Ampoules for a semiconductor manufacturing precursors and methods of use are described. The ampoules include a container with an inlet port and an outlet port. The inlet port has a showerhead that the end within the container. The showerhead has at least two angled nozzles to direct the flow of gas within the cavity so that the gas flow is not perpendicular to the surface of a liquid within the ampoule.

Fluid applicator assemblies which can be attached to or fabricated integrally with a blowing apparatus such as a leaf blower as a source of flowing air to atomize and eject atomized liquids into spaces and/or onto surfaces may include a nozzle having a nozzle body. At least one air flow cavity may be provided in the nozzle body. An air inlet slot may extend through the nozzle body and may be disposed in fluid communication with the at least one air flow cavity. A fluid ejection portion may be carried by the nozzle body. The fluid ejection portion may include an ejection head support extending from the nozzle body. A fluid ejection head may be carried by the ejection head support. A tube opening may extend through the fluid ejection portion. A fluid ejection slot may be provided in the fluid ejection head and disposed in fluid communication with the tube opening. A liquid container may be disposed in fluid communication with the fluid ejection slot through the tube opening. Other embodiments of the fluid applicator assemblies are disclosed.

A liquid atomizing apparatus includes: an atomizing body member made of a porous body having micropores connected in a three-dimensional network, the atomizing body member having a surface including a part serving as a gas pressurized-inflow surface and another part serving as a gas release surface; a liquid supply unit for supplying a liquid to the atomizing body member, the liquid being to be impregnated into the micropores of the atomizing body member; and a gas supply unit for setting gas pressure on the gas pressurized-inflow surface of the atomizing body member to be higher than on the gas release surface of the atomizing body member and injecting the gas into the micropores of the atomizing body member through the gas pressurized-inflow surface, and releasing a mist of the liquid having been impregnated in the micropores together with the gas from the gas release surface.

Sine pulse actuation, and associated systems and methods are disclosed herein. In one embodiment, a method for actuating an actuator includes: supplying a first input to the actuator, where the first input corresponds to a rising edge of a first sine function; supplying a second input to the actuator, where the second input corresponds to a generally constant amplitude plateau; and supplying a third input to the actuator, where the third input corresponds to a falling edge of a second sine function. The first, second and third inputs are control inputs or actuation inputs.

The present invention relates to a disinfection system comprising a plurality of replaceable containers, to contain a solution comprising a disinfecting agent, conduits leading from the containers to a manifold, misting apparatus to generate a mist containing the disinfecting agent and to release the mist via exit conduits, through at least one exit vent, wherein the manifold comprises a plenum which receives a volume of air for controlling balance of air pressure as the air is released through the at least one exit vent. The present invention also relates to a method of controlling use of a disinfection system.

Infectious diseases may be acquired in public areas such as transportation terminals, shopping centers, schools, hospitals, restaurants and hotels. Large surface areas may be disinfected using a spray system to distribute a suitable fluid such as a disinfectant. Many existing spray systems are large and unwieldy causing operator fatigue. Some spray systems have large, heavy external tanks that provide fluid to the spray system using an external fluid hose. Disclosed is an improved portable spraying system that may be carried by a system operator. The improved system has a tank, a pump, a valve, a nozzle, and a fan all powered by a battery. The tank, the pump, and the battery are arranged to minimize operator fatigue. With the valve set to the priming position, fluid recirculates to prime the pump. Once the pump is primed, the valve is turned to the spray position to begin spraying.

The present invention provides a decontamination device capable of accomplishing a decontamination effect with a proper amount of decontamination agent supplied to a room to be decontaminated by employing a mist circulation dispersion mechanism and reducing the duration of operations such as aeration to achieve more efficient decontamination works.

The decontamination device of the present invention includes a mist supply means and a mist circulation dispersion mechanism, and the mist supply means converts a chemical for decontamination into a mist for decontamination, and supplies the same to the inside of a working chamber. The mist circulation dispersion mechanism includes vibration boards disposed adjacent to internal wall surfaces of the working chamber, and the vibration boards are subjected to ultrasonic vibration to generate sound flows from board surfaces by an ultrasound in the vertical direction. The mist for decontamination supplied to the inside of the working chamber is pressed by acoustic radiation pressure to circulate and disperse the mist for decontamination in the working chamber.

A rotary atomization device includes a housing, a blowing device, a rotating drive device, a rotating shaft, a gas tube and an atomizing structure. The housing has an atomization room and a containing room which are communicated by a gas channel. The blowing device is arranged in the containing room, and the rotating drive device is arranged in the containing room or the atomization room. A drive shaft of the rotating drive device is connected with the rotating shaft connected with the gas tube. One end of the gas tube is arranged in the atomization room and has a gas inlet, and the other end is extended out of the housing and has a gas outlet. The atomizing structure is disposed on the bottom of the atomization room, and the blowing device blows towards the gas channel. The rotary atomization device can realize rotary spraying.

An atomizing device including an atomizing nozzle is disclosed. The atomizing nozzle includes a spray head and an atomizing nozzle body. The spray head is arranged in the atomizing nozzle body. A through hole in the spray head and a liquid through hole in the atomizing nozzle body form a liquid channel used for delivering liquid. An airtight air channel used for delivering a spiral air flow formed by air is formed in the surface of the spray head and intersects with the liquid channel at an end, provided with the through hole, of the spray head. An air flow is sprayed out via the air channel outside of the sprayer head to form a spiral vortex, so that a siphon suction force is generated to suck liquid in the liquid channel.

An atomizer includes a first piezoelectric pump, a first flow path, a reservoir part, and a second flow path. The first piezoelectric pump ejects gas through an outlet. The first flow path has a first end and a second end. The first end of the first flow path is connected to the outlet of the first piezoelectric pump. A connection point is provided between the first and second ends of the first flow path. Liquid is to be stored in the reservoir part. The second flow path has a first end and a second end. The first end of the second flow path is connected to the liquid reservoir part. The second end of the second flow path is connected to the connection point.