The present invention provides an imprint apparatus that forms a pattern in an imprint material on a substrate using a mold including a pattern region, the apparatus comprising: a stage configured to be movable while holding the substrate; and a dispenser configured to discharge the imprint material, wherein a sensor, a receptor, and a mark are provided around a holding region where the substrate is held, in an upper surface of the stage, and the upper surface of the stage includes a first region that passes below the pattern region during movement of the stage between a position below the dispenser and a position below the mold, and a second region that does not pass below the pattern region during the movement, and the sensor, the receptor, and the mark are arranged in the second region.

An apparatus forms a pattern of an imprint material by curing the imprint material in a state in which the imprint material on a pattern formation region of a member, where a pattern is to be formed, is in contact with a pattern region of a mold. The apparatus includes a dispenser for placing the imprint material on the pattern formation region of the member and a non-pattern formation region of the member, outside the pattern formation region, a detector for detecting the non-pattern formation region in a state in which the imprint material has been placed on the pattern formation region and the non-pattern formation region by the dispenser, and a controller for performing processing for determining an abnormality in the dispenser based on a detection result of the non-pattern formation region by the detector.

The present invention provides an imprint apparatus which forms a pattern of an imprint material onto a substrate by using a mold, the apparatus including a control unit configured to provide a user interface for displaying a first map indicating a supply position of the imprint material to be supplied onto the substrate, an adjustment window for adjusting a value of an apparatus parameter which is set in the imprint apparatus and used to change a supply position of the imprint material, and a second map indicating a supply position of the imprint material after adjustment of the value of the apparatus parameter.

Provided is an application device capable of extracting an imprinting material in which impurities are mixed from a container of the application device and supplying new imprinting material to the container of the application device. An application device according to the present disclosure is used to supply an imprinting material to a substrate in an imprinting apparatus that forms a pattern on the imprinting material on the substrate by using a mold. The application device includes a container unit that contains the imprinting material, and an ejecting unit that is provided on the container unit and that ejects the imprinting material contained in the container unit toward the substrate. The application device is detachably attachable to the imprinting apparatus.

An imprint apparatus includes: a pressure roller configured to press a film onto a substrate; an idle roller spaced from the pressure roller, the idle roller and pressure roller being configured to peel the film from the substrate; a pressure sensor connected to the pressure roller and configured to sense a first pressure applied to the pressure roller; and a controller configured to detect a peeling defect based on the first pressure.

Provided is an application device capable of extracting an imprinting material in which impurities are mixed from a container of the application device and supplying new imprinting material to the container of the application device. An application device according to the present disclosure is used to supply an imprinting material to a substrate in an imprinting apparatus that forms a pattern on the imprinting material on the substrate by using a mold. The application device includes a container unit that contains the imprinting material, and an ejecting unit that is provided on the container unit and that ejects the imprinting material contained in the container unit toward the substrate. The application device is detachably attachable to the imprinting apparatus.

The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising an image sensing unit configured to sense an image of the imprint material via the mold, and a control unit configured to, in a state in which the mold and the imprint material are in contact with each other, cause the image sensing unit to sense the image of the imprint material while scanning the image sensing unit and obtain information on forming of the pattern of the imprint material based on the image obtained by the image sensing unit.

A manufacturing system includes a sensing system that provides high-resolution feedback for web guiding and tension control. The system may be especially useful for web material that is manufactured to include micro-replicated structures with micron size scale. A micro-replication station forms a pattern of micro-replicated lenses on a web material. The sensing system illuminates a measurement area on the web material and detects an angular distribution of light exiting a set of the micro-replicated lenses within the first measurement area. A control system that adjusts at least one process control parameter of the transport system based on the detected angular distribution.

A rotary tablet press having a rotatably driven rotor and a die plate with a plurality of die bores. A plurality of upper and lower punches are configured to produce tablets in the plurality of die bores. The tablets are monitored for one or more characteristics and are sorted by an ejection apparatus according to the one or more characteristics into a reject channel and a satisfactory channel.

A rotary tablet press having a rotatably driven rotor and a die plate with a plurality of die bores. A plurality of upper and lower punches are configured to produce tablets in the plurality of die bores. The tablets are monitored for one or more characteristics and are sorted by an ejection apparatus according to the one or more characteristics into a reject channel and a satisfactory channel.