A tool gripping mechanism includes a tool holder and a shaft to which the tool holder is attached. The shaft is fixed to a rotary shaft of a spindle device. A plurality of magnets are disposed in pairs on concentric circles on surfaces of the tool holder and the shaft which face each other. When the tool holder is in a specific phase with respect to the shaft, the magnets of the tool holder and the magnets of the shaft attract each other, and the tool holder is aligned with respect to the shaft in that phase.

A tool gripping mechanism includes a tool holder and a shaft to which the tool holder is attached. The shaft is fixed to a rotary shaft of a spindle device. A plurality of magnets are disposed in pairs on concentric circles on surfaces of the tool holder and the shaft which face each other. When the tool holder is in a specific phase with respect to the shaft, the magnets of the tool holder and the magnets of the shaft attract each other, and the tool holder is aligned with respect to the shaft in that phase.

A wafer support device includes a susceptor, at least one lift pin, at least one lift pin support base and at least one pad. The susceptor has a bottom surface and a top surface configured to support a wafer. The susceptor has at least one through hole extending between the bottom surface and the top surface. The lift pin is at least partially telescopically received in the through hole of the susceptor. The lift pin support base has at least one coupling feature thereon. The pad is detachably coupled with the coupling feature and supports the lift pin.

A wafer bonder apparatus, includes a lower chuck, an upper chuck, a process chamber and three adjustment mechanisms. The three adjustment mechanisms are arranged around a top lid spaced apart from each other and are located outside of the process chamber. Each adjustment mechanism includes a component for sensing contact to the upper chuck, a component for adjusting the pre-load force of the upper chuck, and a component for leveling the upper chuck.

A support table to support a surface of a substrate, wherein the support table includes: a base surface substantially parallel to the surface of the substrate, a plurality of burls protruding above the base surface, each of the burls having a respective distal end and a first height above the base surface, the burls arranged such that, when the substrate is supported by the support table, the substrate is supported by the respective distal ends, and a plurality of elongate raised protrusions separated by gaps, each of the elongate raised protrusions having a second height above the base surface, wherein the elongate raised protrusions protrude above the base surface between the burls, and the second height is less than the first height; wherein the protrusions are arranged such that a plurality of the gaps are aligned to form a straight gas flow path towards an edge of the base surface.

The invention relates to a tool connection for arranging a riveting tool on a riveting tool receptacle, having a contact surface arranged on the riveting tool for supporting the riveting tool on a supporting surface arranged on the riveting tool receptacle. In order to provide a tool connection for arranging a riveting tool on a riveting tool receptacle, by means of which a repetitive riveting operation can be carried out without damage and it is particularly simple to replace the riveting tool, it is provided that a journal is arranged on one of the riveting tool or riveting tool receptacle and a journal receptacle is arranged on the other of the riveting tool or riveting tool receptacle, the journal can be introduced into and removed from the journal receptacle and the riveting tool can be releasably locked to the riveting tool receptacle by a magnetic force.

The invention relates to a tool connection for arranging a riveting tool on a riveting tool receptacle, having a contact surface arranged on the riveting tool for supporting the riveting tool on a supporting surface arranged on the riveting tool receptacle. In order to provide a tool connection for arranging a riveting tool on a riveting tool receptacle, by means of which a repetitive riveting operation can be carried out without damage and it is particularly simple to replace the riveting tool, it is provided that a journal is arranged on one of the riveting tool or riveting tool receptacle and a journal receptacle is arranged on the other of the riveting tool or riveting tool receptacle, the journal can be introduced into and removed from the journal receptacle and the riveting tool can be releasably locked to the riveting tool receptacle by a magnetic force.

A high-speed low runout spindle assembly is provided. The spindle assembly includes a friction drive wheel configured to be coupled to an output shaft of a motor. The friction drive wheel is configured and disposed to directly contact a shank of a bit. A set of bearings is configured to contact the shank of the bit. A bit clamp assembly includes a clamp bearing having a central through-hole dimensioned to accept a lower portion of the shank of the bit. The bit clamp assembly is configured to hold the bit in contact with the set of bearings.

A device (1) for controlling operation of a chuck (2), the device (1) comprising a chuck (2) for centering a workpiece (3) to be machined; at least one electric motor (6) connected to at least one moveable clamping jaw (4), the at least one movable clamping jaw (4) being configured to be selectively moved by the at least one electric motor (6); a first inductive transmission device; a second inductive transmission device (8) disposed in alignment with the first inductive transmission device (7) such that measurement signals and/or electric power are inductively transmitted between the first transmission device (7) and the second transmission device (8); and an external control device (11) by means of which command and monitoring data required for the operation of the at least one clamping jaw (4), and for the operation and locking of the electric motors (6) can be entered and/or read.

A clamping unit, in particular for use in a machining center, or a turning or milling center, wherein the clamping unit comprises an external housing (12), preferably having a cylindrical basic design, an internal housing (15) accommodated in the external housing (12), and an internal cylinder (11) that is retained in the internal housing (15) such that it can be displaced in a vertical adjustment direction A when in the operating state, which is designed for transferring a pressure or tensile force for clamping purposes, wherein the internal housing (15) is supported in the external housing (12) by means of springs (13, 14), and is supported with respect to the external housing (12) such that it can be displaced in the adjustment direction A, and thus forms a spring force storage unit (21), and wherein an electric motor (16) is disposed inside the clamping unit, integrated therein, preferably encompassed by the external housing (12), furthermore, preferably accommodated inside the internal housing (15), in order to apply a force in the adjustment direction A to the internal cylinder (11) via drive means (17-20) disposed therein.