A substrate guide of the present invention is provided on a carrier frame of a carrier which holds a substrate substantially vertically so that a surface of the substrate is in a substantially vertical direction and supports the substrate by being in contact with at least a peripheral edge end surface portion of the substrate. The substrate guide includes a base attached to the carrier frame, a substrate support which comes into contact with the peripheral edge end surface portion of the substrate held by the carrier and is attached to the base to be movable in a normal direction of the peripheral edge end surface portion in a direction parallel to the surface of the substrate, and a force-applying member which applies a force to the substrate support toward the substrate with respect to the base.

This application discloses a cushioning pad and a cushioning apparatus. The cushioning pad includes a body and a positioning adsorption structure. The body is arranged to separate a display panel; and the positioning adsorption structure is arranged on a surface of the body for adsorption by a suction nozzle of a machine. An upper surface area of the positioning adsorption structure is greater than a vacuum adsorption area of the suction nozzle. An upper surface of the positioning adsorption structure corresponding to the suction nozzle is a smooth plane. There are at least two positioning adsorption structures, and the positioning adsorption structures are symmetrically distributed.

A substrate holding device includes: a frame body on which a substrate transferred by a transfer device is mounted, and a substrate delivery mechanism for delivering, to the frame body, the substrate transferred to the above of the frame body by the transfer device. The substrate delivery mechanism includes: a support pin arranged below the frame body, a support pin advancing/retreating mechanism for advancing and retreating the support pin between a support pin lifting/lowering position set on a lower side inside the frame body and a support pin retracting position set outside the frame body, and a support pin lifting/lowering mechanism by which the support pin arranged in the support pin lifting/lowering position by the support pin advancing/retreating mechanism is lowered after being lifted so as to pass through the interior of the frame body and support the substrate.

A swirl-flow forming body includes a through-hole; a jetting port that is formed on an inner periphery facing the through-hole; a fluid passage that allows fluid to be discharged into the through-hole via the jetting port so as to form a swirl flow that generates negative pressure for applying suction to a target object; and a flange portion that is formed so as to protrude from the inner periphery, the flange portion allowing passage of fluid to which suction is applied by the negative pressure while preventing the fluid discharged via the jetting port from flowing out of the through-hole towards the target object. The inner periphery is formed so as to guide the fluid discharged via the jetting port, in a direction away from the target object, to be discharged from the through-hole.

A substrate transport apparatus comprising a support frame an articulated arm connected to the support frame, having at least one movable arm link and an end effector connected to the movable arm link, with a substrate holding station located thereon. Wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing, formed of link case modules rigidly coupled to each other, and a pulley system cased in and extending through the rigidly coupled link case modules substantially end to end of the modular composite arm link casing, wherein the rigidly coupled link case modules include link case end modules connected by at least one interchangeable link case extension module having a predetermined characteristic determining a length of the movable arm link, wherein at least one interchangeable link case extension module is selectable for connection to link case end modules forming the reconfigurable arm link.

A cargo transporting vehicle configured to travel along a path of a work site is provided. The cargo transporting vehicle includes: a traveling unit configured to travel on the path; a plate configured to load a cargo thereon; a loading unit including at least an articulated arm structure in which a width and an extendable length are adjusted according to dimensions of the cargo, the articulated arm structure being configured to load and unload the cargo onto and from the plate; and a plate lifting unit configured to raise or lower the plate.

The invention provides systems and methods for robotically stacking sheets. The systems and methods involve a robot arm and a conveyor line. The robot arm has attached thereto a suction frame. In some embodiments, the systems and methods involve first and second robot arms. In such embodiments, the system and method facilitate and involve a sequentially alternating unloading operation such that the system has a first position in which the first robot arm is elevated and has the first suction frame loaded with one or more sheets while the second robot arm is lowered and has the second suction frame unloaded and the system has a second position in which the second robot arm is elevated and has the second suction frame loaded with one or more sheets while the first robot arm is lowered and has the first suction frame unloaded.

A transfer device including at least one first transfer component and at least one second transfer component are provided. The first transfer component includes a first carrier pad contacting the transferred object, and the second transfer component includes a second carrier pad contacting the transferred object, and material of the first carder pad has stronger capability to capture electrons than that of the second carrier pad and material of the second carrier pad has stronger capability to lose electrons than that of the first carder pad.

The present disclosure generally relates to a method and apparatus for loading, processing, and unloading substrates. A processing system comprises a load/unload system coupled to a photolithography system. The load/unload system comprises a first set of tracks having a first height and a first width, and a second set of tracks having a second height and a second width different than the first height and first width. An unprocessed substrate is transferred from a lift pin loader to a chuck along the first set of tracks on a first tray while a processed substrate is transferred from the chuck to the lift pin loader along the second set of tracks on a second tray. While a first tray remains with a substrate on the chuck during processing, the load/unload system is configured to unload a processed substrate and load an unprocessed substrate on a second tray.

A glass manufacturing apparatus includes a glass ribbon gripping device including a first column of jaw clamps spaced from one another along a first clamp path extending in a glass ribbon travel direction of the glass manufacturing apparatus. The glass manufacturing apparatus includes a second column of jaw clamps spaced from one another along a second clamp path extending in the glass ribbon travel direction of the glass manufacturing apparatus. The first column of jaw clamps and the second column of jaw clamps are spaced apart in a lateral direction perpendicular to the glass ribbon travel direction. Additionally, methods of manufacturing a glass ribbon with the glass manufacturing apparatus are provided.