Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.

Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.

A transport device includes a transporting belt having a support face configured to support a medium and configured to transport the medium, a device main body in which the transporting belt is provided, and a cleaning unit configured to clean the support face with a liquid. The cleaning unit includes a storage unit in which the liquid is stored, a flow path member through which the liquid discharged from the storage unit and returned to the storage unit passes, and a filter unit detachably provided to the flow path member. Here, the filter unit is configured to be pulled out in a direction away from the device main body.

A transport device includes a transporting belt having a support face configured to support a medium and configured to transport the medium, a device main body in which the transporting belt is provided, and a cleaning unit configured to clean the support face with a liquid. The cleaning unit includes a storage unit in which the liquid is stored, a flow path member through which the liquid discharged from the storage unit and returned to the storage unit passes, and a filter unit detachably provided to the flow path member. Here, the filter unit is configured to be pulled out in a direction away from the device main body.

An apparatus for processing a substrate may include a process chamber providing a processing space in which a predetermined process is performed on a substrate and a chemical liquid supply device for supplying a chemical liquid onto the substrate dispose din the process chamber. The chemical liquid supply device may include a chemical liquid supply reservoir for storing the chemical liquid, a chemical liquid supply line for providing a path through which the chemical liquid is supplied from the chemical liquid reservoir onto the substrate, at least one heating member for heating the chemical liquid provided from the chemical liquid reservoir, a sensing member including a first sensor for measuring a temperature of the chemical liquid entering the at least one heating member and a second sensor for measuring a temperature of the chemical liquid exiting the at least one heating member, and a control member for controlling an operation of the at least one heating member based on a difference between the temperatures measured by the first and the second sensors.

An apparatus for processing a substrate may include a process chamber providing a processing space in which a predetermined process is performed on a substrate and a chemical liquid supply device for supplying a chemical liquid onto the substrate dispose din the process chamber. The chemical liquid supply device may include a chemical liquid supply reservoir for storing the chemical liquid, a chemical liquid supply line for providing a path through which the chemical liquid is supplied from the chemical liquid reservoir onto the substrate, at least one heating member for heating the chemical liquid provided from the chemical liquid reservoir, a sensing member including a first sensor for measuring a temperature of the chemical liquid entering the at least one heating member and a second sensor for measuring a temperature of the chemical liquid exiting the at least one heating member, and a control member for controlling an operation of the at least one heating member based on a difference between the temperatures measured by the first and the second sensors.

A system for and method of removing residues, deposits, and debris from a substrate that has been marked by a chemical etching process is disclosed. The system includes one or more upper sprayers that deposit a cleaning solution to a top surface of the product as it passes beneath the one or more upper sprayers. The system further includes at least one upper brush that operates to scrub the top surface of the product after the cleaning solution has been applied thereto. The system optionally includes one or more lower sprayers and lower brushes to clean a bottom surface of the product as it is conveyed through the system. The system further includes an air knife system that assists with drying the product prior to exiting the system. The system further includes a controller that is operable to adjust various system parameters.

A system for and method of removing residues, deposits, and debris from a substrate that has been marked by a chemical etching process is disclosed. The system includes one or more upper sprayers that deposit a cleaning solution to a top surface of the product as it passes beneath the one or more upper sprayers. The system further includes at least one upper brush that operates to scrub the top surface of the product after the cleaning solution has been applied thereto. The system optionally includes one or more lower sprayers and lower brushes to clean a bottom surface of the product as it is conveyed through the system. The system further includes an air knife system that assists with drying the product prior to exiting the system. The system further includes a controller that is operable to adjust various system parameters.

A device adapted to deliver fruit and/or vegetable juices, pulps, salads and composts, etc., each fruit or vegetable being selectively served raw or cooked, with a scope to obtain maximal nutritional intake. The device comprises a housing and a transparent showcase accommodating an ample variety of fruits and vegetables, equipment for the preparation of the above fruit/vegetable products including at least one juicer appliance and one blender appliance for alternatively preparing fruit/vegetable juice and pulp respectively delivered through downwardly inclined pipe members into a container within product delivery compartments and equipment for cleaning the juicer and blender appliances and corresponding pipe members in between sequential fruit/vegetable servings, comprising an autonomous circuitry and container of cleaning water supply and container for collection of sewerage. The device also comprises a kettle for cooking selected fruits/vegetables, an unpeeling device and cutting device.

A device adapted to deliver fruit and/or vegetable juices, pulps, salads and composts, etc., each fruit or vegetable being selectively served raw or cooked, with a scope to obtain maximal nutritional intake. The device comprises a housing and a transparent showcase accommodating an ample variety of fruits and vegetables, equipment for the preparation of the above fruit/vegetable products including at least one juicer appliance and one blender appliance for alternatively preparing fruit/vegetable juice and pulp respectively delivered through downwardly inclined pipe members into a container within product delivery compartments and equipment for cleaning the juicer and blender appliances and corresponding pipe members in between sequential fruit/vegetable servings, comprising an autonomous circuitry and container of cleaning water supply and container for collection of sewerage. The device also comprises a kettle for cooking selected fruits/vegetables, an unpeeling device and cutting device.