrofluorocarbon through at least one adsorbent beds to selectively adsorb the at least one undesired halocarbon impurities through physical adsorption and/or chemical adsorption, wherein the at least one adsorbent beds contain a metal oxide supported on an adsorbent in an inert atmosphere.