Provided is a substrate processing apparatus. The substrate processing apparatus includes a swing nozzle that is arranged on one side of the support module, moves in a swing manner, and sprays a chemical solution to the substrate, a sensor arranged on one side of the swing nozzle to sense movement of the swing nozzle, an electromagnet and a magnet installed on the other side of the swing nozzle so as to be able to adjust spacing relative to each other, and a controller for receiving a sensing result of the sensor and performing a damping operation to the swing nozzle by providing power to the electromagnet to generate an attractive force or repulsive force between the electromagnet and the magnet.

A retractable cleaning apparatus for spray cleaning of pipes or vessels comprises a rotatable spray head configured to spray the interior of the pipes or vessels with a cleaning liquid. The rotatable spray head is linearly movable between a retracted position and a cleaning position along a longitudinal axis of the rotatable spray head. The rotatable spray head is rotatable about the longitudinal axis of the rotatable spray head independent of a flow of the cleaning liquid. The rotatable spray head is rotatable with an angular velocity that is independent of the flow of the cleaning liquid. The angular velocity may be within a range of 0.1-1.3 radians per second. A system including a retractable cleaning apparatus is also disclosed.

To reduce an influence of a flow of ambient atmosphere and the like on flying of a droplet ejected from a nozzle of an inkjet head. To exhaust vapor of a solvent contained in a coated film while reducing an influence on flying of the droplet. An exhaust device for inkjet coating includes: a cover that covers at least a target range on an object to be coated, the target range being a range in which a droplet lands that is ejected from an ejection nozzle of an inkjet head to a surface of the object to be coated; a closing member that closes a gap between the cover and the object to be coated around the target range; an external communication portion through which a compartment surrounded by the cover, the object to be coated, and the closing member communicates with an outside; and an exhaust mechanism configured to exhaust air from the compartment.

A coating apparatus includes a process chamber, a rotation device, and a rotation holder. The rotation device is disposed in the process chamber. The rotation holder is connected to the rotation device. The rotation holder includes two extension elements, two retaining elements, and two pins. The two extension elements are disposed around a center axis and separated from each other, wherein each of the two extension elements has a side surface. Each of the two retaining elements has a bottom surface, one of the two retaining elements is connected to one of the side surfaces, and the other of the two retaining elements is connected to the other of the side surfaces. One of the two pins is connected to one of the bottom surfaces, and the other of the two pins is connected to the other of the bottom surfaces.

Disclosed herein is an end effector, coupleable to a robot, for delivering a material to a surface. The end effector comprises a material applicator assembly, comprising a central shaft and an applicator co-rotatably coupled to the central shaft and configured to apply the material to the surface. The end effector also comprises a material supply carrier, comprising a base and a supply of the material coupled to the base. The material from the supply is feedable to the applicator. The end effector further comprises an actuator that rotatably couples the material supply carrier with the material applicator assembly. The actuator is operable to rotate the material supply carrier relative to the material applicator assembly.

A sensor assembly includes a first sensor window defining a first plane, a second sensor window fixed relative to the first sensor window and defining a second plane different than the first plane, and a nozzle positioned to deliver fluid to the first and second sensor windows. The nozzle is translatable along a first axis, rotatable about the first axis, and rotatable about a second axis transverse to the first axis.

An apparatus and method for removing support material from and/or smoothing surfaces of an additively manufactured part (the AM part) is disclosed. The apparatus may include a chamber, a support surface within the chamber, and one or more nozzles within the chamber. The nozzles may be the same size or different sizes. The support surface may be configured to support the AM part. The support surface may have one or more openings sized and configured to allow the fluid to pass through the opening(s). The nozzles may be configured to spray a fluid at the AM part, and the spray may be an atomized or semi-atomized spray of the fluid.

An apparatus for treating a surface has a vehicle including an extensible boom. A multi-purpose hood is attached to the boom. The hood includes at least one nozzle for spraying a fluid through an outlet of the hood, the nozzle adapted for reciprocating, non-rotational movement in a generally linear direction relative to the opening in the hood. The multi-purpose hood may be adapted for rotating independently about three different axes, and may include a first actuator for controlling a roll of the hood, a second actuator for controlling a yaw of the hood, a third actuator for controlling a pitch of the hood, and a fourth actuator for controlling an extension of the boom and a second actuator for controlling a swing of the boom. The extensible boom may be connected to a telescoping conduit for communicating fluid along the boom to or from the multi-purpose hood. Related methods are also disclosed.

Various embodiments include cleaning flat objects with pulsed jets, based on a principle of enhancing formation of droplets of a liquid cleaning-medium by increasing the boundary surface-area between spray jets emitted from nozzles of the cleaning unit and the surrounding atmosphere. In various embodiments, droplet-formation enhancement means are located inside and at or near outlets of nozzles and comprise, for example, a jet splitter, threaded grooves on an inner surface of the nozzle body, or a thin tube to supply gas into the flow of the liquid cleaning-medium to form gas bubbles in the medium. Other factors considered include a mass ratio between the droplets and the contaminant particles, a velocity of the droplets, organization and sequence of jets that impinges on various surfaces of the flat object, and flows that rinse separated particles and other contaminants. Other methods and apparatuses are disclosed.

Embodiments relate to surface treating a substrate, spraying precursor onto the substrate using supercritical carrier fluid, and post-treating the substrate sprayed with the precursor to form a layer with nanometer thickness of material on the substrate. A spraying assembly for spraying the precursor includes one or more spraying modules and one or more radical injectors at one or more sides of the spraying module. A differential spread mechanism is provided between the spraying module and the radical injectors to inject spread gas that isolates the sprayed precursor and radicals generated by the radical injectors. As relative movement between the substrate and the spraying assembly is made, portions of the substrate is exposed to first radicals, sprayed with precursors either one of the spraying modules or both spraying modules using supercritical carrier fluid, and then exposed to second radicals again.