Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.

Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.

A multipurpose chuck having provisions for gripping the outer diameter of workpieces; alternatively, the inner diameter of workpieces; alternatively gripping parts by a two vise jaw, or in combination with a magnet attraction. The chuck having six radially movable jaws that can be used in combination, or by itself with vise grip jaws, which can be used in combination or by itself with a magnetic workpiece attachment in a single chuck.

A multipurpose chuck having provisions for gripping the outer diameter of workpieces; alternatively, the inner diameter of workpieces; alternatively gripping parts by a two vise jaw, or in combination with a magnet attraction. The chuck having six radially movable jaws that can be used in combination, or by itself with vise grip jaws, which can be used in combination or by itself with a magnetic workpiece attachment in a single chuck.

Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.

Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.

A device for clamping a workpiece has a receiving head in a housing connected to a rotary drive with a rigid drive connection between a drive motor and the receiving head, radially adjustable clamping jaws connected to a clamping drive externally clamping the workpiece, and linear drives displacing the clamping jaws and forming the clamping drive driven jointly by a gear transmission with a central gear coaxial to the drive shaft of the receiving head by a separate drive motor. The central gear can be driven synchronously with the receiving head in the clamping position of the clamping jaws, and the rotary drive for the central gear comprises a rigid drive connection between its drive motor and the central gear or a superimposed gear comprising two input shafts drive-connected to the drive motor for the rotary drive of the receiving head and to the drive motor for the central gear.

A device for clamping a workpiece has a receiving head in a housing connected to a rotary drive with a rigid drive connection between a drive motor and the receiving head, radially adjustable clamping jaws connected to a clamping drive externally clamping the workpiece, and linear drives displacing the clamping jaws and forming the clamping drive driven jointly by a gear transmission with a central gear coaxial to the drive shaft of the receiving head by a separate drive motor. The central gear can be driven synchronously with the receiving head in the clamping position of the clamping jaws, and the rotary drive for the central gear comprises a rigid drive connection between its drive motor and the central gear or a superimposed gear comprising two input shafts drive-connected to the drive motor for the rotary drive of the receiving head and to the drive motor for the central gear.

A mounting system includes a magnet core arranged for positioning inside a magnet coil. The magnet core includes a cylindrical, elongate receiving region with a central axis, a rapid-mounting mandrel arranged for insertion into the cylindrical, elongate receiving region, and a discoid workpiece driver, detachably fastened to the rapid-mounting mandrel and extending normal to the central axis. A one of the magnet core or the rapid-mounting mandrel includes a rapid-mounting device for mounting the rapid-mounting mandrel in the magnet core. Example embodiments may includes the rapid-mounting device integrated into the magnet core or integrated into the rapid-mounting mandrel.

A mounting system includes a magnet core arranged for positioning inside a magnet coil. The magnet core includes a cylindrical, elongate receiving region with a central axis, a rapid-mounting mandrel arranged for insertion into the cylindrical, elongate receiving region, and a discoid workpiece driver, detachably fastened to the rapid-mounting mandrel and extending normal to the central axis. A one of the magnet core or the rapid-mounting mandrel includes a rapid-mounting device for mounting the rapid-mounting mandrel in the magnet core. Example embodiments may includes the rapid-mounting device integrated into the magnet core or integrated into the rapid-mounting mandrel.