A laser working machine includes a first slot provided at another end portion of a first body. In the first slot, either one of a first shielding plate and a first light transmissive plate is selectively insertable in a sealed manner. The first shielding plate is configured to block a first optical path. The first light transmissive plate has a first optical path hole through which the first optical path and a second optical path are connectable. The laser working machine includes a second slot provided at a second body end portion of a second body. In the second slot, either one of a second shielding plate and a second light transmissive plate is selectively insertable in a sealed manner. The second shielding plate is configured to block the second optical path. The second light transmissive plate has a second optical path hole.

This laser welding device includes a tubular portion. The tubular portion includes a first tubular portion and a second tubular portion. The second tubular portion has a constant cross-sectional shape orthogonal to an irradiation direction along the irradiation direction E. The tubular portion has a predetermined length that is longer than a length of a chamber in the irradiation direction.

A method is disclosed for additive manufacturing a three-dimensional object layer-by-layer including depositing a layer of material on a bed surface or a previously deposited layer of the object to form the object layer-by-layer; providing energy to the material after each layer is deposited with the energy being provided by an energy source that forms an energized beam directed at the material; altering a property of a gas surrounding the material and through which the energized beam extends to alter a property of the object constructed from the material; melting the material with the energized beam to form a melted pool of liquefied material; and allowing the material to solidify to bond the material to a previous layer of material of the object.

The present disclosure describes three-dimensional (3D) printing apparatuses, processes, software, and systems for producing high quality 3D objects. Described herein are printing apparatuses that facilitate control of water vapor concentration during one or more printing operations.

An electromagnetic radiation steering mechanism An electromagnetic radiation steering mechanism configured to steer electromagnetic radiation to address a specific location within a two-dimensional field of view comprising a first optical element having an associated first actuator configured to rotate the first optical element about a first rotational axis to change a first coordinate of a first steering axis in the two-dimensional field of view, a second optical element having an associated second actuator configured to rotate the second optical element about a second rotational axis to change a second coordinate of a second steering axis in the two-dimensional field of view, and an electromagnetic radiation manipulator optically disposed between the first and second optical elements. A first angle is defined between the first and second rotational axes and a second angle is defined between the first and second steering axes. The electromagnetic radiation manipulator is configured to introduce a difference between the first angle and the second angle.

Embodiments of the present disclosure generally relate to apparatus and methods for semiconductor processing, more particularly, to a thermal process chamber. The thermal process chamber includes a substrate support, a first plurality of heating elements disposed over or below the substrate support, and a spot heating module disposed over the substrate support. The spot heating module is utilized to provide local heating of cold regions on a substrate disposed on the substrate support during processing. Localized heating of the substrate improves temperature profile, which in turn improves deposition uniformity.

A laser marking system for marking a product comprising a laser source for providing a laser beam, a marking head for projecting the laser beam on to the product, a housing comprising an extraction device configured to generate a flow of extraction fluid for extracting matter generated by an interaction between the laser beam and the product, and a controller for controlling the laser source and the marking head. The laser marking system further comprises an umbilical assembly connecting the housing to the marking head.

Varied embodiments of a laser-based machine tool, and techniques for controlling the same are provided. Some embodiments relate to techniques to facilitate uniform and reproducible processing of workpieces. Other embodiments relate to a zoom lens having a quickly-variable focal length. Still other embodiments relate to various features of a laser-based multi-axis machine tool that can facilitate efficient delivery of laser energy to a scan head, that can address thermomechanical issues that may arise during workpiece processing, etc. Another embodiment relates to techniques for minimizing or preventing undesired accumulation of particulate matter on workpiece surfaces during processing. A number of other embodiments and arrangements are also detailed.

Embodiments of the present disclosure generally relate to apparatus and methods for semiconductor processing, more particularly, to a thermal process chamber. The thermal process chamber includes a substrate support, a first plurality of heating elements disposed over or below the substrate support, and a spot heating module disposed over the substrate support. The spot heating module is utilized to provide local heating of cold regions on a substrate disposed on the substrate support during processing. Localized heating of the substrate improves temperature profile, which in turn improves deposition uniformity.

A unique electro optical robot design is disclosed, which includes hollow optical members creating a beam delivery system. The laser beam is coupled to an input aperture on the robotic arm and travels through hollow arms which rotate in respect to each other. Said input laser beam is delivered to a specific point in space within the reach of the arms with great accuracy. The arms themselves are designed to minimize angular deviations by using elongated periscopes or retroreflectors. This design is characterized by the ability to deliver a near collimated laser beam with great accuracy and capable of fusing together several laser beams of different wavelengths. Moreover, since the laser beam travels in a collimated mode, a lightweight focuser is the only necessary optical element, thus significantly reducing the load on the end tip of said robotic arms. The purpose of this invention is to offer a multi wavelengths accurate beam delivery system, acting in a robotic mode.