Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the loading device and processing apparatus, a cassette support for holding at least one substrate cassette container, and cassette support purge ports with purge port nozzle locations disposed on the cassette support, each nozzle location being configured so that a nozzle at the nozzle location couples to at least one purge port of the substrate cassette container, wherein each nozzle location defines an interchangeable purge port nozzle interface so that different interchangeable purge port nozzles are removably mounted to respective nozzle interfaces of the nozzle locations that correspond to the different nozzle configurations of the interchangeable purge port nozzle modules, in conformance with and effecting coupling to different ports of different substrate cassette containers having different purge port characteristics.

A conveying device includes a flat plate member including a through-hole and a first conveying head that sucks a conveyance object via the through-hole in a state of holding the flat plate member and conveys the flat plate member and the conveyance object to an accommodation case. Moreover, the flat plate member has a shape that prevents an end of the conveyance object from abutting an inner side surface of the accommodation case during placement into the accommodation case.

A fixed reference edge system that guides a glass slide from a slot of a slide rack onto a scanning stage and guides the glass slide from the scanning stage into the slot of the slide rack. In an embodiment, the fixed reference edge has a first side that is parallel to a side of the slot of the slide rack. The system comprises an assembly that includes a push bar configured to push the slide from the slot onto the scanning stage, and a pull bar configured to pull the slide from the scanning stage into the slot of the slide rack. When the slide is pulled into the slide rack, the long edge of the slide is pressed against the first side of the fixed reference edge to maintain a parallel orientation between the slide and the slot of the slide rack.

When being sealed, insulating glass blanks (5) are held in a sealing station (2) gripped at the base by grippers (17) of a gripper arrangement (16) and/or by suction heads (15) and rest at the top against a roller beam (7) fitted with rollers (8). As the insulating glass blank (5) is sealed, only the nozzle (11) of a sealing assembly (10) moves along the outer edge of the insulating glass blank (5), which is stationary during the sealing process. When the lower edge of an insulating glass blank (5) is sealed, grippers (17) engaging the lower edge are released and move away downwards. Sealed insulating glass is removed from the sealing station (2) by a removal robot (24) onto the side opposite the sealing assembly (10), moved to a temporary store and placed therein on A-bearing supports (29) and fan frames (30) sorted according to production lots.

A conveying apparatus for a separator for a fuel cell includes: a conveying portion configured to hold an intermediate part of the separator and lift the separator; and restricting portions configured to restrict the opposite ends of the separator to warp the intermediate part of the separator in the lifting direction when the conveying portion lifts the separator. The restricting portions are configured to release the opposite ends when the intermediate part of the separator warps in the lifting direction with a target curvature amount.

The present disclosure generally relates to a method and apparatus for loading, processing, and unloading substrates. A processing system comprises a load/unload system coupled to a photolithography system. The load/unload system comprises a first set of tracks having a first height and a first width, and a second set of tracks having a second height and a second width different than the first height and first width. An unprocessed substrate is transferred from a lift pin loader to a chuck along the first set of tracks on a first tray while a processed substrate is transferred from the chuck to the lift pin loader along the second set of tracks on a second tray. While a first tray remains with a substrate on the chuck during processing, the load/unload system is configured to unload a processed substrate and load an unprocessed substrate on a second tray.

An apparatus for pre-assembly of an electrically connected array of solar panels for a solar canopy including a substantially planar base member for resting on a horizontal surface, a substantially planar support member for horizontally aligning side-by-side and horizontally supporting a plurality of solar panels and a support member extending upward from the base member; a track member disposed proximate a bottom portion of the support member attached to or integral with the support member or base member for vertically aligning side-by-side and vertically supporting a plurality of solar panels when a side edge portion of the solar panels rests on the track member; and at least two arm members pivotally attached proximate to opposing ends of the base member or support member.

Apparatus and method for transferring a substrate are disclosed. The substrate transfer apparatus includes: a substrate conveyance assembly disposed between a mechanical arm and a wafer stage, the substrate conveyance assembly including a substrate loading conveyor and a substrate unloading conveyor parallelly arranged in a first direction, each of the substrate loading conveyor and the substrate unloading conveyor configured for transferring a substrate between the wafer stage and the mechanical arm along a second direction perpendicular to the first direction; an integral frame; and a transition air suspension assembly fixed to the integral frame at the end thereof proximal to the wafer stage, the transition air suspension assembly being able to engage with either of the substrate loading conveyor and the substrate unloading conveyor for producing an air film to levitate the substrate during the conveyance of the substrate by the substrate loading conveyor or the substrate unloading conveyor.

To provide: a guide roller, whereby a replacement operation time can be shortened, guide roller position adjustment operations are not needed, and an equipment stop time can be reduced, and which contributes to suppression of productivity deterioration; and a substrate transfer apparatus provided with the guide roller. A substrate transfer apparatus (1) is provided with transfer rollers (3); a plurality of transfer shafts (2) that are provided with the transfer rollers (3); a guide roller (5) that guides a substrate (10); and a roller holding section (6) having a supporting shaft (62) that supports the guide roller (5) at one end. A contact section (52) of the guide roller (5) in contact with the substrate (10) can be separated from other sections (a base section (51) and a nut section (53)).

A process and apparatus for handling a rigid sheet is disclosed. The process comprises engaging opposing faces of a sheet at its periphery with engagement means providing a second engagement means, movable relative to the first and engaging the sheet with the second engagement means. The sheet is then moved relative to the second engagement means whilst the sheet is engaged with the first engagement means and is then clamped. The sheet is then moved to a desired orientation or location whilst maintaining the first and second engagement means in fixed relative position. The process is useful in handling glass sheeting and in the production of multiple glazed units and on an insulating glass production line.