Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

The present invention relates to the filtering of fumes emitted by industrial processes such as those used in iron and steel works, refineries, waste-to-energy plants and the like and in particular relates to a filtering device for fine and ultrafine dust particles and other polluting agents.

The present invention relates to the filtering of fumes emitted by industrial processes such as those used in iron and steel works, refineries, waste-to-energy plants and the like and in particular relates to a filtering device for fine and ultrafine dust particles and other polluting agents.

Materials and methods for mitigating the effects of halide species contained in process streams are provided. A halide-containing process stream can be contacted with mitigation materials comprising active metal oxides and a non-acidic high surface area carrier combined with a solid, porous substrate. The halide species in the process stream can be reacted with the mitigation material to produce neutralized halide salts and a process stream that is essentially halide-free. The neutralized salts can be attracted and retained on the solid, porous substrate.

Materials and methods for mitigating the effects of halide species contained in process streams are provided. A halide-containing process stream can be contacted with mitigation materials comprising active metal oxides and a non-acidic high surface area carrier combined with a solid, porous substrate. The halide species in the process stream can be reacted with the mitigation material to produce neutralized halide salts and a process stream that is essentially halide-free. The neutralized salts can be attracted and retained on the solid, porous substrate.

A system for purifying mother liquid steam of polytetrafluoroethylene dispersion liquid comprises a concentration kettle (1), a defoaming pot (2), a gas-liquid separator (3) and a falling film absorption tower (4). A steam exit of the concentration kettle (1) is connected to an entrance of the defoaming pot (2). An exit of the defoaming pot (2) is connected to a feeding port of the gas-liquid separator (3). A gas exit of the gas-liquid separator (3) is connected to the falling film absorption tower (4). A liquid exit of the gas-liquid separator (3) is connected to the concentration kettle (1). A method for purifying mother liquid steam of polytetrafluoroethylene dispersion liquid by using the system is further provided.

A system for purifying mother liquid steam of polytetrafluoroethylene dispersion liquid comprises a concentration kettle (1), a defoaming pot (2), a gas-liquid separator (3) and a falling film absorption tower (4). A steam exit of the concentration kettle (1) is connected to an entrance of the defoaming pot (2). An exit of the defoaming pot (2) is connected to a feeding port of the gas-liquid separator (3). A gas exit of the gas-liquid separator (3) is connected to the falling film absorption tower (4). A liquid exit of the gas-liquid separator (3) is connected to the concentration kettle (1). A method for purifying mother liquid steam of polytetrafluoroethylene dispersion liquid by using the system is further provided.

A device for treating a gas laden with pollutants, includes at least one adsorption module for adsorbing the pollutants, which is utilized in an adsorption apparatus. The adsorption module includes at least one electrically conductive layer of an activated carbon fiber mat, an electric current circuit for heating the activated carbon fiber mat for the desorption of the adsorbed pollutants, and distributing conduit which is routed into the center of the adsorption module and has outlet openings for a flush gas for inertizing and rinsing the activated carbon fiber mat.

A device for treating a gas laden with pollutants, includes at least one adsorption module for adsorbing the pollutants, which is utilized in an adsorption apparatus. The adsorption module includes at least one electrically conductive layer of an activated carbon fiber mat, an electric current circuit for heating the activated carbon fiber mat for the desorption of the adsorbed pollutants, and distributing conduit which is routed into the center of the adsorption module and has outlet openings for a flush gas for inertizing and rinsing the activated carbon fiber mat.

A process for treating effluent streams in a renewable transportation fuel production process is described. One or more of the sour water stream and an acid gas stream are treated directly in thermal oxidation section. The process allows the elimination or size reduction of a sour water stripper unit, waste water treatment plant, and sulfur recovery unit.