A metering distribution assembly and a coating system. The metering distribution assembly includes a volumetric cavity pump that comprises a flow passage plate having flow passages, a nozzle plate with a flow passage, a gear fixing plate attached between the flow passage plate and the nozzle plate, and a gear set located in an aperture of the fixing plate. The gear set has a fluid inlet and a fluid outlet on a side of the gear set opposite to the fluid inlet. The fluid inlet is in fluid communication with the flow passages of the flow passage plate, and the fluid outlet is in fluid communication with the flow passage of the nozzle plate. A part of the flow passages of the flow passage plate, which is in direct fluid communication with the fluid inlet, extends in a direction parallel to a rotation axis of the gear set.

An apparatus for processing a substrate by supplying a processing gas to the substrate in a processing container. The apparatus comprises: a mounting table provided in the processing container and for mounting the substrate; a gas shower head comprising a gas diffusion space provided at a position facing the mounting table and for diffusing the processing gas, and a shower plate having a plurality of gas supply holes for supplying the processing gas diffused in the gas diffusion space to the processing container; a gas supply portion provided to supply the processing gas to the gas diffusion space and having a flow rate adjusting portion for the processing gas; a pressure sensor portion provided in the gas diffusion space and to output a pressure signal corresponding to a pressure measurement value in the gas diffusion space; and a controller to output a control signal for adjusting a flow rate of the processing gas.

A method for applying a fluid filling material into a cavity of a component including conveying the filling material by at least one metering device with a predetermined flow rate to an applicator, injecting the filling material by the applicator into the cavity of the component establishing an injection pressure, measuring the injection pressure by means of a pressure sensor, determining a first pressure increase of the injection pressure, and reducing the flow rate of the metering device at a first switchover point at the first pressure increase of the injection pressure.

Proposed is a dual slot die coater, which includes a first die block provided with a first manifold for accommodating the first coating material, a second die block provided on one side of the first die block, a third die block interposed between the first die block and the second die block, a second manifold provided in either the second die block or the third die block and accommodating a second coating material, and a temperature controller provided in the first die block and capable of controlling temperature.

A coating apparatus includes a discharge unit, a moving unit, and a controller. The discharge unit includes a nozzle array with a plurality of nozzles, and is configured to discharge a coating material from each of the plurality of nozzles. The moving unit is configured to move a position of the discharge unit with respect to a to-be-coated surface along a plurality of paths. The controller is configured to determine, based on coating information, a width of a recoated portion on which the coating material is discharged in an overlapping manner between two adjacent paths among the plurality of paths, and determine a discharge amount from each of the plurality of nozzles so that a discharge amount from each of nozzles at an end portion of the nozzle array corresponding to the recoated portion is less than a discharge amount from each of other nozzles of the nozzle array.

The inventive concept provides a liquid storage unit. The liquid storage unit includes a tank housing defining a storing space therein; a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and wherein a first guide surface is provided between the outlet and the inlet.

An apparatus for dispensing a liquid comprising: a supply flow path; a pressurised liquid source arranged to supply pressurised liquid to the supply flow path; a junction downstream of the pressurised liquid source, wherein at the junction the supply flow path is branched into a dispense flow path and a return or drain flow path; and a valve or pump in the return or drain flow path downstream of the junction.

A device for conveying viscous material to an applicator has a conveying cylinder in which a double-acting conveying piston is movable to and fro. The conveying cylinder has first and second chambers separated from one another by the conveying piston. Each chamber has a material inlet and outlet. A conveying device is connected to the material inlets for the pressurized introduction of viscous material into the conveying cylinder chambers, and a valve device closes and opens the material inlets and outlets. In a first switching position, the valve device opens the first chamber material inlet and the second chamber material outlet and closes the second chamber material inlet and the first chamber material outlet and, in a second switching position, releases the second chamber material inlet and the first chamber material outlet and closes the first chamber material inlet and the second chamber material outlet.

Embodiments included herein are directed towards apparatuses, systems, and methods for fluid dispensing. Embodiments may include piezo-actuated valves, dispense cassettes, and closed loop systems for regulating pressure associated with fluid dispensers. Embodiments of an apparatus may include a piezo-actuated valve and a dispense cassette.

Provided is a system for supplying a photoresist. In an embodiment, a system for supplying a photoresist includes a pressure adjustment container provided to a supply line connected from a chemical liquid bottle to a first tank, and the pressure adjustment container includes a housing having a space formed therein, a separator separating the space of the housing into a first space and a second space, an inflow port making a photoresist flow in the first space, a discharge port discharging the photoresist from the first space, and a pressurized fluid inflow port supplying a pressurized fluid to the second space, and a volume of the first space varies depending on the supply of the pressurized fluid.