A method monitors a device for applying an at least two-component viscous material to workpieces, including a metering unit having a number of metering valves corresponding with the number of viscous material components, and a static mixer detachably secured to the metering unit for component blending. The static mixer has a material inlet facing the metering unit and a material outlet facing away from the metering unit. Each metering valve has a supply channel sealingly connectable to a valve seat for supplying the respective component to the static mixer. A number of material applications are carried out consecutively, each having an identical predetermined time between start and end of the application. During the applications, between the start and the end, at predetermined times, the pressure in at least one supply channel is measured by a pressure sensor and preferably measured in all supply channels by a respective pressure sensor.

A substrate processing apparatus includes a supercritical fluid producing apparatus including a pump configured to send out a processing fluid; a processing container configured to perform a supercritical fluid processing on a substrate with a processing fluid in a supercritical state sent from the supercritical fluid producing apparatus; and a controller configured to control at least the supercritical fluid producing apparatus. When a pressure increase is performed within the processing container by using the processing fluid, the controller determines a first supply rate at which the processing fluid is supplied to the processing container based on a target time during which the pressure increase is performed, an amount of the processing fluid required for the pressure increase and a density of the processing fluid. Further, the supercritical fluid producing apparatus supplies the processing fluid to the processing container based on the first supply rate.

The present disclosure provides a coating device including a first storage tank for storing a material to be coated, a needle cannula to which the first storage tank is connected by means of a corresponding first line, a gas output device for outputting a first pressurized gas from a gas source, including a first gas output line extending into the first storage tank, wherein the gas output device is capable of outputting the first pressurized gas to the first storage tank through the first gas output line such that the material to be coated stored in the first storage tank is discharged under a gas pressure and enters the needle cannula through the first line.

According to one embodiment, a pump includes a first chamber configured to store a first fluid. The pump includes a second chamber configured to store a second fluid, the second chamber being positioned on a side of the first chamber. Volume of a space of the second chamber configured to store the second fluid is variable. The pump includes an elongated member having a first end portion and a second end portion, the first end portion provided in the second chamber and the second end portion provided in the first chamber.

A slot die coating apparatus according to one embodiment of the present disclosure includes: a slot die containing a first die block and a second die block, and a sensor unit for measuring the flow rate of an electrode active material slurry which is discharged through a discharge port formed by the coupling of the first die block and the second die block, wherein the sensor unit is formed inside the first die block, and the sensor unit is connected to the discharge port via an energy dissipation part and an energy absorption part.

In one embodiment, a substrate treatment apparatus includes a mixer configured to mix a first liquid including a metal element and a second liquid being basicity to generate a third liquid including the metal element and being basicity. The apparatus further includes a supplier configured to supply the third liquid to a substrate. The apparatus further includes a first flow path configured to convey the third liquid from the mixer to the supplier not through a filter that removes particles from the third liquid.

A device for intermittently applying a flowable substance to a substrate includes an applicator nozzle for applying the flowable substance to the substrate, a tank for holding the flowable substance, a pump for delivering the substance, wherein the pump is actively connected to the tank, and further including an actuator actively connected to the pump and transferred into two positions, in a first position the actuator conducts the substance to the applicator nozzle, and in a second position the actuator blocks the feed to the applicator nozzle, and further including a control device for activating the actuator and for regulating the speed of the pump. A method for applying the substance using the device is also provided.

A device for dispensing a flowable medium, includes a housing having a cavity for receiving the flowable medium, a rod mounted in a bearing section of the housing, wherein the rod is movable by means of an actuator between a first end position and a second end position in an axial direction, a dispensing opening, opening into the cavity, for dispensing the flowable medium, wherein the rod has a sealing section, wherein the sealing section closes the dispensing opening in the first end position and is arranged at a distance from the dispensing opening in the second end position, a bellows seal for sealing off the bearing section from the cavity, wherein the rod passes through the bellows seal, wherein the bellows seal is mounted in a sealed manner on the rod and in a sealed manner on the housing, wherein a first section of the bellows seal is connected to the rod in a manner fixed relative to the rod, and a second section of the bellows seal is connected to the housing in a manner fixed relative to the housing, wherein the bellows seal has at least one compensating section for compensating an axial compression or extension of the bellows seal, wherein the compensating section projects radially relative to adjoining regions of the bellows seal, and having at least one channel, opening into the cavity, through which the flowable medium can flow into the cavity, wherein a projection of a center line of a channel section of the at least one channel, said channel section opening into the cavity, onto a projection plane formed perpendicularly to the axial direction forms a circle tangent of a circle formed concentrically with the rod.

A control system including a discharge control circuit configured to control an application device such that a coating is discharged from a discharge circuit; a robot control circuit configured to cause an articulated robot to change a position and an orientation of the discharge circuit such that the coating is applied to a workpiece; an application abnormality detection circuit configured to detect an abnormality in an application state of the coating on the basis of at least one of a state of the device or of the robot; an application position calculation circuit configured to calculate an application position of the coating; and an abnormality notification circuit configured to send a notification of a site of an abnormality in the application state on the workpiece on the basis of a detection result of the abnormality in the application state and a calculation result of the application position.

The present technology relates to an electrode slurry coating method and apparatus comprising a pressure adjustment member for adjusting the discharge pressure of slurry, and enables electrode slurry to be discharged under constant pressure even when a coated part and an uncoated part are repeatedly formed on a current collector layer.