A substrate processing method includes forming a pre-coat film on an in-chamber part disposed in a chamber, and subsequently processing one or more substrates. The forming a pre-coat film includes forming a first film on the in-chamber part without using plasma or by using a first plasma generated under a condition that sputtering is suppressed on the in-chamber part, and forming a second film on a surface of the first film by using a second plasma.

A pharmaceutical packaging comprising a silicone-free lubricating film of crosslinked organic molecules. The method for producing the pharmaceutical packaging comprises: applying a silicone-free organic fluid as a film on a surface of a hollow substrate for the lubricating film; placing the substrate in a vacuum reactor; evacuating the vacuum reactor; generating an alternating electromagnetic field by an AC voltage source; and introducing the alternating electromagnetic field into the interior of the substrate, a field strength thereof in the gas which is present in or introduced into the evacuated cavity of the substrate being sufficient to cause a homogeneous glow discharge under the pressure prevailing in the cavity of the substrate.

The present application relates to a method for preparing a barrier film. The present application can provide a method for preparing a barrier film having excellent barrier characteristics and optical performances. The barrier film produced by the method of the present application can be effectively used not only for packaging materials of as foods or medicines, and the like, but also for various applications, such as members for FPDs (flat panel displays) such as LCDs (Liquid Crystal Displays) or solar cells, substrates for electronic papers or OLEDs (Organic Light Emitting Diodes), or sealing films.

A method of forming a biocompatible or biologically inert article for use in an application in which the article will make contact with at least one tissue, organ, or fluid within a human or animal body is provided. The method generally comprises providing an article having an external surface; selecting chemical precursors; using a means to direct one or more chemical precursors towards or to apply such chemical precursors to the external surface; activating the chemical precursors by exposing said precursors to atmospheric pressure plasma; and grafting and/or cross-linking the chemical precursors to form a solid coating adjacent to the external surface of the article.

The disclosed technology relates to methods, apparatuses and systems for detecting molecules using surface plasmon resonance techniques, and more particularly to surface plasmon resonance techniques that employ metal nanoparticles formed on substrates. In one aspect, method of making a layer of metallic nanoparticles includes providing a liquid composition comprising a binder polymer and a solvent and at least partially immersing, into the liquid composition, an article comprising a polymeric surface, wherein the polymeric surface comprises a polymeric material and does not comprise an inorganic glass or crystalline material. The method additionally includes applying a gas phase plasma to the liquid composition to facilitate chemical reactions between the binder polymer and the polymeric material of the polymeric surface to form a binder layer on the polymeric surface of the article. The method further includes applying metallic nanoparticles onto the binder layer to form a metallic nanoparticle layer on the binder layer.

The invention relates to a lubricant coating (5) for a medical injection device (1), comprising successively: a bottom layer (50) in contact with the medical device surface (21) of the container to be lubricated, comprising a mixture of cross-linked and non-cross-linked poly-(dimethylsiloxane), an intermediate layer (51) consisting essentially of oxidized poly-(dimethylsiloxane) and having a thickness comprised between 10 and 30 nm and, a top layer (52) consisting essentially of non-cross-linked poly-(dimethylsiloxane) and having a thickness of at most 2 nm. The invention also relates to a medical injection device comprising such a lubricant coating, and a manufacturing process for said coating.

Discontinuous coatings and methods of forming such coatings including transiting a substrate through a vaporization area, providing a reactant vapor comprising at least one vaporized monomer or oligomer to the vaporization area, and chemically reacting the at least one vaporized monomer or oligomer to form a discontinuous layer on the substrate, optionally wherein chemically reacting further includes polymerization. The discontinuous layer may be a patterned, semi-patterned, or random discontinuous layer.

A method and system for nanoscale precision programmable profiling on substrates. Profiling material is dispensed on a substrate or a superstrate. The superstrate is brought in contact with the substrate. The profiling material is then cured after bringing the superstrate in contact with the substrate. The superstrate is separated from the substrate after curing. An optical metrology of points on the substrate corresponding to the final substrate profile is then performed.

The present invention discloses methods for producing an optically clear, biocompatible and durable hydrophilic coating for contact lenses comprising the steps of first applying a polymer coating on the contact lenses by plasma polymerization of monomers containing ethylene glycol groups, followed by incubating the coated contact lenses at an elevated temperature to remove the volatile residual monomers trapped inside the coating. Advantageously, such methods produce an optically clear, biocompatible and durable hydrophilic surface for contact lenses in a dry, solvent-free process.

To manufacture a coating for an article for a semiconductor processing chamber, the coating is applied to the article by a method including applying a sol-gel coating of Y.sub.2O.sub.3 over the article, and curing the sol-gel coating on the article by heating the article with the sol-gel coating and exposing the article with the sol-gel coating to plasma in a semiconductor manufacturing chamber.