The invention relates to a drill chuck which has a drilling needle receptacle device for removable receiving of a drilling needle (1), a hollow cylindrical magnetic holder for the drilling needle receptacle device and a coupling device for torque transfer from a drive device to the drilling needle receptacle device. The drilling needle receptacle device, in which a drilling needle (1) having a flattened end section (1) can be received, has a receptacle element (7), at least two clamping bodies (10) and a clamping insert (6). The receptacle element (7) has at least one cylindrical section (72) having a recess (71) and the clamping insert (6) has counter-molded bodies (61) which supplement the clamping bodies (10) and which extend away from a stop disc (62). The stop disc (62) contacts a face of the cylindrical section (72) and has a lead-through opening (63) for the drilling needle (1). The counter-molded body (61) and the clamping bodies (10) are designed in respect of the dimensions and shape thereof for arrangement in the recess (71) and for clamping receiving of the flattened end section (1) of the drilling needle (1) between the clamping bodies (10) and the counter-molded bodies (61). The invention further relates to a drilling needle and to a drilling needle-drill chuck assembly.

Disclosed are a magnetic force control device for controlling a magnetic force on an interaction surface and a magnetic body holding device using the same. The magnetic force control device includes a first pole piece having a first interaction surface, a second pole piece having a second interaction surface, a stationary magnet fixed between the first pole piece and the second pole piece, a rotary magnet provided between the first pole piece and the second pole piece and configured to be rotatable to define a first arrangement state and a second arrangement state, and a coil wound around at least one of the first pole piece and the second pole piece, wherein the first arrangement state and the second arrangement state are switched by rotating the rotary magnet by controlling a current applied to the coil.

A work holder includes: a first holding part having three attracting members that are arranged circumferentially apart from each other to attract an axial end face of an annular work; and a second holding part having a contacting member that is held in contact with an inner periphery or outer periphery of the work and restricts radial movement of the work.

A work holder includes: a first holding part having three attracting members that are arranged circumferentially apart from each other to attract an axial end face of an annular work; and a second holding part having a contacting member that is held in contact with an inner periphery or outer periphery of the work and restricts radial movement of the work.

Disclosed is a substrate treating apparatus. The substrate treating apparatus includes a spin head, a support shaft connected to a lower portion of the spin head to support the spin head, a pin located on an upper surface of the spin head to support the substrate and having a space in the interior thereof, and a nozzle member configured to supply a liquid to the substrate located on the spin head.

Disclosed is a substrate treating apparatus. The substrate treating apparatus includes a spin head, a support shaft connected to a lower portion of the spin head to support the spin head, a pin located on an upper surface of the spin head to support the substrate and having a space in the interior thereof, and a nozzle member configured to supply a liquid to the substrate located on the spin head.

In order to create a mechatronic drive module as a replacement for a hydraulically operated piston, it is proposed that a piston and an axial unit be provided, wherein the piston is mounted non-rotatably, but longitudinally displaceably, with respect to the axial unit, whereas the axial unit is arranged rotatably in a housing, but immovably in the longitudinal direction. The two elements mesh via a gate, in which guide pins are guided and which has a control cam, which are inclined in the direction of a longitudinal axis. A rotation of the axial unit, which can be generated by means of an electric motor, is converted to a piston stroke based on the form of the control cam in the gate and the rotationally fixed mounting of the piston.

Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.

Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.

In a clamping device (1) for machine tools (2) that is equipped with a power-operated chuck (5) and an electric drive motor (11) with a changeover function for triggering clamping movements, a motion converter (31) as well as a force accumulator (51) for maintaining the clamping force, which comprises several spring packs (52) supported on an adjustment element (32) of the motion converter (31), the spring packs (52) are each only arranged on one side of the adjustment element (32). In addition, a pressure piece (53) interacting with the adjustment element (32) is firmly connected to several spacer elements (57), each of which carries a stop disc (61) and passes through the spring packs (52) as well as a spacer (66). The spacer elements (57) and the spacers (66) can be adjusted relative to one another and the spacers (66) interact with spacer pins (71) which are guided through the pressure piece (53) and are supported on the wall (24) of the housing (21) opposite to the spring packs (52).

Due to this embodiment, the spring packs (52) are always preloaded and do not have any axial play, and the adjustment movements of the pressure piece can thus be registered and evaluated directly. Rather, the spring packs (52) have a defined preload at all times, with the effect that the operating method is improved compared to embodiments of prior art.