Provided is a UFB generating apparatus that is capable of efficiently generating a UFB-containing liquid with high purity by controlling generation of UFBs in the liquid. A UFB generating apparatus includes a driving unit that drives a heating element included in a heating unit to generate film boiling in the liquid in contact with the heating element, and a control unit that controls driving conditions of the heating element by the driving unit.

Apparatus and methods for designing a system that measures deflection at multiple points and in various axes and how it relates to flow measurement are described. A system for continuously measuring the mass flow of a media includes one or more cartridges, one or more displacement sensing devices, and a processor. The one or more cartridges are connected serially between an inflow and outflow media pipe. The one or more displacement-sensing devices is configured to detect displacement changes of the one or more cartridges at two or more separate points on the cartridge(s) when the media flows through the cartridge(s). The processor is configured to calculate the flow of the media based on the detected displacement changes of the one or more cartridges at the one or more separate points.

The present invention comprises an ultrasound stirring device. The ultrasound stirring device includes an inner container body configured for accommodating solution, an outer container body accommodating the inner container body, an ultrasound generator located between the inner container body and the outer container body, a mounting base located a side of the outer container body far away from the inner container body and configured for supporting the outer container body, a first circuit board including a control circuit configured for controlling the ultrasound generator generate ultrasound to stir the solution, and a battery configured for supplying the first circuit board.

Dilute chemical solution production device has a plunger pump and a chemical solution supply pipe that supply a chemical solution from a chemical solution reservoir. The end of the chemical solution supply pipe serves as an injection point for the chemical solution. The chemical solution supply pipe is inserted to an approximately central position in the radial direction of an ultrapure water passage, which is a first pipe, via a bore-through joint. Conductivity meter as a conductivity measuring means is provided on the downstream side of the bore-through joint, which serves as the injection point, and is connected to the previously described control means so that the plunger pump can be controlled in accordance with the measured value of the conductivity meter. The dilute chemical solution production device is capable of producing, with a simple structure, a dilute chemical solution having an extremely low concentration of acid/alkali or the like.

A device (1) for producing a solution of at least one liquid first medium and at least one second medium has a first container (2) for the first medium and a second container (3) for the second medium. Each container (2, 3) is connected to a supply line of a static mixer (9) via a pump (4, 5) that can be regulated by a controller (6). A sensor (10) is connected to the controller (6) downstream of the static mixer (9) in the flow direction. A branching valve (17) is downstream of the static mixer (9) in the flow direction and is controlled by the controller (6). A sterile filter (11) is downstream of the static mixer (9) and has an RFID tag (15) that stores process-relevant data to at least be read by the controller (6). A method also is provided for producing a solution using the device.

A cleaning chemical liquid supply device includes: first and second mixers respectively mixing first chemical liquid with dilution water and respectively supplying to first and second nozzles respectively supplying the first chemical liquid adjusted to desired flow rates and concentrations to a first position and a second, different position of the substrate in the cleaning device; a first dilution water control box controlling flow rates of the dilution water supplied to the first and second mixers; third and fourth mixers respectively mixing second, different chemical liquid with the dilution water and respectively supplying to third and fourth nozzles for respectively supplying the second chemical liquid adjusted to desired flow rates and concentrations to a third position and a fourth, different position of the substrate in the cleaning device; and a second dilution water control box controlling flow rates of the dilution water supplied to the third and fourth mixers.

An apparatus has a platinum group metal carrying resin column provided in a supply line of ultrapure water, and has a pH adjuster injection device and a redox potential adjuster injection device provided in a later stage thereof. The apparatus has a membrane-type deaeration apparatus and a gas dissolving membrane apparatus sequentially provided in a later stage of the devices, and a discharge line communicates with the gas dissolving membrane apparatus. A pH meter and an ORP meter are each provided at some midpoint in the discharge line, and the pH meter and the ORP meter are connected to a control device. Then, the control device controls the amount of adjusters to be injected from the pH adjuster injection device and the redox potential adjuster injection device, on the basis of the measurement results of the pH meter and the ORP meter.

The invention provides methods for assessing one or more predetermined characteristics or properties of a microfluidic droplet within a microfluidic channel, and regulating one or more fluid flow rates within that channel to selectively alter the predetermined microdroplet characteristic or property using a feedback control.

This in-line active and reverse calculating mass balance blending system can maintain a chemical at desired control points, such as with respect to concentration, temperature, and/or pressure, while the output flow rate is changing dynamically to a point of use. A blending unit is configured to receive and blend at least two species and deliver a mixture at selected concentrations to points of use. A controller can be configured to determine a mass balance to maintain the concentrations in the mixture using information from metrology systems and a flow in an output to the at least one point of use. The controller also can be configured to maintain a concentrations in the mixture within a concentration range by controlling flow rates to the blending unit.

A medicament preparation system includes a disposable cartridge with a flow path. Various sensors may be placed on the cartridge to measure qualities of the fluid flowing through the flow path. The sensors are placed in precise locations using various approaches that make manufacturing of the cartridge efficient and repeatable. A drain line that is susceptible to fouling may be preattached and various approaches are used to remove or reduce the fouling. An elastomeric contact can also be present in the medical preparation system and used in a conductivity measurement subsystem.