A two degree-of-freedom nano positioning stage with a parallel flexure hinge mechanism includes two driving systems respectively arranged along an X axis and a Y axis, a moving stage, a parallel flexure hinge mechanism and a base frame, wherein each of the driving systems includes a piezo actuator, a connecting block, a lever, a preloading spring, a push rod and a plurality of connecting hinges; the piezo actuator is fixed on the base frame at one end and connected with the connecting block at the other end; the lever is connected between the connecting block and the preloading spring, the connecting block is connected with the lever through one of the connecting hinges; the preloading spring is fixed on the base frame at one end and connected with the lever at the other end, and the lever is connected with the base frame through another one of the connecting hinges.

The present invention discloses a single-drive rigid-flexible coupling precision motion platform, including a machine base, a linear guide rail, a rigid-flexible coupling motion platform, a linear driver and a displacement sensor, wherein the rigid-flexible coupling motion platform includes a rigid frame, flexible hinges and a core motion platform; and the core motion platform of the rigid-flexible coupling motion platform is connected with the rigid frame through the flexible hinges. In this arrangement, the single-drive rigid-flexible coupling precision motion platform disclosed by the present invention can realize high-accuracy continuous change displacements of the platform, thereby avoiding displacement jitter caused by sudden change of acceleration. The present invention further discloses a realization method and an application including the above platform.

The present invention discloses a single-drive rigid-flexible coupling precision motion platform, including a machine base, a linear guide rail, a rigid-flexible coupling motion platform, a linear driver and a displacement sensor, wherein the rigid-flexible coupling motion platform includes a rigid frame, flexible hinges and a core motion platform; and the core motion platform of the rigid-flexible coupling motion platform is connected with the rigid frame through the flexible hinges. In this arrangement, the single-drive rigid-flexible coupling precision motion platform disclosed by the present invention can realize high-accuracy continuous change displacements of the platform, thereby avoiding displacement jitter caused by sudden change of acceleration. The present invention further discloses a realization method and an application including the above platform.

One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

A device for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes, comprising an outer base with side walls defining a base interior, and an xy-stage having side walls and mounting means for at least one measurement or manipulation element, the xy-stage being arranged inside of the base interior and being displaceable in an XY-plane relative to the outer base. The xy-stage is coupled to the outer base with bending elements, and with actuators designed for displacing the xy-stage relative to the outer base. The outer base is provided with at least one stiffening element rigidly connected to the side walls of the outer base, and/or that the xy-stage is provided with at least one stiffening element rigidly connected to the side walls of the xy-stage.

A device for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes, comprising an outer base with side walls defining a base interior, and an xy-stage having side walls and mounting means for at least one measurement or manipulation element, the xy-stage being arranged inside of the base interior and being displaceable in an XY-plane relative to the outer base. The xy-stage is coupled to the outer base with bending elements, and with actuators designed for displacing the xy-stage relative to the outer base. The outer base is provided with at least one stiffening element rigidly connected to the side walls of the outer base, and/or that the xy-stage is provided with at least one stiffening element rigidly connected to the side walls of the xy-stage.

A mounting device for mounting a machine tool to a floor area is provided. The mounting device includes mounting units that are attachable to the machine tool. Counter-mounting units are disposed on the floor area. The mounting device may also include electromagnets that are disposed on either the mounting units or the counter-mounting units. The machine tool can be mounted or removed by switching the electromagnets on and off. When one of the mounting units or the counter-mounting units includes the electromagnets, the other may include a ferromagnetic material.

A mounting device for mounting a machine tool to a floor area is provided. The mounting device includes mounting units that are attachable to the machine tool. Counter-mounting units are disposed on the floor area. The mounting device may also include electromagnets that are disposed on either the mounting units or the counter-mounting units. The machine tool can be mounted or removed by switching the electromagnets on and off. When one of the mounting units or the counter-mounting units includes the electromagnets, the other may include a ferromagnetic material.

A high frequency vibration spindle system which includes a spindle having a spindle housing and a spindle shaft disposed in the spindle housing; a toolholder, engaged with the spindle and adapted to be engaged with a tool; an electric power transmission device disposed at the front end or a rear end of the spindle, including a first coil and a second coil; the first coil is disposed on the spindle housing, and the second coil is disposed on the spindle shaft to be rotated with the spindle shaft coaxially; the first coil and the second coil are spaced with a gap; the second coil is adapted to receive an electric power from the first coil with a non-contact induction method; and a transducer, adapted to be controlled to vibrate the tool and disposed in the toolholder and electrically connected with the second coil to receive the electric power.

A high frequency vibration spindle system which includes a spindle having a spindle housing and a spindle shaft disposed in the spindle housing; a toolholder, engaged with the spindle and adapted to be engaged with a tool; an electric power transmission device disposed at the front end or a rear end of the spindle, including a first coil and a second coil; the first coil is disposed on the spindle housing, and the second coil is disposed on the spindle shaft to be rotated with the spindle shaft coaxially; the first coil and the second coil are spaced with a gap; the second coil is adapted to receive an electric power from the first coil with a non-contact induction method; and a transducer, adapted to be controlled to vibrate the tool and disposed in the toolholder and electrically connected with the second coil to receive the electric power.