A ring gyroscope structure with central spring structure that prefers prefers 2-modes and makes them low in frequency. The flexing resonance modes that tend to couple to external mechanical excitation are clearly higher that the 2-modes. The described structure is thus very robust against external mechanical shocks and vibrations.

A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.

A driving apparatus (101) is provided with: a first base part (110); a second base part (120); an elastic part (210) configured to couple the first base part with the second base part; a coil (300) disposed on the first base part; a first magnet (710) disposed on one side of the coil; a second magnet (720) disposed on an opposite side of the first magnet as viewed from the coil; a first middle yoke (810) provided on a surface of the first magnet opposed to the coil; and a second middle yoke (820) provided on a surface of the second magnet opposed to the coil. In particular, the first magnet is smaller than the second magnet. The first middle yoke is located closer to the coil than the second middle yoke is.

A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.

A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.

In one aspect, a MEMS transducer, in particular a MEMS sound transducer unit, preferably for generating and/or detecting sound waves in the audible wavelength spectrum and/or in the ultrasonic range, includes a carrier and at least one piezoelectric element. The at piezoelectric element(s) is arranged on the carrier and is deflectable in the direction of a stroke axis, with the piezoelectric element(s) having at least two piezoelectric layers and at least one carrier layer. By means of the at least two piezoelectric layers, electrical signals and deflections of the piezoelectric element(s) can be converted from one into the other. Additionally, the carrier layer is arranged between two piezoelectric layers in the direction of the stroke axis.

A scanning assembly for an optical instrument includes a reflector and a folded-beam spring assembly coupled to the reflector for deflecting the reflector for beam scanning. A lever suspension assembly is coupled to the folded-beam spring assembly and provides torsional movement of the reflector for beam scanning over a two-dimensional region, allowing for large total scan angles and large vertical displacements.

The micromirror device includes: a movable portion having a mirror portion on which a reflecting surface for reflecting incident light is formed; a first support portion that is connected to the movable portion on a first axis located in a plane including the reflecting surface of the mirror portion in a stationary state, and that swingably supports the movable portion around the first axis; and a pair of first actuators that are connected to the first support portion and face each other across the first axis, each of which being a piezoelectric drive type first actuator that allows the movable portion to swing around the first axis, in which in a case where the movable portion swings around the first axis, at least a part of the first actuator swings around the first axis in a phase opposite to a phase of the movable portion, and assuming that a ratio of a rotation angle of the first actuator to a rotation angle of the movable portion is R, 0<R<1.00 is satisfied.

A cantilever that includes a first dielectric layer with a first intrinsic stress, a second dielectric layer overlaying the first dielectric layer, in which the second dielectric layer has a second intrinsic stress that is different than the first intrinsic stress, the cantilever including a first piezoelectric segment disposed between the first dielectric layer and the second dielectric layer at a first position with respect to a first dimension parallel to the first dielectric layer, the cantilever including a second piezoelectric segment disposed between the first dielectric layer and the second dielectric layer at a second position with respect to the first dimension, and the cantilever including one or more waveguides patterned in the second dielectric layer.

Microelectronic device of piezoelectric type, wherein a first and a second actuation unit are coupled between a fixed structure and a tiltable structure, on a first side of a rotation axis to control the rotation of the tiltable structure around the first rotation axis. Each actuation unit is formed by a first actuator, a second actuator and an elastic system. Each elastic system mutually couples the free ends of the respective first and second actuators to the tiltable structure.