A cantilever comprises a first dielectric layer, wherein the first dielectric layer has a first intrinsic stress, and a second dielectric layer overlying the first dielectric layer, wherein the second dielectric layer has a second intrinsic stress that is different than the first intrinsic stress. The cantilever is curved along a lengthwise z-dimension of the cantilever due to a difference between the first and second intrinsic stresses. The second dielectric layer comprises a plurality of crossbars angled relative to an x-dimension width of the cantilever to control curvature in the x-dimension width of the cantilever, to induce a change in pitch along the length of the cantilever, and to induce a change in roll along the length of the cantilever.

An actuator element of a MEMS device on a substrate able to create large, out-of-plane deflection includes two separated metallic layers contacting the substrate. The second metallic layer has a first portion contacting the substrate and a second portion having cantilevered over the substrate and first metallic layer. A first insulating layer contacts the cantilevered metallic layer on a bottom contacting surface and a second insulating layer contacting the cantilevered metallic layer on a portion of a top contacting surface. The second, cantilevered portion of the metallic layer is prestressed causing the distal end to deform away from the substrate. Applying a voltage potential between the first and second metallic layers creates an electrostatic field drawing the distal end toward the substrate.