A system for pressure swing adsorption including: a plurality of beds each performing at least one of an adsorbing process, a pressure equalizing process, a vacuum process, or a pressurizing process; a supply valve provided in each of the beds and connected to a mixed gas supply unit to supply a mixed gas to the bed; a discharge valve provided in each of the beds and connected to a hydrogen gas discharge unit to discharge hydrogen generated in the bed; a vacuum valve provided in each of the beds and connected to a vacuum pump so as to be open to the vacuum pump during the vacuum process of the bed; and a control unit that controls the supply valve, the discharge valve, and the vacuum valve to allow each of the beds to perform the adsorbing process, the pressure equalizing process, the vacuum process, or the pressurizing process.

A pressure swing adsorption gas production device that enables performing a desorption process in adsorption towers is provided. The device includes an off gas discharge route connected to the adsorption towers, a membrane separation unit with a separation membrane allowing miscellaneous gas in the off gas discharge route to pass faster than purification target gas, an off gas tank, and a pressure boosting unit that raises the pressure of and supplies the off gas to the membrane separation unit. The off gas tank and the pressure boosting unit are upstream of the membrane separation unit. The device includes a recycle gas return route via which some recycle gas is returned to the source gas supply route. The operation control unit adjusts the off gas adjustment unit so the off gas discharge flow rate is a flow rate where the amount of off gas discharged from one adsorption tower during the desorption process is equivalent to the amount of off gas discharged from the off gas tank when the one adsorption tower starts the desorption process until another starts the desorption process.

The present invention discloses methods for extracting and recycling hydrogen in an MOCVD process by FTrPSA. Through pretreatment, fine deamination, PSA hydrogen extraction, deep dehydration and hydrogen purification procedures, ammonia-containing waste hydrogen from an MOCVD process is purified to meet the electronic-level hydrogen (the purity is greater than or equal to 99.99999% v/v) standard required by the MOCVD process, to implement resource reuse of exhaust gases, where the hydrogen yield is greater than or equal to 75-86%. The present invention solves the technical problem that atmospheric-pressure or low-pressure waste hydrogen from MOCVD processes cannot be returned to the MOCVD processes for use after being recycled, and fills the gap in green and circular economy development of the LED industry.

Methods and systems for continuous pressure swing adsorption separation of a pressurized feed gas stream, the method including separating hydrocarbons heavier than methane from the pressurized feed gas stream to produce at least two product streams, a first product stream being substantially pure methane, and a second product stream being substantially comprised of components with a greater molecular weight than methane.

Methods and systems for continuous pressure swing adsorption separation of a pressurized feed gas stream, the method including separating hydrocarbons heavier than methane from the pressurized feed gas stream to produce at least two product streams, a first product stream being substantially pure methane, and a second product stream being substantially comprised of components with a greater molecular weight than methane.

A pressure swing adsorption gas production device that enables performing a desorption process in adsorption towers is provided. The device includes an off gas discharge route connected to the adsorption towers, a membrane separation unit with a separation membrane allowing miscellaneous gas in the off gas discharge route to pass faster than purification target gas, an off gas tank, and a pressure boosting unit that raises the pressure of and supplies the off gas to the membrane separation unit. The off gas tank and the pressure boosting unit are upstream of the membrane separation unit. The device includes a recycle gas return route via which some recycle gas is returned to the source gas supply route. The operation control unit adjusts the off gas adjustment unit so the off gas discharge flow rate is a flow rate where the amount of off gas discharged from one adsorption tower during the desorption process is equivalent to the amount of off gas discharged from the off gas tank when the one adsorption tower starts the desorption process until another starts the desorption process.

A three-product PSA system which produces three product streams from a feed gas mixture comprising a light key component, at least one heavy key component, and at least one intermediate key component is described. The three-product PSA system produces a high pressure product stream enriched in the light key component, a low pressure tail gas stream enriched in the at least one heavy key component, and an intermediate pressure vent gas stream enriched in the at least one intermediate key component.

A method of obtaining helium from a helium-containing feed gas. Helium-containing feed gas is fed to a prepurifying unit that uses a pressure swing adsorption process to remove undesirable components from the helium-containing feed gas and obtain a prepurified feed gas. The prepurified feed gas is fed to a membrane unit connected downstream of the prepurifying unit and that has at least one membrane more readily permeable to helium than to at least one further component present in the prepurified feed gas. A pressurized low-helium retentate stream that has not passed through the membrane is fed to the prepurifying unit. The pressurized low-helium retentate is used to displace helium-rich gas from an adsorber that is to be regenerated into an already regenerated adsorber.

Provided herein is a method for improving a gas recovery rate during generation of a high-purity gas. The method includes providing three or more adsorption towers filled with an adsorbent that adsorbs an adsorption target gas. Performing a pressure lowering equalization process in a first adsorption tower in which an adsorption process has been finished, and in a source gas supply state in which a source gas is supplied to at least a second adsorption tower in which a pressure increasing equalization process has been finished and the adsorption process is to be subsequently performed; and transferring a non-adsorbed gas from an upper portion of the first adsorption tower to the upper portion of the second adsorption tower, thereby performing an adsorption and pressure lowering equalization process in the first adsorption tower and an adsorption and pressure increasing equalization process in the second adsorption tower.

A three-product PSA system which produces three product streams from a feed gas mixture comprising a light key component, at least one heavy key component, and at least one intermediate key component is described. The three-product PSA system produces a high pressure product stream enriched in the light key component, a low pressure tail gas stream enriched in the at least one heavy key component, and an intermediate pressure vent gas stream enriched in the at least one intermediate key component.