A method of manufacturing a plurality of through-holes (132) in a layer of material by subjecting the layer to directional dry etching to provide through-holes (132) in the layer of material; For batch-wise production, the method comprises after a step of providing a layer of first material (220) on base material and before the step of directional dry etching, providing a plurality of holes at the central locations of pits (210), etching base material at the central locations of the pits (210) so as to form a cavity (280) with an aperture (281), depositing a second layer of material (240) on the base material in the cavity (280), and subjecting the second layer of material (240) in the cavity (280) to said step of directional dry etching using the aperture (281) as the opening (141) of a shadow mask.

A method of manufacturing a plurality of through-holes in a layer of first material, for example for the manufacturing of a probe comprising a tip containing a channel. To manufacture the through-holes in a batch process, a layer of first material is deposited on a wafer comprising a plurality of pits a second layer is provided on the layer of first material, and the second layer is provided with a plurality of holes at central locations of the pits; using the second layer as a shadow mask when depositing a third layer at an angle, covering a part of the first material with said third material at the central locations, and etching the exposed parts of the first layer using the third layer as a protective layer.

A method for producing a molded body includes providing a composite including a first plate having a polymer film pressed into its surface, providing a third plate including roughened areas on at least part of one of its surfaces, placing the third plate opposite the polymer film without the third plate touching the composite, heating the third plate to a temperature above the glass transition temperature Tg of the polymer of the polymer film without heating the composite and without the heated third plate coming into contact with the surface of the polymer film, and structuring the surface of the polymer film facing the third plate by a relative movement which removes the third plate from the first plate while the polymer film remains soft and is thus extended lengthwise, thereby forming a modified composite that comprises the molded body.

The present invention relates to a micro-needle (7; 8; 9) for the transdermal administration of active molecules and/or for the sampling of biological fluids. The micro-needle (7; 8; 9) is made of polymeric material through photolithography. A cavity is defined in the micro-needle (7; 8; 9).

The present invention further relates to a method for obtaining through photolithography at least one micro-needle (7; 8; 9) for the transdermal administration of active molecules and/or for the sampling of biological fluids. A photo-cross linking polymer is exposed in liquid phase to an energy radiation causing the hardening thereof. A photolithographic mask (1; 2) is interposed between the source of the energy radiation and the photo-cross linking polymer. The photolithographic mask (1; 2) is configured in a manner such to generate in the photo-cross linking polymer a peripheral shadow area, a central shadow area and a lighting area confined between the peripheral shadow area and the central shadow area.

The method according to this invention is aimed at obtaining a micro-needle (7; 8; 9) for the transdermal administration of active molecules and/or for the sampling of biological fluids which shows the peculiar characteristic of being hollow and which is manufactured by means of a single photolithography operation, thus avoiding the use of additional processing.

A preferred conformal penetrating multi electrode array includes a plastic substrate that is flexible enough to conform to cortical tissue. A plurality of penetrating semiconductor micro electrodes extend away from a surface of the flexible substrate and are stiff enough to penetrate cortical tissue. Electrode lines are encapsulated at least partially within the flexible substrate and electrically connected to the plurality of penetrating semiconductor microelectrodes. The penetrating semiconductor electrodes preferably include pointed metal tips. A preferred method of fabrication permits forming stiff penetrating electrodes on a substrate that is very flexible, and providing electrical connection to electrode lines within the substrate.

A method is disclosed for fabricating free-standing polymeric nanopillars or nanotubes with remarkably high aspect ratios. The nanopillars and nanotubes may be used, for example, in integrated microfluidic systems for rapid, automated, high-capacity analysis or separation of complex protein mixtures or their enzyme digest products. One embodiment, preferably fabricated entirely from polymer substrates, comprises a cell lysis unit; a solid-phase extraction unit with free-standing, polymeric nanostructures; a multi-dimensional electrophoretic separation unit with high peak capacity; a solid-phase nanoreactor for the proteolytic digestion of isolated proteins; and a chromatographic unit for the separation of peptide fragments from the digestion of proteins. The nanopillars and nanotubes may also be used to increase surface area for reaction with a solid phase, for example, with immobilized enzymes or other catalysts within a microchannel, or as a solid support for capillary electrochromatography-based separations of proteins or peptides.

A manufacturing method for a micro-needle device includes following steps: a target tissue basic information obtaining step, a micro-needle template obtaining step, a micro-needle material adding step, a micro-needle semi-product obtaining step, and a micro-needle device obtaining step. The inner tissue distribution information is obtained by the application of optical coherence tomography. The micro-needle template is obtained according to the skin surface curvature information and the inner tissue distribution information. The micro-needle template has a plurality of areas and a plurality of mold holes. One or both of the diameter and the depth of the mold hole is determined by the inner tissue distribution information, and the curvature radius of the areas is determined by the skin surface curvature information. The manufacturing method for a micro-needle device is applicable to micro-needles with mixed configurations as well as micro-needles with syringe configurations.

A method for manufacturing a carbon nanotube needle is provided. A carbon nanotube film comprising of a plurality of commonly aligned carbon nanotubes, a first electrode, and a second electrode are provided. The carbon nanotube film is fixed to the first electrode and the second electrode. An organic solvent is applied to treat the carbon nanotube film to form at least one carbon nanotube string. A voltage is applied to the carbon nanotube string until the carbon nanotube string snaps.

A material with a nanotexture comprising structures extending from a substrate. The structures are modified by coating the nanotexture with a protective coating and partially removing the coating, exposing a portion of the structure for functionalization.

A probe module includes a circuit board and at least one probe formed on a probe installation surface of the circuit board by a microelectromechanical manufacturing process and including a probe body and a probe tip. The probe body includes first and second end portions and a longitudinal portion having first and second surfaces facing toward opposite first and second directions. The probe tip extends from the probe body toward the first direction and is processed with a gradually narrowing shape by laser cutting. The first and/or second end portion has a supporting seat protruding from the second surface toward the second direction and connected to the probe installation surface, such that the longitudinal portion and the probe tip are suspended above the probe installation surface. The probe has a tiny pinpoint for detecting tiny electronic components, and its manufacturing method is time-saving and high in yield rate.