A generator for processing gases to be delivered to a process chamber used to process a substrate includes a housing that encloses an internal volume. An ultraviolet (UV) bulb is disposed within the internal volume of the housing. The UV bulb has a bulb diameter that fits within the internal major dimension of the housing. A first region, which surrounds the UV bulb, channels a first gas around the UV bulb to cool the UV bulb. A second region, which surrounds the first region, channels a second gas between an input to and an output from the housing. The second region is oriented relative to the UV bulb such that UV energy therefrom interacts with the second gas as this gas flows through the second region. The interaction of the UV energy with the second gas results in the generation of a gas mix that is supplied from the output of the housing into the process chamber, where at least one component of the gas mix is to be used in processing of the semiconductor substrate.

An apparatus includes a base having first and second inlets. Inner and outer cylinders are disposed on the base, with the outer cylinder being concentric with the inner cylinder. An inner surface of the inner cylinder defines an internal volume. An outer surface of the inner cylinder and an inner surface of the outer cylinder define a chamber space. An ultraviolet lamp is disposed within the internal volume. A top cover is positioned over the inner and outer cylinders and in a sealing relationship with the cylinders. The top cover has a first passageway in flow communication with the chamber space, and a second passageway in flow communication with the internal volume. The first inlet is in flow communication with the chamber space and the second inlet is in flow communication with the internal volume. A system including a process chamber and an ammonia radical generator also is described.

An apparatus for halogenation of a polymer is disclosed. The apparatus includes a reactor, at least one light source, a stirrer and a heater. The reactor contains a slurry of the polymer. The light source is disposed outside of the reactor at a distance ranging from 0.5 centimeter to 2 centimeters for facilitating irradiance of the slurry. The light source radiates a light of wavelength in the range of 250 nm to 355 nm. The stirrer is adapted to agitate the slurry. The heater is adapted to heat the slurry of the polymer. The blades on the stirrer and light source are arranged in such a way that slurry is maintained in uniform motion and reacted homogeneously to achieve desired conversion efficiently.

There is provided a method for reducing the content of at least one water soluble volatile organic compound in a gas. The method comprises contacting the gas with an aqueous acidic oxidizing composition comprising H.sub.2O.sub.2 and a metal catalyst, and submitting the at least one water soluble volatile organic compound and the aqueous acidic oxidizing composition to an UV radiation.

An apparatus for producing a high purity stream of ozone including a reaction chamber having an inlet and an outlet, a gaseous feed stream having a first purified component and an ultraviolet source. The gaseous feed stream enters the reaction chamber through the inlet, the first purified component includes oxygen, the ultraviolet source forms ozone from the oxygen, and the ozone exits the reaction chamber through the outlet.

A photo-catalyzing fluid mobilizing system and method are disclosed. A chamber has a power source. A fluid mobilizer is mounted in the chamber and connected with the power source to mobilize a fluid through the chamber. The fluid mobilizer includes one or more fan blades that are coated with a photo catalyst. A UV light source is mounted in the chamber proximate the fluid mobilizer and connected with the power source to catalyze the photo catalyst coating the blades to purifier the fluid being mobilized thereover.

A light irradiation apparatus which has excellent maintainability despite an increase in its length and size is provided. A light irradiation apparatus includes a plurality of light irradiation modules arranged; and a casing which houses at least part of the plurality of light irradiation modules. The plurality of light irradiation modules each includes a light irradiation device, a heat-dissipating member, a cooling piping for supply, a cooling piping for discharge which discharges a coolant from the flow channel, an electrical wiring, and a cover. The casing includes a side-cover and an under-cover.

A photo-catalytic cell may produce bactericidal molecules in air by passing air across catalyst coated targets. Ultraviolet (UV) energy may be emitted from a source. A first portion of the UV energy from the source may be applied directly onto the targets. A second portion of the UV energy from the source may be reflected onto the targets.

The present invention provides a chlorine dioxide generation unit that can release practically sufficient amount of chlorine dioxide for an extended period of time while being compact. The present invention provides a chlorine dioxide generation unit, characterized in that said unit comprises an agent storage space portion and at least two light source portions, said light source portion is for generating light consisting of wavelengths substantially in the visible region, said agent storage space portion stores an agent comprising solid chlorite, and said agent storage space portion comprises one or more openings so that air could move in and out of said agent storage space portion, wherein chlorine dioxide gas is generated by irradiating said light generated from said light source portion onto said agent present inside said agent storage space portion.

The present disclosure relates to a process for chlorination of a polymer. The process of the present disclosure includes minimum use of light and maximum chlorine utilization for getting maximum chlorination yield. The chlorinated polymer obtained by the process of the present disclosure exhibit improved properties viz. thermal stability, color, inherent viscosity and mechanical properties.