A chuck for a machine tool having a rotation spindle with a main axis of rotation. The chuck comprises a base plate, a first rotatable plate eccentrically mounted on the base plate, a second rotatable plate eccentrically mounted on the first rotatable plate, balancing means for aligning a principal axis of inertia of the chuck with the main axis of rotation and a holding mechanism. The chuck is provided with an actuating mechanism for angularly displacing the first rotatable plate around a first rotation axis over a first angle of rotation and/or the second rotatable plate around a second rotation axis over a second angle of rotation such that the position of the object with respect to the main axis of rotation can be altered.

A chuck for a machine tool having a rotation spindle with a main axis of rotation. The chuck comprises a base plate, a first rotatable plate eccentrically mounted on the base plate, a second rotatable plate eccentrically mounted on the first rotatable plate, balancing means for aligning a principal axis of inertia of the chuck with the main axis of rotation and a holding mechanism. The chuck is provided with an actuating mechanism for angularly displacing the first rotatable plate around a first rotation axis over a first angle of rotation and/or the second rotatable plate around a second rotation axis over a second angle of rotation such that the position of the object with respect to the main axis of rotation can be altered.

The present application discloses a flexible clamping device. A sleeve is fixed on a base, an adjusting shaft is connected with a mandrel and the sleeve respectively, the mandrel is fixed on the upper end face of the adjusting shaft, and the bottom outer wall of the adjusting shaft is in small clearance fit with the inner wall of the sleeve; a lock screw is installed on the upper right side wall of the sleeve, a pinion is installed on the upper left side wall of the sleeve via a rotating shaft, saw teeth are provided on the side wall of a floating shaft, and the pinion can be engaged with the side teeth of the floating shaft.

A clamping unit for a chuck of a machine tool spindle contains a threaded shaft for adjusting the clamping jaws of the chuck. The threaded shaft is axially adjustable in the clamping unit by means of a threaded nut connected to a rotor of a servomotor actuator. An electrically actuable, releasable clutch has a first clutch element, which is connected in a rotationally secure and axially displaceable manner to the threaded shaft, and a second clutch element, which cooperates with the first clutch element and is connected in a rotationally secure manner to the rotor. When the clutch is activated, the threaded shaft and the threaded nut are mutually connected in a rotationally secure manner and prevent axial displacement of the threaded shaft.

A quick detachable and adjustable magnetic seat for sleeve includes a magnetic device and a detachable positioning device. The magnetic device includes a first end and a second end. The first end is magnetic. The detachable positioning device includes a connecting end slidably disposed on the second end of the magnetic device, such that the magnetic device axially slides against the detachable positioning device. The detachable positioning device further includes a resilient quick detach device disposed on one end of the detachable positioning device away from the connecting end, whereby the detachable positioning device is removably disposed in a sleeve. Therefore, when the sleeve is damaged or broken, the adjustable magnetic seat is efficiently removed from the sleeve and re-installed in a new sleeve replacement.

Grinding, lapping and polishing basically work by making scratches in the body being ground, lapped or polished. The scratches typically are linear. The scratches gives rise to a directionality component of friction: the friction coefficient is less in the direction along the scratch than in a direction orthogonal, or across, the scratch. In a wafer handling/chucking situation, one wants the wafer to settle on the chuck, which involves the outer regions of the wafer moving radially with respect to the chuck. One can reduce friction in the radial direction by giving the lapping scratches a preferred orientation, namely, radial. This can be achieved by making the final passes of the lapping tool move predominantly in radial directions.

A fabrication system may generally comprise an x-y positioning assembly, a clamping head to receive an end effector, wherein the clamping head is coupled to the x-y positioning assembly, a z positioning assembly, a platform including a surface that is rigid and substantially planar, wherein the platform is coupled to the z positioning assembly, and a controller operably coupled to the x-y positioning assembly, end effector, z positioning assembly, and platform. Methods of using the fabrication system are also described.

A fabrication system may generally comprise an x-y positioning assembly, a clamping head to receive an end effector, wherein the clamping head is coupled to the x-y positioning assembly, a z positioning assembly, a platform including a surface that is rigid and substantially planar, wherein the platform is coupled to the z positioning assembly, and a controller operably coupled to the x-y positioning assembly, end effector, z positioning assembly, and platform. Methods of using the fabrication system are also described.

Embodiments of the present invention provide electrostatic chucks for operating at elevated temperatures. One embodiment of the present invention provides a dielectric chuck body for an electrostatic chuck. The dielectric chuck body includes a substrate supporting plate having a top surface for receiving a substrate and a back surface opposing the top surface, an electrode embedded in the substrate supporting plate, and a shaft having a first end attached to the back surface of the substrate supporting plate and a second end opposing the first end. The second end is configured to contact a cooling base and provide temperature control to the substrate supporting plate. The shaft is hollow having a sidewall enclosing a central opening, and two or more channels formed through the sidewall and extending from the first end to the second end.

The invention relates to a drill chuck which has a drilling needle receptacle device for removable receiving of a drilling needle (1), a hollow cylindrical magnetic holder for the drilling needle receptacle device and a coupling device for torque transfer from a drive device to the drilling needle receptacle device. The drilling needle receptacle device, in which a drilling needle (1) having a flattened end section (1) can be received, has a receptacle element (7), at least two clamping bodies (10) and a clamping insert (6). The receptacle element (7) has at least one cylindrical section (72) having a recess (71) and the clamping insert (6) has counter-molded bodies (61) which supplement the clamping bodies (10) and which extend away from a stop disc (62). The stop disc (62) contacts a face of the cylindrical section (72) and has a lead-through opening (63) for the drilling needle (1). The counter-molded body (61) and the clamping bodies (10) are designed in respect of the dimensions and shape thereof for arrangement in the recess (71) and for clamping receiving of the flattened end section (1) of the drilling needle (1) between the clamping bodies (10) and the counter-molded bodies (61). The invention further relates to a drilling needle and to a drilling needle-drill chuck assembly.