A semiconductor device may include a stress decoupling structure to at least partially decouple a first region of the semiconductor device and a second region of the semiconductor device. The stress decoupling structure may include a set of trenches that are substantially perpendicular to a main surface of the semiconductor device. The first region may include a micro-electro-mechanical (MEMS) structure. The semiconductor device may include a sealing element to at least partially seal openings of the stress decoupling structure.

A MEMS package has a MEMS chip, and a package substrate which the MEMS chip is adhered. The MEMS chip has an element substrate which a movable element is formed. The MEMS package has a plurality of bonding bumps adhered to both of an opposing surface, of the element substrate and the package substrate. The MEMS package has unevenly arranged structure which all the plurality of bonding bumps are unevenly arranged in a part of the opposing surface.

A sensor device includes a sensor element, a substrate, and a bonding wire. Over the substrate, provided is the sensor element. The bonding wire forms at least part of a connection path that electrically connects the sensor element and the substrate together. The bonding wire is provided to connect two connection surfaces that intersect with each other.

An application specific integrated circuit (ASIC) chip is provided. Stress in various directions can be measured by disposing symmetrical four-corner+middle delay chain combinations in three dimensions inside the ASIC chip. Two sensors using the ASIC chip are further provided. In one sensor, a micro-electromechanical system (MEMS) chip is stacked with the ASIC chip. In the other sensor, the MEMS chip and the ASIC chip are symmetrically arranged. After being stacked and symmetrically arranged, the MEMS chip and the ASIC chip have highly consistent stress concentration characteristics, which can calibrate stress in various directions and effectively improve accuracy and temperature stability of the MEMS chip. In addition, an electric toothbrush using the ASIC chip is further provided, which can effectively improve consistency, stability, reliability, sensitivity, and linearity of stress detection, and can more accurately compensate for a temperature drift.

A MEMS module includes a MEMS element provided with a substrate in which a hollow portion is formed, the MEMS element including a movable portion of the substrate which covers the hollow portion and has a thickness that allows a shape of the movable portion to be deformable, a first gauge resistor arranged on the substrate such that at least a portion of the first gauge resistor overlaps with the hollow portion, and a second gauge resistor arranged on the substrate in a region surrounding the first gauge resistor without overlapping with the hollow portion, and an electronic component configured to correct detection information of the MEMS element by using a first electrical signal detected by the first gauge resistor and a second electrical signal detected by the second gauge resistor and calculate an amount of change in air pressure.

A micromechanical sensor device and a corresponding manufacturing method are described. The micromechanical sensor device is fitted with a substrate including a front side and a rear side; a micromechanical sensor chip including a sensor area attached to the front side of the substrate; and a capping unit attached to the front side of the substrate, which is formed at least partially by an ASIC chip. The capping unit surrounds the micromechanical sensor chip in such a way that a cavity closed toward the front side of the substrate is formed between the sensor area of the micromechanical sensor chip and the ASIC chip. A mold package is formed above the capping unit.

The sensor package comprises a carrier (1) including electric conductors (13), an ASIC device (6) and a sensor element (7), which is integrated in the ASIC device (6). A dummy die or interposer (4) is arranged between the carrier (1) and the ASIC device (6). The dummy die or interposer (4) is fastened to the carrier (1), and the ASIC device (6) is fastened to the dummy die or interposer (4).

A MEMS device is disclosed. In an embodiment a MEMS device includes a substrate having an active region and at least one integrated electrical and mechanical connection element configured to electrically and mechanically mount the MEMS device to a carrier, wherein the connection element comprises a stress-reducing structure.

An integrated device package is disclosed. The package can include a package substrate comprising a composite die pad having an upper surface and a lower surface spaced from the upper surface along a vertical direction. The composite die pad can include an insulator die pad and a metal die pad. The insulator die pad and the metal die pad can be disposed adjacent one another along the vertical direction. The substrate can include a plurality of leads disposed about at least a portion of a perimeter of the composite die pad. An integrated device die can be mounted on the upper surface of the composite die pad.

A system includes a pressure sensor combined with a MEMS microphone. The pressure sensor and the MEMS microphone arranged side by side are formed on a same substrate.