A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a main pump capable of evacuating gas from an atmospheric pressure and a booster pump for increasing an evacuation speed of the main pump, and the at least one abatement part for treating the exhaust gas is connected between the main pump and the booster pump.

The present invention relates to a fluorine-containing gas removing agent comprising an alumina and an alkali earth metal compound, wherein an ammonia desorption curve obtained by an ammonia TPD-MS method having a mass-to-charge ratio of 15 has a peak in a range lower than 200 C. and has a shoulder in a range of 200 C. or higher.

Process for preparing a catalyst or a trapping mass comprising the following steps: bringing a porous oxide support into contact with a metal salt comprising at least one metal belonging to groups VIB, VIIB, VIIIB, IB or IIB, of which the melting point of said metal salt is between 20 C. and 150 C., for a period of between 5 minutes and 5 hours in order to form a solid mixture, the weight ratio of said metal salt to said porous oxide support being between 0.1 and 1; heating the solid mixture with stirring at a temperature between the melting point of said metal salt and 200 C. and for 5 minutes to 12 hours; calcining the solid obtained in the preceding step at a temperature above 200 C. and below or equal to 1100 C. under an inert atmosphere or under an oxygen-containing atmosphere.

To provide a means removing chlorine gas, which can remove chlorine gas contained in, for example, exhaust gas with high efficiency and does not require frequent exchange. A chlorine gas decomposition catalyst including a metal oxide (X), wherein the metal oxide (X) includes an oxide (X1) of at least one element selected from the group consisting of Ce and Co.

A gas treatment system includes a first scrubber configured to treat a gas exhausted from a process chamber, a catalytic reactor connected to the first scrubber and configured to treat a gas passing through the first scrubber, and a second scrubber connected to the catalytic reactor and configured to treat a gas passing through the catalytic reactor, where the catalytic reactor includes a fluidized bed reactor (FBR).

A flow-through solid catalyst formed by coating a zeolite material on a metal or ceramic solid substrate. In some embodiments, the solid substrate is formed as flat plates, corrugated plates, or honeycomb blocks.

The present invention relates generally to the field of emission control equipment for boilers, heaters, kilns, or other flue gas-, or combustion gas-, generating devices (e.g., those located at power plants, processing plants, etc.) and, in particular to a new and useful method and apparatus for: (i) reducing halogen levels necessary to affect gas-phase mercury control; (ii) reducing or preventing the poisoning and/or contamination of an SCR catalyst; and/or (iii) controlling various emissions. In still another embodiment, the present invention relates to a method and apparatus for: (A) simultaneously reducing halogen levels necessary to affect gas-phase mercury control while achieving a reduction in the emission of mercury; and/or (B) reducing the amount of selenium contained in and/or emitted by one or more pieces of emission control equipment for boilers, heaters, kilns, or other flue gas-, or combustion gas-, generating devices (e.g., those located at power plants, processing plants, etc.).

A method for removing methane and non-methane volatile organic compound concentrations from a gas stream. The method includes exposing the target gas to a halogen gas and a light from a suitable light source having a wavelength sufficient to activate halogen gas to halogen radicals, wherein the halogen radicals react with the VOC in the target gas to provide the target gas with a removed concentration of VOC as well as a device including a reaction chamber for reacting the halogen radicals with the VOC in the target gas.

In methods of and/or plants for manufacturing cement clinker, the amount of chloride bypass exhaust gas 79 can be substantially decreased, when using previously cooled chloride bypass exhaust gas 81 and/or cooled kiln exhaust gas as coolant for the chloride bypass exhaust gas 39 prior to deducting the chloride bypass exhaust gas 39.

A method for removing methane and non-methane volatile organic compound concentrations from a gas stream. The method includes exposing the target gas to a halogen gas and a light from a suitable light source having a wavelength sufficient to activate halogen gas to halogen radicals, wherein the halogen radicals react with the VOC in the target gas to provide the target gas with a removed concentration of VOC as well as a device including a reaction chamber for reacting the halogen radicals with the VOC in the target gas.